• 한국유체기계학회 논문집
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• 제11권6호
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• pp.18-23
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• 2008

In this paper, effects of inlet shape on the performance of a submerged cargo pump were numerically studied using a commercial CFD code ANSYS-CFX. The inlet shape, especially the gap between pump and suction well, is an important parameter in a point of view of performances of submerged cargo pump due to its effects on the residual and also hydraulic performance of the pump, respectively. To investigate the optimized gap, the overall performance degradations were calculated with the gap. In addition to that, the flow field through the gap was investigated to explain the effect of velocity non-uniformity on the performance of the pump impeller.

• 한국정밀공학회지
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• 제20권1호
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• pp.85-90
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• 2003

Removal rate and Within Wafer Non-Uniformity (WIWNU), the most critical issues in Chemical Mechanical Polish (CMP) process, are related to the pressure distribution, wafer shape, slurry flow, mechanical property of pad and etc. Among them, wafer warp generated by other various manufacturing process of wafer may induce the deviation of pressure distribution on the backside of wafer. In the convex shaped wafer the pressure onto the backside of wafer is higher than that of perfectly flat shaped wafer. Besides, such an added pressure is in proportion to the curvature of wafer. That is, the bigger the curvature of wafer becomes the higher the removal rate goes. And the WIWNU is known to be directly related to the pressure distribution on the wafer as well. In other words, the deviation of pressure distribution is in proportion to the WIWNU. In this paper, it is found that the wafer shape may be modified through heating the backside of it and thus properly changed pressure onto the backside of it may improve the WIWNU.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.149-156
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• 2007

Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.

• 한국해양공학회지
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• 제21권5호
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• pp.9-17
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• 2007

This paper deals with the design and analysis of a 250kW class impulse turbine for wave energy conversion. Numerical analysis was performed using FLUENT. The size and the performance of a turbine required to provide a certain power can be estimated using a series of performance charts built through the present study. Temporal and spatial variations of flaw fields were also considered and compared with those of uniform inflow. It was concluded that a simple steady-flow analysis using performance charts still provided a practical and useful way to predict the design and performance of turbines.

• 한국유체기계학회 논문집
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• 제10권6호
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• pp.44-49
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• 2007

In this paper, effects of inlet shape on the performance of a submerged cargo pump were numerically studied using a commercial CFD code CFX. The inlet shape, especially the gap between pump and suction well, is an important parameter in a point of view of performances of submerged cargo pump due to its effects on the residual and also hydraulic performance of the pump, respectively. To know the optimized gap, the overall performance degradations were calculated with the gap. In addition to that, the flow field through the gap was investigated to explain the effect of velocity non-uniformity on the performance of the pump impeller.

• 한국유체기계학회 논문집
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• 제12권6호
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• pp.7-12
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• 2009

This paper presents a numerical study on the design of side-suction inlet geometry which is used for multi stage centrifugal pumps or inline centrifugal pumps. In order to achieve an optimum inlet geometry and to explain the interactions between the different geometric configurations, the three dimensional computational fluid dynamics and the design of experiment methods have been applied. Geometric design variables describing the cross sectional area distribution through the inlet were selected. The objective functions are defined as the non-uniformity of the velocity distribution at the passage exit which is just in front of the impeller eyes. From the 2k factorial design results, the most important design variable was found and the performance of the side suction inlet was improved compared to the base line shape.

• Applied Science and Convergence Technology
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• 제23권3호
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• pp.139-144
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• 2014

GaN deposition equipment and processes for the fabrication of white LEDs (Light Emitting Diode) using MOCVD (Metal Organic Chemical Vapor Deposition) were numerically modeled to analyze the effects of a reactive gas introduction strategy. The source gases, TMGa and $NH_3$, were injected from a shower head at the top of the chamber; the carrier gases, $H_2$ or $N_2$, were introduced using two types of injection structures: vertical and horizontal. Wafers sat on the holder at a radial distance between 100 mm and 150 mm. The non-uniformity of the deposition rates for vertical and horizontal injection were 4.3% and 3.1%, respectively. In the case of using $H_2$ as a carrier gas instead of $N_2$, the uniform deposition zone was increased by 20%.

• 한국정밀공학회지
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• 제21권5호
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• pp.32-37
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• 2004

Polishing processes are widely used in the glass, optical, die and semiconductor industries. Chemical Mechanical Polishing (CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. CMP is conventionally carried out using abrasive slurry and a polishing pad. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. This paper introduces the basic concept and fabrication technique of the next generation CMP pad using micro-molding method to obtain uniform protrusions and pores on the pad surface.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2005년도 연구개발 발표회 논문집
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• pp.405-412
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• 2005

Numerical and experimental investigations were conducted to assess the aerodynamic performance of several centrifugal compressors. In order to impose an appropriate physics at the interface between impeller and vaned diffuser numerically, two different techniques, frozen rotor and stage models, were applied and the simulation results were compared with the corresponding prototype test data. An equivalent sand-grain roughness height was utilized in the present computational study to consider a relative surface roughness effect on the stage performance simulated. From a series of investigations, it was found that the stage model is more suitable than the frozen rotor scheme for the steady interactions between impeller and diffuser in turbocompressor applications. It is supposed that the solution by frozen rotor scheme is inclined to overrate the non-uniformity of the flow fields. The predicted aerodynamic performance accounting for surface roughness effect shows favorable agreement with experimental data. Simulations based on the aerodynamically smooth surface assumption tend to overestimate the stage performance.

• 한국환경과학회지
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• 제30권12호
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• pp.983-991
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• 2021

The role of the distribution basin role is to apportion incoming raw water to the primary sedimentation basin as part of the water treatment process. The purpose of this study was to calculate the amount of water in the distribution basin using computational fluid dynamics (CFD) analysis and to find a way to improve any non-uniformity. We used the Taguchi method and the minitab tool as optimization methods. The results of the CFD calculation showed that the distribution flow had a deviation of 5% at the minimum inflow, 10% at the average inflow, and 22% at the maximum inflow. At maximum flow, the appropriate heights of the 7 weirs(C, D, A, B, E, F, G) were 40 mm, 20 mm, 20 mm, 0, 0, 0, and 20 mm, respectively, according to the Taguchi optimization tool. Here, the maximum deviation of the distribution amount was 9% and the standard deviation was 23.7. The appropriate heights of the 7 weirs, according to the Minitab tool, were 40 mm, 20 mm, 20 mm, 0, 0, 0, and 20 mm, respectively, for weirs C, D, A, B, E, F, and G. Therefore, the maximum deviation of the distribution amount was 8% and the standard deviation was 17.1, which was slightly improved compared to the Taguchi method.