• Title/Summary/Keyword: Floating nozzle

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A Study on the Polishing Characteristics Using Floating Nozzle in Linear Roll CMP (선형 롤 CMP에서 플로팅 노즐을 이용한 연마 특성에 관한 연구)

  • Lee, Chiho;Jeong, Haedo
    • Journal of the Korean Society for Precision Engineering
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    • v.32 no.7
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    • pp.627-631
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    • 2015
  • Conventional etching technology is in the face of problems such as dishing, erosion resulting from non-uniform removal of film. Advanced printed circuit board (PCB) requires accurate wire formation with the aid of planarization by chemical mechanical polishing (CMP). Linear roll CMP is a line contact continuous process which removes the film by pressurization and rotation while slurry is supplied to polishing pad attached to the roll. This paper focuses on the design of floating nozzle on the linear roll CMP equipment which makes the slurry supply uniformly on the roll pad. Experimental results show that removal rate using the floating nozzle increases 3 times higher than that without it and non-uniformity is less than 15%.

A Study on the Control Characteristics of Thrust Vector Control Actuation System for Movable Nozzle of Solid Motor (고체모터 가동노즐 추력벡터제어용 구동장치시스템의 제어특성 연구)

  • Min, Byeong-Joo;Lee, Hee-Joong;Park, Moon-Su;Choi, Hyung-Don
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.1
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    • pp.85-92
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    • 2005
  • The motion of flexseal bearing for movable nozzle has inherent nonlinear characteristics due to floating rotational center and compression by combustion pressure of solid motor. To perform precise attitude control in spite of these characteristics, the TVC actuation system requires counter potentiometer as an extra position feedback sensor of movable nozzle to form a compensated control loop. The prototype TVC actuation system, test equipments and compensated controller are newly designed, manufactured and tested in consideration of counter potentiometer. On the basis of integration test, the inherent characteristics of movable nozzle and control characteristics of its TVC actuation system are analyzed and summarized in this paper.

Development of Depot Encircled with Oxidation Canal for Water Quality Improvement (수질 개선을 위한 침전산화수로 개발)

  • 김원장;박상현
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.42 no.6
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    • pp.83-89
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    • 2000
  • A depot encircled with contact oxidation canal has been developed to improve water qualityr. The depot is aimed to settle suspended solid in the flow. The oxidation canal is to contact the pollutants and oxygen in the surface of gravel filter to purify the water. The deposit of the pollutant in the depot is released by the drainage culvert located at the bottom of it. Aeration nozzle is installed to supply enough oxygen to the gravel filter layers in the bottom of the detent the flow and improve oxidation efficiency. From the experiment it is founded that 91% of SS, 39% of TN, 63% of TP and 77% of COD were removed in the system. The treatment efficiency of total nitrogen is rather lower than any other components, however, it would be higher when some floating vegetation is added in the primary clarifier. The depot and oxidation canal system would be useful to purify the flows in the mouth of the reservoirs or at the outlet of the drainage canal.

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Optimal Determination of Pipe Support Types in Flare System for Minimizing Support Cost (비용 최소화를 위한 플래어 시스템의 배관 서포트 타입 최적설계)

  • Park, Jung-Min;Park, Chang-Hyun;Kim, Tea-Soo;Choi, Dong-Hoon
    • Journal of the Society of Naval Architects of Korea
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    • v.48 no.4
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    • pp.325-329
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    • 2011
  • Floating, production, storage and offloading (FPSO) is a production facility that refines and saves the drilled crude oil from a drilling facility in the ocean. The flare system in the FPSO is a major part of the pressure relieving system for hydrocarbon processing plants. The flare system consists of a number of pipes and complicated connection systems. Decision of pipe support types is important since the load on the support and the stress in the pipe are influenced by the pipe support type. In this study, we optimally determined the pipe support types that minimized the support cost while satisfying the design constraints on maximum support load, maximum nozzle load and maximum pipe stress ratio. Performance indices included in the design constraints for a specified design were evaluated by pipe structural analysis using CAESAR II. Since pipe support types were all discrete design variables, an evolutionary algorithm (EA) was used as an optimizer. We successfully obtained the optimal solution that reduced the support cost by 27.2% compared to the initial support cost while all the design requirements were satisfied.