• 한국군사과학기술학회지
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• 제19권4호
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• pp.476-482
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• 2016

In this study, a method using single Wheatstone bridge flexure has been presented to measure hinge moment acting on control surfaces of wind tunnel models. The structural simplicity of the flexure reduces difficulty regarding gauging and wire-routing, and also makes it feasible to install flexures even inside thin wings. Some flexures were designed and fabricated under typical aerodynamic loads in wind tunnel test, and the strains on the flexure according to applied loads were compared with the result of the analysis by finite element method. The relation between applied loads and output signals showed good linearity, and the standard deviation on the residual errors from linear equation obtained by least square method was within 1.0 % of the maximum design moments. In addition, the FEM analysis on the thickness of load-connecting part of the flexure showed that the sensitivity was improved as the thickness became thin as much as desired to avoid buckling.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.789-790
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.541-542
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1638-1642
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• 2003

Piezoactuator using a flexure hinge mechanism is often used in the precision stages. When the total size of the hinge mechanism become small compared with the deformation of the hinge mechanism, the geometrical nonlinearity makes a considerable error in the output displacement. In this research, the incremental method based on the matrix method is developed to model the effect of the geometrical nonlinearity. Developed modeling method is applied to derive the error of output displacement of the bridge-type hinge mechanism and its results are derived with respect to the design parameters. This method can be easily used to the design optimization of the hinge mechanism and analysis results show that the geometrical nonlinearity error should be considered to achieve a high accuracy to the piezoactuators.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.665-666
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• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• 한국정밀공학회지
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• 제33권7호
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• pp.579-586
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• 2016

This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.

• 한국기계가공학회지
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• 제7권2호
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• pp.60-65
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• 2008

The high-technology industries including a semi-conductor and an information communication need an ultra-precision technology from the technological points of view. Nano technology based on an ultra-precision technology is being studied to overcome the delicate technology that may occur in the semi-conductor fields. Then, the transferring equipment with high resolution and long displacement becomes an important technology. The goal of this study is to analyze the displacement magnification mechanism driven by piezoelectric actuator which has high resolution and fast response characteristics using flexure hinge with the merits of soft displacement, negligible back-lash and stick-slip, and no-lubrication. The analyses to reduce the magnification losses occurred during the magnification process are performed using ANSYS software based on FEM. The five design variables such as arm thickness, thickness of hinge, radius of hinge, length of input side at the 1st lever and magnification ratio of 1st lever are optimized to induce the maximum magnification ratio using Taguchi method.

• 한국강구조학회 논문집
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• 제21권4호
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• pp.403-411
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• 2009

본 연구에서는 1995년 고베 지진에 의해 손상을 입은 강 거더 교량에 대해 비선형 지진해석을 수행하였다. 해석수행을 위해 휨-축력 및 휨-전단-축력간의 상호작용을 모사할 수 있는 이력모델을 제안하였다. 제안된 이력모델은 힌지모델 형태로 구조해석 프로그램에 조인트 요소로 연결한 후, 힌지모델 사용한 간편한 해석기법을 교량 교각에 적용하였다. 휨-축력 상호작용을 고려한 해석결과는 상세한 화이버 요소 해석결과와 비교하였고, 좋은 상관관계를 나타내었다. 또한, 휨-축력-전단 상호작용을 고려한 해석결과는 지진하중을 받는 교각의 변위 요소별 검토가 가능하여 교각의 전체 변위성능 분석에 유용하게 사용할 수 있을 것으로 판단된다.

• 한국생산제조학회지
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• 제23권6호
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• pp.630-635
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• 2014

This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.

• 센서학회지
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• 제16권3호
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• pp.174-178
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• 2007

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm${\times}$1.5 mm. From the simulation results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about $12.87{\mu}V/Pa$ at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.