• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• 상하수도학회지
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• 제18권4호
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• pp.500-507
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• 2004

This study was conducted to evaluate the equity of the flow distribution from rapid mixing basin to the flocculation basins. Also, several types of inlet structures of the open channel affecting the flow pattern and distribution trend were studied using Computational Fluid Dynamics (CFD) simulation. For investigating the factual phenomena in distribution channel, we selected a certain domestic water treatment plant with capacity of $361,000m^3/d$. From the measurements of flow discharge, it is investigated that this existing inlet geometry resulted in significant inequitable distribution. The both largest deviations in the basins and rows were over 10%. In order to reduce the these deviation, this study suggested installing a baffle against the influent, and showed the effectiveness which the largest deviation was less than 3%. Also, it was concluded that the existing design method of open channel could be improved by three-dimensional hydrodynamic analysis for optimizing the even flow.

• Agricultural and Biosystems Engineering
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• 제3권2호
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• pp.65-72
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• 2002

Temperature is the most influential environment parameter which affects the quality change of agricultural products in cold storage. Therefore, it is essential to keep the uniform temperature distribution in the storage room. This study was performed to analyze the air movement and temperature distribution in the forced recirculating cold storage facility and to simulate optimum storage method of green groceries using 3-D CFD(three dimensional computational fluid dynamics) computer simulation which applied the standard $textsc{k}$-$\varepsilon$ turbulence model and FVM(finite volume method). The simulation was validated by the experimental results for onion storage and the simulation model was used to simulate the temperature and velocity distribution in the storage room with reference to the change of storage method such as location of storage, no stores, bulk storage, and pallet storage. In case of no stores, internal airflow was circulated without stagnation and consequently air movement and temperature distribution were uniform. In case of bulk storage, air movement was stagnated so much and temperature distribution of onion was not uniform. Furthermore, the inner temperature of onion roses more than the initial temperature of storage. In case of pallet storage, air movement and temperature distribution of onion were so uniform that the danger of quality change was decreased.

• International Journal of Automotive Technology
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• 제8권5호
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• pp.575-581
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• 2007

As current and future automobile emission regulations become more stringent, the research on flow distribution for an exhaust manifold and close-coupled catalyst(CCC) has become an interesting and remarkable subjects. The design of a CCC and exhaust manifold is a formidable task due to the complexity of the flow distribution caused by the pulsating flows from piston motion and engine combustion. Transient flow at the exhaust manifold can be analyzed with various computational fluid dynamics(CFD) tools. However, the results of such simulations must be verified with appropriate experimental data from real engine operating condition. In this study, an experimental approach was performed to investigate the flow distribution of exhaust gases for conventional cast types and stainless steel bending types of a four-cylinder engine. The pressure distribution of each exhaust sub-component was measured using a simulated dynamic flow bench and five-hole pitot probe. Moreover, using the results of the pitot tube measurement at the exit of the CCC, the flow distribution for two types of manifolds(cast type and bending type) was compared in terms of flow uniformity. Based on these experimental techniques, this study can be highly applicable to the design and optimization of exhaust for the better use of catalytic converters to meet the PZEV emission regulation.

• 한국자동차공학회논문집
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• 제17권2호
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• pp.10-19
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• 2009

The working of diesel particulate filters(DPF) needs to periodically burn soot that has been accumulated during loading of the DPF. The prediction of the relation between an uniformity of gas velocity and soot regeneration efficiency with simulations helps to make design decisions and to shorten the development process. This work presents a comprehensive combined 'DOC+CDPF' model approach. All relevant behaviors of flow fluid are studied in a 3D model. The obtained flow fields in the front of DPF is used for 1D simulation for the prediction of the thermal behavior and regeneration efficiency of CDPF. Validation of the present simulation are performed for the axial and radial direction temperature profile and shows goods agreement with experimental data. The coupled simulation of 3D and 1D shows their impact on the overall regeneration efficiency. It is found that the flow non-uniformity may cause severe radial temperature gradient, resulting in degrading regeneration efficiency.

• 한국유체기계학회 논문집
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• 제11권5호
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• pp.44-49
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• 2008

As the alternative energy, renewable energy should have been developing by many techniques, in order to substitute the fossil fuel which will be disappeared in the near future. One of the small hydropower generator, main concept of tubular turbine is based on using the different water pressure levels in pipe lines, energy which was initially wasted by using a reducing valve at the end of the pipeline, is collected by turbine in the hydro power generator. A propeller shaped hydro turbine has been used in order to use this renewable pressure energy in order to acquire basic design data of tubular type hydraulic turbine, output power, head, efficiency characteristics due to the guide vane opening angle are examined in detail. First, it ensures the reliance of CFD by that of compared with experiment data. After all, the results of performance characteristics of the CFD and experiment show to confirm the data that power, head and efficiency of less than 4%, 2% and 5% respectively. Moreover influences of pressure, tangential and axial velocity distributions on turbine performance are investigated.

• 설비공학논문집
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• 제29권10호
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• pp.538-550
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• 2017

In a PWR (Pressurized Water Reactor), the appropriate heat removal from the surface of fuel rod bundle is important for ensuring thermal margins and safety. Although many CFD (Computational Fluid Dynamics) software have been used to predict complex flows inside fuel assemblies with mixing vanes, there is no domestic regulatory guideline for the comprehensive evaluation of CFD software. Therefore, from the nuclear regulatory perspective, it is necessary to perform the systematic assessment and prepare the domestic regulatory guideline for checking whether valid CFD software is used for nuclear safety problems. In this study, to provide systematic evaluation and guidance on the applicability of CFD software to the domestic nuclear safety area, the results of the sensitivity analysis for the effect of the discretization scheme accuracy for the convection terms and turbulence models, which are main factors that contribute to the uncertainty in the calculation of the nuclear safety problems, on the prediction performance for the turbulent flow distribution inside the fuel assembly with split-type mixing vanes were explained.

• Journal of Advanced Marine Engineering and Technology
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• 제32권8호
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• pp.1201-1207
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• 2008

Numerical analysis information will be very useful to improve fluid system. General information about an internal gas flow is presented by numerical analysis approach. Relating with hydrogen compressing system, which have an important role in hydrogen energy utilization, this should be a useful tool to observe the flow quickly and clearly. Flow characteristic analysis, including pressure and turbulence kinetic energy distribution of hydrogen gas coming to the cylinder of a reciprocating compressor are presented in this paper. Suction-passage model is designed based on real model of hydrogen compressor. Pressure boundary conditions are applied considering the real condition of operating system. The result shows pressure and turbulence kinetic energy are not distributed uniformly along the passage of the Hydrogen system. Path line or particles tracks help to demonstrate flow characteristics inside the passage. The existence of vortices and flow direction can be precisely predicted. Based on this result, the design improvement, such as reducing the varying flow parameters and flow reorientation should be done. Consequently, development of the better hydrogen compressing system will be achieved.

• 한국수소및신에너지학회논문집
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• 제31권3호
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• pp.293-301
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• 2020

This paper describes a numerical study on the improvement of performance of the 2 vane pump impellers. The design of these impellers was optimized using a commercial computation fluid dynamics code and design of experiments. Geometric design variables were defined by the impeller blade angle distribution. The objective functions were defined as the total head, total efficiency and solid material size of the impellers. The importance of the geometric design variables was analyzed using 2^k factorial designs. The interaction between the total head, total efficiency and solid material size, according to the impeller blade angle distribution, is discussed by analyzing the 2^k factorial design results.

• Journal of Biosystems Engineering
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• 제18권2호
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• pp.100-109
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• 1993

The aim of this study was to provide the reasonable data for design of the nozzle which produces finer droplets on the same level of the effective travel distance or which transports droplets to the farther target on the reasonable atomization in comparison with the commercial nozzles being used much in Korean rural areas. Newly designed twin-fluid atomizers with some commercial nozzles were tested in this study, and their results were as follows : 1. The characteristics of the spray deposit distribution of No.1 nozzles for farther target were nearly same in the near or nearer travel distance less than 8m. Therefore it was reasonable to combine the characteristics of the spray deposit distributions of No.2 and No.3 nozzles to those of No.1 nozzle. 2. The effective travel distance was increased with increase of the sectional area of the jet ligament, and the maximum effective travel distance was reached to about 17m. 3. The droplet size was increased with increase of the sectional area of the jet ligament, and the maximum droplet size was produced in the front of the point of the maximum spray deposit distribution. 4. The atomization was excellent in the twin-fluid atomizer in comparison with the hydraulic atomizer and also the effective travel distances were nearly same level in both atomizers.