• 제목/요약/키워드: Floating nozzle

검색결과 6건 처리시간 0.024초

선형 롤 CMP에서 플로팅 노즐을 이용한 연마 특성에 관한 연구 (A Study on the Polishing Characteristics Using Floating Nozzle in Linear Roll CMP)

  • 이치호;정해도
    • 한국정밀공학회지
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    • 제32권7호
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    • pp.627-631
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    • 2015
  • Conventional etching technology is in the face of problems such as dishing, erosion resulting from non-uniform removal of film. Advanced printed circuit board (PCB) requires accurate wire formation with the aid of planarization by chemical mechanical polishing (CMP). Linear roll CMP is a line contact continuous process which removes the film by pressurization and rotation while slurry is supplied to polishing pad attached to the roll. This paper focuses on the design of floating nozzle on the linear roll CMP equipment which makes the slurry supply uniformly on the roll pad. Experimental results show that removal rate using the floating nozzle increases 3 times higher than that without it and non-uniformity is less than 15%.

고체모터 가동노즐 추력벡터제어용 구동장치시스템의 제어특성 연구 (A Study on the Control Characteristics of Thrust Vector Control Actuation System for Movable Nozzle of Solid Motor)

  • 민병주;이희중;박문수;최형돈
    • 한국항공우주학회지
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    • 제33권1호
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    • pp.85-92
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    • 2005
  • 가동노즐의 회전운동을 가능케 하는 플렉스실 베어링은 고정되어 있지 않은 회전중심과 고체모터의 연소압력에 의한 압축운동 등과 같은 고유의 비선형 운동특성을 갖는다. 이를 극복하고 발사체의 정확한 자세제어를 수행하기 위해서 플렉스실 베어링 장착 가동노즐의 추력벡터제어용 구동장치시스템은 보상제어회로 구성을 위한 별도의 가동노즐 위치정보 궤환 센서인 카운터 포텐시오미터를 필요로 한다. 이를 반영한 고체모터 가동노즐 추력벡터제어용 구동장치시스템 시제품 및 시험평가장치, 보상제어회로에 대한 설계 및 제작, 시험이 수행되었다. 연계통합시험 결과를 바탕으로 플렉스실 베어링을 장착한 가동노즐의 고유특성과 이의 추력벡터제어에 사용되는 구동장치시스템의 제어특성을 분석하였으며 그 결과를 본 논문에 요약하였다.

수질 개선을 위한 침전산화수로 개발 (Development of Depot Encircled with Oxidation Canal for Water Quality Improvement)

  • 김원장;박상현
    • 한국농공학회지
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    • 제42권6호
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    • pp.83-89
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    • 2000
  • A depot encircled with contact oxidation canal has been developed to improve water qualityr. The depot is aimed to settle suspended solid in the flow. The oxidation canal is to contact the pollutants and oxygen in the surface of gravel filter to purify the water. The deposit of the pollutant in the depot is released by the drainage culvert located at the bottom of it. Aeration nozzle is installed to supply enough oxygen to the gravel filter layers in the bottom of the detent the flow and improve oxidation efficiency. From the experiment it is founded that 91% of SS, 39% of TN, 63% of TP and 77% of COD were removed in the system. The treatment efficiency of total nitrogen is rather lower than any other components, however, it would be higher when some floating vegetation is added in the primary clarifier. The depot and oxidation canal system would be useful to purify the flows in the mouth of the reservoirs or at the outlet of the drainage canal.

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비용 최소화를 위한 플래어 시스템의 배관 서포트 타입 최적설계 (Optimal Determination of Pipe Support Types in Flare System for Minimizing Support Cost)

  • 박정민;박창현;김태수;최동훈
    • 대한조선학회논문집
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    • 제48권4호
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    • pp.325-329
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    • 2011
  • Floating, production, storage and offloading (FPSO) is a production facility that refines and saves the drilled crude oil from a drilling facility in the ocean. The flare system in the FPSO is a major part of the pressure relieving system for hydrocarbon processing plants. The flare system consists of a number of pipes and complicated connection systems. Decision of pipe support types is important since the load on the support and the stress in the pipe are influenced by the pipe support type. In this study, we optimally determined the pipe support types that minimized the support cost while satisfying the design constraints on maximum support load, maximum nozzle load and maximum pipe stress ratio. Performance indices included in the design constraints for a specified design were evaluated by pipe structural analysis using CAESAR II. Since pipe support types were all discrete design variables, an evolutionary algorithm (EA) was used as an optimizer. We successfully obtained the optimal solution that reduced the support cost by 27.2% compared to the initial support cost while all the design requirements were satisfied.