• 제목/요약/키워드: Flow uniformity

검색결과 499건 처리시간 0.025초

Slit-Coater내의 Photo Resist의 코팅 특성 (Coating Characteristics of Photo Resist in a Slit-Coater)

  • 김장우;정진도;김성근
    • 반도체디스플레이기술학회지
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    • 제3권3호
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    • pp.41-44
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    • 2004
  • The aim of this study is the confirmation of the coating uniformity affected by the surface tension and wall attachment angle in a slit-coater model. In this work, we use the commercial code (Fluent) to solve the two-phase flow formed with air and photo resist numerically. The results show that the surface tension is the most important factor to determine the coating efficiency in the view of coating uniformity, and the coating uniformity is 2% for our slit-coater model and conditions. To improve the coating uniformity, it is in need of minimization of the sidewall effect of slit-coater.

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Development of a New Modeling Technique to Simulate 3-dimensional Electroplating System Considering the Effects of Fluid Flow

  • Lim, Kyung-Hwan;Lee, Minsu;Yim, Tai Hong;Seo, Seok;Yi, Kyung-Woo
    • Journal of Electrochemical Science and Technology
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    • 제10권4호
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    • pp.408-415
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    • 2019
  • Electroplating is a widely used surface treatment method in the manufacturing process of electronic parts and uniformity of the electrodeposition thickness is very crucial for these applications. Since many variables including fluid flow influence the uniformity of the film, it is difficult to conduct efficient research only by experiments. So many studies using simulation have been carried out. However, the most popular simulation technique, which calculates secondary current distribution, has a limitation on the considering the effects of fluid flow on the deposition behavior. And modified method, which is calculating a tertiary current distribution, is limited to a two-dimensional study of simple shapes because of the massive computational load. In the present study, we propose a new electroplating simulation method that can be applied to complex shapes considering the effect of flow. This new model calculates the electroplating process with three steps. First, the thickness of boundary layers on the surface of the cathode plane and velocity magnitudes at the positions are calculated from the simulation of fluid flow. Next, polarization curves of different velocities are obtained by calculations or experiments. Finally, both results are incorporated into the electroplating simulation program as boundary conditions at the cathode plane. The results of the model showed good agreements with the experimental results, and the effects of fluid flow of electrolytes on the uniformity of deposition thickness was quantitatively predicted.

공동주택단지 급수계통의 유량특성에 미치는 감압밸브의 영향 (Influence of Pressure Reducing Valves on Flow Characteristics of the Water Supply System for an Apartment Complex)

  • 김태진;차동진
    • KIEAE Journal
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    • 제12권6호
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    • pp.23-28
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    • 2012
  • Pressure distribution in the water supply system of an apartment complex consisting of 12 buildings and 635 units in total have been investigated numerically. The complex incorporates two zone booster pump system, and around a half of units have pressure reducing valves (PRVs) in them. Calculated hydrostatic pressure without the water flow were compared with their designed and measured counterparts, and they agreed quite well with each other. Then, the pressure and volumetric water flow rate at all units were analyzed, indicating that there are noticeable differences in pressure and flow rate in one unit to another, although the aforementioned minimization technologies of pressure deviation were employed. In order to further reduce the difference in the water flow rate, it is suggested that all the units in the complex have PRVs installed in their water supply system. The effect of setting pressure of the PRVs on the non-uniformity of the flow in each unit and on the reduction of total water supply for the apartment complex have been studied. With the same PRV setting pressure of 3.952 bar (or the gauge pressure of $3.0kg_f/cm^2$), it has been estimated that the suggested system improves the non-uniformity (the coefficient of variation) of the flow rate of apartment complex over the current system, from 8.02% to 6.66%, and reduces the total water supply, from $0.02804m^3/s$ to $0.02766m^3/s$.

Pressure and Flow Distribution in the Inlet Plenum of a Pebble Bed Modular Reactor (PBMR)

  • ;김광용
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2005년도 연구개발 발표회 논문집
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    • pp.244-249
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    • 2005
  • Flow distribution and pressure drop analysis for an inlet plenum of a Pebble Bed Modular Reactor (PBMR) have been performed using Computational Fluid Dynamics. Three-dimensional Navier-Stokes equations have been solved in conjunction with $k-{\epsilon}$ model as a turbulence closure. Non-uniformity in flow distribution is assessed for the reference case and parametric studies have been performed for rising channels diameter, Reynolds number and angle between the inlet ports. Also, two different shapes of the inlet plenum namely, rectangular shape and oval shape, have been analysed. The relative flow mal-distribution parameter shows that the flow distribution in the rising channels for the reference case is strongly non-uniform. As the rising channels diameter decreases, the uniformity in the flow distribution as well as the pressure drop inside the inlet plenum increases. Reynolds number is found to have no effect on the flow distribution in the rising channels for both the shapes of the inlet plenum. The increase in angle between the inlet ports makes the flow distribution in the rising channels more uniform.

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CVD 반응로 내부 회전 원판 주위의 유동 특성 연구 (A Study on the Flow Characteristics over the Rotating Susceptor in CVD Reactor)

  • 차관;김윤제;부진효
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집E
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    • pp.213-218
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    • 2001
  • The characteristics of the fluid flow and mass transfer in a vertical atmospheric pressure chemical vapor deposition (APCVD) are numerically studied. In order to get the optimal process parameters for the uniformity of deposition on a substrate, Navier-Stokes and energy equations have been solved for the pressure, mass-flow rate and temperature distribution in a CVD reactor. Results show that the thermal boundary condition at the reactor wall has an important effect in the formation of buoyancy-driven secondary cell when radiation effect is considered. Results also show that reduction of the buoyancy effect on the heated reactor improves the uniformity of deposition.

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PIV를 이용한 회류수조의 유속 분포 교정에 관한 연구 (Calibration of Water Velocity Profile in Circular Water Channel Using Particle Image Velocimetry)

  • 서성부;정광효
    • 한국해양공학회지
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    • 제25권4호
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    • pp.23-27
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    • 2011
  • This experimental study was performed to find rpms of the impeller and the surface flow accelerator to make a uniform velocity vertical distribution in the circular water channel. PIV technique was employed to measure the water velocity profiles into the water depth from the free surface. The number of instantaneous velocity profiles was decomposed into mean and turbulence velocity components, and the distribution of velocity fluctuation and turbulence intensity were computed for each experimental condition. From these results, the velocity uniformity was quantitatively determined to present the flow quality in the measuring section of the circular water channel. It has been shown that the proper operation of the surface flow accelerator would make the uniform velocity profiles and reduce the velocity fluctuation near the free surface.

반도체 공정용 수직로 설계를 위한 열유동 제어. (The Third National Congress on Fluids Engineering: Thermal design for the vertical type oven of soldering process.)

  • 정원중;권현구;조형희
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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    • pp.561-564
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    • 2006
  • Because of new requirements related to the employment of SMT(Surface Mounting Technology) manufacturing and the diversity of components on high density PCB(printed circuit boards), Thermal control of the reflow process is required in oder to achieve acceptable yields and reliability of SMT assemblies. Accurate control of the temperature distribution during the reflow process is one of the major requirements, especially in lead-free assembly. This study has been performed for reflow process using the commercial CFD tool(Fluent) for predicting flow and temperature distributions. There was flow recirculation region that had a weak point in the temperature uniformity. Porous plate was installed to prevent and minimize flow recirculation region for acquiring uniform temperature in oven. This paper provided design concept from CFD results of the steady state temperature distribution and flow field inside a reflow oven.

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선박용 SCR 시스템의 촉매반응기 내부 유동특성에 관한 수치해석 (A Numerical Analysis on the Flow Characteristics inner Catalytic Reactor for Marine SCR System)

  • 이중섭;서정세;윤지훈;임병주;박창대;정경열
    • 한국마린엔지니어링학회:학술대회논문집
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    • 한국마린엔지니어링학회 2012년도 전기공동학술대회 논문집
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    • pp.125-126
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    • 2012
  • The key issues for the reduction technologies of the exhaust gas from diesel engine being developed are to reduce particulate matters and NOx. Performance of NOx removal in SCR process depends on such various factors as catalyst factors(catalyst composition, shape, velocity, etc.), exhaust gas temperature and velocity distribution. In this study checked flow uniformity with the flow characteristics in the SCR reactor by using STAR CCM+. The pressure drop of experiment and simulation had similar result more than 90% at catalytic Cell. Also, flow uniformity calculated about 0.9036 ant 1st catalytic ind SCR reactor.

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전기집진기 내부의 유동 균일성 향상을 위한 가이드 배인의 최적설계 (Design of a Guide Vane for Improving Inside Flow Uniformity of Electrostatic Precipitator)

  • 노경욱;배성준;박숙희;강선균;이장명
    • 전기학회논문지
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    • 제62권4호
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    • pp.523-528
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    • 2013
  • In recent years, many efforts are increasingly being made to conserve the natural environment with enhanced emission standards and air quality standards. Also there are various methods necessary to be researched to minimize the emission of air pollutants. In particular, boilers of industrial facilities are major portions of the air pollution. The front duct which needs to be designed to reduce the gases to the electrostatic precipitator requires a bent tube, a reduction/extend tube and an auxiliary equipment, that is, a guide vane. This paper proposes an optimum design of the guide vane by a case study for electrostatic precipitator's flow uniformity. The operating conditions of this study are as follows: BMCR (Boiler Maximum Continuous Rate) and MGR (Maximum Guaranteed Rate) are 75%, 50%, and 30%; turbulent fluid dynamics model is based upon K-${\varepsilon}$ formulation. Presentation of the computed motion of particles is found to be quite useful to predict the precipitator performance by use CFD (Computational Fluid Dynamics).

점적 emitter 의 성능과 수리적 특성 (Performance and Hydraulic Characteristics of Drip Emitters)

  • 이남호
    • 한국농공학회지
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    • 제41권3호
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    • pp.33-40
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    • 1999
  • Variations in the discharge rates of drip emittes were examined to find the effects of operation pressure and the tube length and to evaluate performance of the emitters. Several point-source emitters were selected such as pressure compensated, anti-leak pressure compensated, turbulent flow regulated, flow regulated, ready-made dripper, and spaghetti. Combination of operation pressure and tube length were compared. The microirrigatioon system was operated at pressures of 0.5 , 1.0 , 1.5 and 2.0 bar. The discharge from emitters wer collected at every ten meters along the lateral tube and weighted. In order to evaluate the drip emitters performance coeffcient of discharge variation , statistical uniformity, and emission uniformity were calculated. No significant variation in discharge along drip tube resulted with all emitters. There is no trend of variatiiono of discharge rate from pressure compensated emitters with increase in operation pressures. But discharge rate from other types of emitters increased with increase in operation pressures. The nominal discharge of each emitter was secured at pressure of 1.0 bar, Evaluation using statiscal and emission uniformity coefficients indicated that most of the emitters excepts tubulent flow regulated emitter and ready-made dripper performed at excellent level.

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