• 한국정밀공학회지
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• 제30권12호
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• pp.1281-1286
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• 2013

In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of $30{\mu}m$, the resolution of 20 nm, and the bandwidth of 400 Hz in each axis were obtained in the experiments.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2010년도 한국우주과학회보 제19권1호
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• pp.25.3-25.3
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• 2010

Our previous study used a bar-type reference mirror to measure the relative distance to the target surface. The target measurement accuracy was required to $1{\mu}m$ PV for aspheric optical surface up to 1m in diameter. Earlier system suffers from the reference surface deformation when the measuring part moves. In order to reduce the deformation, measuring part and the reference part separated from each order in the new design. This system utilizes a kinematic support assembly using invar flexure to minimize the reference surface deformation under gravity and vibration. The surface deformation requirement of reference mirror is defined as of $0.2{\mu}m$ under gravity and 40Hz vibration. The finite element results, shows reference mirror deformation of $0.164{\mu}m$. The first resonance mode was computed to analysis 46.05Hz for reference part and 43.44Hz for measuring part. Thesis satisfies the frequency requirement.

• 한국광학회지
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• 제22권6호
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• pp.262-268
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• 2011

한국천문연구원이 개발한 다목적적외선영상시스템(Multi-purpose IR Imaging System, MIRIS)은 과학기술위성 3호(STSAT-3)의 주탑재체이다. 지구관측카메라(Earth Observation Camera, EOC)는 MIRIS를 구성하는 두 개의 적외선 카메라 중에 하나로, 지구의 $3{\sim}5{\mu}m$ 파장대의 적외선을 관측하기 위한 카메라이다. EOC의 광학계는 카세그레인 방식으로써 구경이 100 mm이고, 주경과 부경은 모두 비구면 반사경이다. EOC 주경의 플렉서는 링 타입으로써 발사환경에서 주경이 겪을 수 있는 충격과 진동을 견디도록 예압을 가하며 주경을 지지한다. 이는 마치 리테이너로 렌즈를 지지하는 것과 같은 메커니즘으로 주경을 지지하기 위한 시도이다. 광기계 해석을 통해 EOC 주경이 효과적으로 지지되고 있음을 확인했다.