• Nuclear Engineering and Technology
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• v.2 no.3
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• pp.185-191
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• 1970

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.62-62
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• 2015

In this study, we study the effects of CF4 plasma treatment on the characteristics of enhancement mode (E-mode) AlGaN/GaN high electron mobility transistors (HEMTs). The CF4 plasma is generated by inductively coupled plasma reactive ion etching (ICP-RIE) system. The CF4 gas is decomposed into fluorine ions by ICP-RIE and then fluorine ions will effect the AlGaN/GaN interface to inhibit the electron transport of two dimension electron gas (2DEG) and increase channel resistance. The CF4 plasma method neither like the recessed type which have to utilize Cl2/BCl3 to etch semiconductor layer nor ion implantation needed high power to implant ions into semiconductor. Both of techniques will cause semiconductor damage. In the experiment, the CF4 treatment time are 0, 50, 100, 150, 200 and 250 seconds. It was found that the devices treated 100 seconds showed best electric performance. In order to prove fluorine ions existing and CF4 plasma treatment not etch epitaxial layer, the secondary ion mass spectrometer confirmed fluorine ions truly existing in the sample which treatment time 100 seconds. Moreover, transmission electron microscopy showed that the sample treated time 100 seconds did not have etch phenomena. Atomic layer deposition is used to grow Al2O3 with thickness 10, 20, 30 and 40 nm. In electrical measurement, the device that deposited 20-nm-thickness Al2O3 showed excellent current ability, the forward saturation current of 210 mA/mm, transconductance (gm) of 44.1 mS/mm and threshold voltage of 2.28 V, ION/IOFF reach to 108. As IV concerning the breakdown voltage measurement, all kinds of samples can reach to 1450 V.

• Korean Journal of Materials Research
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• v.26 no.5
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• pp.258-265
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• 2016

Fluorine-doped tin oxide (FTO) nanoparticles have been successfully synthesized using ultrasonic spray pyrolysis. The morphologies, crystal structures, chemical bonding states, and electrochemical properties of the nanoparticles are investigated. The FTO nanoparticles show uniform morphology and size distribution in the range of 6-10 nm. The FTO nanoparticles exhibit excellent electrochemical performance with high discharge specific capacity and good cycling stability ($620mAhg^{-1}$ capacity retention up to 50 cycles), as well as excellent high-rate performance ($250mAhg^{-1}$ at $700mAg^{-1}$) compared to that of commercial $SnO_2$. The improved electrochemical performance can be explained by two main effects. First, the excellent cycling stability with high discharge capacity is attributed to the nano-sized FTO particles, which are related to the increased electrochemical active area between the electrode and electrolyte. Second, the superb high-rate performance and the excellent cycling stability are ascribed to the increased electrical conductivity, which results from the introduction of fluorine doping in $SnO_2$. This noble electrode structure can provide powerful potential anode materials for high-performance lithiumion batteries.

• Korean Journal of Materials Research
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• v.23 no.9
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• pp.517-524
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• 2013

The electrical and optical properties of fluorine-doped tin oxide films grown on polyethylene terephthalate film with a hardness of 3 using electron cyclotron resonance plasma with linear microwave of 2.45 GHz of high ionization energy were investigated. Fluorine-doped tin oxide films with a magnetic field of 875 Gauss and the highest resistance uniformity were obtained. In particular, the magnetic field could be controlled by varying the distribution in electron cyclotron deposition positions. The films were deposited at various gas flow rates of hydrogen and carrier gas of an organometallic source. The surface morphology, electrical resistivity, transmittance, and color in the visible range of the deposited film were examined using SEM, a four-point probe instrument, and a spectrophotometer. The electromagnetic field for electron cyclotron resonance condition was uniformly formed in at a position 16 cm from the center along the Z-axis. The plasma spatial distribution of magnetic current on the roll substrate surface in the film was considerably affected by the electron cyclotron systems. The relative resistance uniformity of electrical properties was obtained in film prepared with a magnetic field in the current range of 180~200A. SEM images showing the surface morphologies of a film deposited on PET with a width of 50 cm revealed that the grains were uniformly distributed with sizes in the range of 2~7 nm. In our experimental range, the electrical resistivity of film was able to observe from $1.0{\times}10^{-2}$ to $1.0{\times}10^{-1}{\Omega}cm$ where optical transmittance at 550 nm was 87~89 %. These properties were depended on the flow rate of the gas, hydrogen and carrier gas of the organometallic source, respectively.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.17 no.2
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• pp.47-51
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• 2007

F-doped SiOC : H thin films with low refractive index were deposited on Si wafer and glass substrate by plasma enhanced chemical vapor deposition (PECVD) as a function of rf powers, substrate temperatures, gas rates and their composition flow ratios ($SiH_4,\;CF_4$ and $N_2O$). The refractive index of the F-doped SiOC : H film continuously decreased with increasing deposition temperature and rf power. As $N_2O$ gas flow rate decreased, the refractive index of the deposited films decreased down to 1.3778, reaching a minimum value at rf power of 180W and $100^{\circ}C$ without $N_2O$ gas. The fluorine content of F-doped SiOC : H film increased from 1.9 at% to 2.4 at% as the rf power was increased from 60 W to 180 W, which results in the decrease of refractive index.

• KSTLE International Journal
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• v.6 no.1
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• pp.13-16
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• 2005

Friction characteristics at nano-scale of self-assembled monolayers (SAMs) having different chain lengths and end groups were experimentally studied.51 order to understand the effect of the chain length and end group on the nano-scalefriction: (1) two different SAMs of shorter chain lengths with different end groups such as methyl and phenyl groups, and (2)four different kinds of SAMs having long chain lengths (C10) with end groups of fluorine and hydrogen were coated on siliconwafer (100) by dipping method and Chemical Vapour Deposition (CVD) technique. Their nano-scale friction was measuredusing an Atomic Force Microscopy (AFM) in the range of 0-40 nN normal loads. Measurements were conducted at the scanning speed of 2 $mu$m/s for the scan size of 1$mu$m x 1 $mu$m using a contact mode type $Si_3N_4$ tip (NPS 20) that had a nominal spring constant0.58 N/m. All experiments were conducted at anlbient temperature (24 $pm$1$circ$C) and relative humidity (45 $pm$ 5%). Results showedthat the friction force increased with applied normal load for all samples, and that the silicon wafer exhibited highest frictionwhen compared to SAMs. While friction was affected by the inherent adhesion in silicon wafer, it was influenced by the chainlength and end group in the SAMs. It was observed that the nano-friction decreased with the chain length in SAMs. In the caseof monolayers with shorter length, the one with the phenyl group exhibited higher friction owing to the presence of benBenerings that are stiffer in nature. In the case of SAMs with longer chain length, those with fluorine showed friction values relativelyhigher than those of hydrogen. The increase in friction due to the presence of fluorine group has been discussed with respect tothe siBe of the fluorine atom.

• Journal of Korean society of Dental Hygiene
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• v.8 no.1
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• pp.59-71
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• 2008

This study was conducted to provide basic data required for the development of dental hygiene project for babies by investigating the relationship between mothers' dental hygiene activities and their socio-economic characteristics and the dental hygiene activities of babies. The survey was carried out with questionnaire to 306 babies of ages from 4 to 7 years and their mothers, from January 5 to January 25, 2007, in 4 kindergartens in Masan, Korea. The collected data was processed with SPSS v.12.0 for frequency analysis and ${\chi}^2$-test per item, to obtain following conclusions. 1. The frequency of toothbrushing of children is two times, accounted for 52.3%, they brush the teeth by them, and accounted for 52.3%, Fluorine toothpaste 68.3%. 2. The frequency of meal of children is 3 times, accounted for 93.5%, they ingestcariogenic snack 1 time, accounted for 45.4%, and they ingest protective and detergent snackfrom dental caries 2 times, accounted for accounted for 45.1%. 3. The shorter the period of mothers' duration of visit to dentists, the more experiences of fluorine coating and help from parent in toothbrushing had the children (pE.01, pE.05). 4. Children of housewife mothers received help from parent in toothbrushing and take teeth care and clean snack more than those of working mothers (pE.05, pE.01). 5. The children of working mothers had fluorine coating more than those of housewife mothers (pE.05). The fluorine coating, toothbrusing, protection and eating green food of babies show significant differences according to the frequency of mothers' visit to dentists and occupation.

• Resources Recycling
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• v.27 no.5
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• pp.49-53
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• 2018

In developing an optimum steelmaking process, the purity of the product, environmental impact, capability and cost of the process should be considered. Desulfurization of molten iron is conducted during preliminary treatment stage before converter operation. Although fluorite is added as a desulfurizing agent in CaO and $CaCO_3$ based agents, the concentration of fluorine in slag is strictly regulated. In order to develop desulfurizing agent without fluorine, CaO was mixed with Al dross and ladle slag containing alumina. The characteristics and desulfurizing capacity of the CaO based desulfurizing agent thus prepared were tested by varying temperature of Kanvara Reactor. Our results showed that the desulfurizing capacity of the samples prepared in this work was found to be similar to that of the traditional desulfurizing agents with fluorine.

• Journal of the Korea Concrete Institute
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• v.18 no.4 s.94
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• pp.553-558
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• 2006

In this study, fluorine-silicate hybrid type crack reducing agent(FS) consisted of fluorine and silicate compounds applied to concrete mix(specification : 25-30-18) between 0.5% and 2.0% at intervals of 0.5% based on cement weight. Experiments for material properties of concrete such as slump, air content and bleeding with elapsed time were performed. Experiment and elucidation for shrinkage crack resistance as well as adiabatic hydration temperature were also carried out. It was appeared that FS addition contributed to lower bleeding and hydration temperature without disturbance of fresh properties of concrete such as slump and air content compared to non-added concrete. Especially, shrinkage crack resistance of concrete resulted from plastic and drying shrinkage could be effectively reduced by the addition of FS ranging from 1.0% to 1.5%.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.12 no.1
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• pp.42-49
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• 2002

Differences in electrode properties and in fluorine electrolysis behaviors of various carbon anodes, which were the YBD-like grade carbon, the YBD grade carbon and the P2X grade carbon, containing different pore sizes and distributions were investigated. The evaluations were performed by measuring their mechanical properties, cyclic voltammograms and chronoamperometries in 0.5 M $K_2SO_4$ solution with 1 mM $[[Fe(CN)_6]^\;{3-}/Fe(CN)_6$] $^{4-}$ redox couple and electrochemical behaviours of fluorine electrolysis in molten KF . 2HF electrolyte at $85^{\circ}C$. It was found that the P2X grade carbon anode showed better electrode properties in the cyclic voltammogram and chronoamperometry than the other carbon anodes while the YBD-like grade carbon anode which contained the pore size of 200~300$\mu$m showed superior electrode properties for fluorine electrolysis to the others. These differences in the electrode properties of various carbon anodes seemed to be owing to different sizes and distributions of pores on their surfaces.