• Journal of the Korean Vacuum Society
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• v.3 no.1
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• pp.71-76
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• 1994

The electrical characteristics of the capacitor dielectric films of amorphous silicon-nit-ride-oxide(ANO) structures are compared with the capacitor dielectric films of oxide-nitride-oxide (ONO) structrues The electrical characteristics of ONO and ANO films were evaluated by high frequency(1 MHz) C-V high frequency C-V after constant voltage stree I-V TDDB and refresh time measurements. ANO films shows good electrical characteristics such as higher total charge to breakdown storage capacitance and longer refresh time than ONO films. Also it makes little difference that leakage current and flat band voltage shyift(ΔVfb)of ANO ana ONO films.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.122-122
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• 2008

Recently, Metal/Alumina/Silicon-Nitride/Silicon-Oxide/Silicon (MANOS) structures are one of the most attractive candidates to realize vertical scaling of high-density NAND flash memory [1]. However, as ANO layers are miniaturized, negative and positive bias temperature instability (NBTI/PBTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density increase, ${\Delta}D_{it}$, the gate leakage current, ${\Delta}I_G$. and the retention characteristics, in MONOS capacitors, becomes an important issue in terms of reliability. It is well known that tunnel oxide degradation is a result of the oxide and interfacial traps generation during FN (Fowler-Nordheim) stress [2]. Because the bias temperature stress causes an increase of both interfacial-traps and fixed oxide charge could be a factor, witch can degrade device reliability during the program and erase operation. However, few studies on NBTI/PBTI have been conducted on improving the reliability of MONOS devices. In this work, we investigate the effect of post-annealing gas on bias temperature instability (BTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density shift, ${\Delta}I_G$ retention characteristics, and the gate leakage current characteristics of MANOS capacitors. MANOS samples annealed at $950^{\circ}C$ for 30 s by a rapid thermal process were treated via additional annealing in a furnace, using annealing gases $N_2$ and $N_2-H_2$ (2 % hydrogen and 98 % nitrogen mixture gases) at $450^{\circ}C$ for 30 min. MANOS samples annealed in $N_2-H_2$ ambient had the lowest flat band voltage shift, ${\Delta}V_{FB}$ = 1.09/0.63 V at the program/erase state, and the good retention characteristics, 123/84 mV/decade at the program/erase state more than the sample annealed at $N_2$ ambient.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.4
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• pp.349-356
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• 2007

The present study investigated local heat/mass transfer characteristics on the tip of the rotating turbine blade with various incoming flow incidence angles. The experiments are conducted in a low speed annular cascade with a single stage turbine. The blade has a flat tip with a mean tip clearance of 2.5% of the blade chord. The incoming flow Reynolds number is $1.5{\times}10^5$ at design condition. To examine the effect of off-design condition, the experiments with various incidence angles ranging between $-15^{\circ}$ and $+7{\circ}$ were conducted. A naphthalene sublimation method is used to measure detailed mass transfer coefficient on the blade. The results indicated that the incidence angle strongly affects the behavior of tip leakage flow around the blade tip and consequently plays an important role in determining heat transfer characteristics on the tip. For negative incidence angles, the heat/mass transfer in the upstream region on the tip decreases by up to 20%. On the contrary, for positive incidence angles, much higher heat transfer coefficients are observed even with small increase of incidence angle.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.388-388
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• 2012

In this letter, We have investigated cell characteristics of the alloy FePt-NDs charge trapping memory capacitors with high-k $Al_2O_3$ dielectrics as a blocking oxide. The capacitance versus voltage (C-V) curves obtained from a representative MOS capacitor embedded with FePt-NDs synthesized by the post deposition annealing (PDA) treatment process exhibit the window of flat-band voltage shift, which indicates the presence of charge storages in the FePt-NDs. It is shown that NDs memory with high-k $Al_2O_3$ as a blocking oxide has performance in large memory window and low leakage current when the diameter of ND is below 2 nm. Moreover, high-k $Al_2O_3$ as a blocking oxide increases the electric field across the tunnel oxide, while reducing the electric field across the blocking layer. From this result, this device can achieve lower P/E voltage and lower leakage current. As a result, a FePt-NDs device with high-k $Al_2O_3$ as a blocking oxide obtained a~7V reduction in the programming voltages with 7.8 V memory.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.4
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• pp.738-742
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• 2007

The variations in the device characteristics of hydrogenated amorphous thin-film transistors (a-Si:H TFTs) were studied according to the processes of pixel electrode fabrication to make active-matrix flat-panel displays. The off-state current was about 1 pA and the switching ratio was over $10^6$ before fabrication of pixel electrodes; however, the off-state current increased over 10 pA after fabrication of pixel electrodes. Surface treatment on SiNx passivation layers using plasma could improve the off-state characteristics after pixel electrode process. $N_2$ plasma treatment gave the best result. Charge accumulation on the SiNx passivation layer during the deposition of transparent conducting layer might cause the increase of off-state current after the fabrication of pixel electrodes.

• Nuclear Engineering and Technology
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• v.54 no.9
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• pp.3478-3487
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• 2022

In this study, we incorporate an anisotropic scattering scheme involving spherical harmonics into the method of characteristics (MOC). The neutron transport solution in a light water reactor can be significantly improved because of the impact of an anisotropic scattering source with the MOC flat source approximation. Several problems are selected to verify the proposed scheme and investigate its effects and accuracy. The MOC anisotropic scattering source is based on the expansion of spherical harmonics with Legendre polynomial functions. The angular flux, scattering source, and cross section are expanded in terms of the surface spherical harmonics. Later, the polynomial is expanded to achieve the odd and even parity of the source components. Ultimately, the MOC angular and scalar fluxes are calculated from a combination of two sources. This paper presents various numerical examples that represent the hot and cold conditions of a reactor core with boron concentration, burnable absorbers, and control rod materials, with and without a reflector or baffle. Moreover, a small critical core problem is considered which involves significant neutron leakage at room temperature. We demonstrate that an anisotropic scattering source significantly improves solution accuracy for the small core high-leakage problem, as well as for practical large core analyses.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.16 no.11
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• pp.1179-1185
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• 1991

Ultrathin Reoxidized Nitrided Oxides were formed by lamp heated rapid thermal annealing in oxyzen at temperatures of $1050^{\circ}C$-$1100^{\circ}C$ for 20, 40 seconds. The electrical characteristics of ultrathin films were evaluated by leakage current breakdown voltage. TDDB. FN tunneling. Nitridation and reoxidition condition dependence of charge trapping properties. i.e.. the flat band voltage shift $({\Delta}V_{FB})$ and the increase of charge-to-breakdown $(Q_{BD})$ induced by a high field stress where studied. As the results of analysis. rapid thermal reoxidation was achieved striking improvement of dielectric integrity, the charge to breakdown was increased and flat band voltage shift was reduced.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.456-459
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• 2004

Analog film/screen systems have been being changed to a digital x-ray imaging device using direct conversion materials. Photocoductors for a direct detection flat-panel imager require high x-ray absorption, ionization and charge collection, low leakage current and large area deposition. In this work, $HgI_2$ films with excellent properties for x-ray detector were deposited by screen printing method. The thickness of $HgI_2$ film was about $150\;{\mu}m$. The passivation layer is fabricated using a-Se and parlyene, the both fabrication $HgI_2$ film were compared for analyzing the leakage current reduction. We measured electrical properties-leakage current, photosensitivity, SNR though I-V measurement, As the result, $HgI_2$ film using a-Se passivation layer had the greater

• 유체기계공업학회:학술대회논문집
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• 2004.12a
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• pp.140-150
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• 2004

In this study, the effect of relative position of the blade for the fixed vane has been investigated on blade surface heat transfer. The experiments were conducted in a low speed stationary annular cascade, and heat transfer of blade was examined for six positions within a pitch. Turbine test section has one stage composed of sixteen guide vanes and blades. The chord length of the tested blade is 150 mm and the mean tip clearance of the blade having flat tip is about $2.5\%$ of the blade chord. For the detailed mass transfer measurements on the blade surfaces, a naphthalene sublimation technique was used. The inlet flow Reynolds number is fixed to $1.5{\times}10^5$. Complex heat transfer characteristics are observed on the blade surface due to various flow characteristics, such as separation bubble, relaminarization, transition to turbulence and leakage vortices. The distributions of velocity and turbulence intensity change significantly with the relative position due to the blockage effect of the blade. This causes the variation of heat transfer patterns on the blade surface. The results show that the flow near the leading edge get highly disturbed and deflected toward the either side of the blade when the blade leading edge is positioned close to the trailing edge of the vane. Therefore, separation bubble disappears on the pressure side and overall heat transfer on the relaminarization region is increased. But, due to reduced tip gap flow at the upstream region, the effect of leakage flow on the upstream region of the blade surface is weakened. Thus, the heat transfer characteristics significantly change with the blade positions.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.4 s.235
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• pp.485-494
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• 2005

For the extensive investigation of local heat/mass transfer on the near-tip surface of turbine blade, experiments were conducted in a low speed stationary annular cascade. The turbine test section has a single stage composed of sixteen guide vanes and blades. The chord length and the height of the tested blade are 150 mm and about 125 mm, respectively. The blade has flat tip geometry and the mean tip clearance is about $2.5{\%}$ of the blade chord. Detailed mass transfer coefficient on the blade near-tip surface was obtained using a naphthalene sublimation technique. The inlet flow Reynolds number based on chord length and incoming flow velocity is changed from $1.0{\times}10^{5}\;to\;2.3{\times}10^{5}.$ Extremely complex heat transfer characteristics are observed on the blade surface due, to complicated flow patterns, such as flow acceleration, laminarization, transition, separation bubble and tip leakage flow. Especially, the suction side surface of the blade has higher heat/mass transfer coefficients and more complex distribution than the pressure side surface, which is related to the leakage flow. For all the tested Reynolds numbers, the heat/mass transfer characteristics on the turbine blade are the similar. The overall averaged $Sh_{c}$ values are proportional to $Re_{c}^{0.5}$ on the stagnation region and the laminar flow region such as the pressure side surface. However, since the flow is fully turbulent in the near-tip region, the heat/mass transfer coefficients are proportional to $Re_{c}^{0.8}.$