• Title/Summary/Keyword: Flat Evaporator

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Fabrication of Artificial Sea Urchin Structure for Light Harvesting Device Applications

  • Yeo, Chan-Il;Kwon, Ji-Hye;Kim, Joon-Beom;Lee, Yong-Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.380-381
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    • 2012
  • Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.

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Microwave와 Solution ZrO2를 이용한 Metal-Oxide-Semiconductor-Capacitor 제작

  • Lee, Seong-Yeong;Kim, Seung-Tae;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.206.1-206.1
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    • 2015
  • 최근에 금속산화물을 증착하는 방법으로 용액공정이 주목 받고 있다. 용액 공정은 대기압에서 매우 간단한 방법으로 복잡한 공정과정을 요구하지 않기 때문에 박막을 경제적으로 간단하게 형성할 수 있다. 하지만 용액공정을 통해 형성한 박막에는 소자의 특성을 열화 시키는 solvent와 탄소계열의 불순물을 많이 포함하고 있어 고온의 열처리가 필수적이다. 박막의 품질을 향상시키기 위해서 다양한 열처리 방법들이 이용되고 있으며, 일반적인 열처리 방법으로는 furnace를 이용한 conventional thermal annealing (CTA)이 많이 이용되고 있다. 하지만, 최근에는 microwave를 이용한 공정이 주목 받고 있다. Microwave energy는 CTA보다 효과적으로 비교적 낮은 온도에서 높은 열처리 효과를 나타낸다. 본 실험은 n-type Silicon 기판에 solution-ZrO2 산화막을 형성 후, oven baking을 한 뒤, CTA와 microwave를 이용하여 solvent와 불순물을 제거 하였다. 전기적 특성을 확인하기 위해 solution ZrO2 산화막 위에 E-beam evaporator를 이용해 Ti 금속 전극을 증착하여 Metal-Oxide-Semiconductor (MOS) capacitor를 제작하였다. 다음으로, PRECISION SEMICONDUCTOR PARAMETER ANALYZER (4156B)를 이용하여, capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 비교하였다. 다음으로, CTA를 통하여 제작한 소자와 전기적 특성을 비교하였다. 그 결과, Microwave irradiation으로 열처리한 MOS capacitor 소자에서 capacitance 값과 flat band voltage, hysteresis 등이 개선되는 효과를 확인하였다. Microwave irradiation 열처리는 100oC 미만의 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 ZrO2 용액의 불순물과 solvent를 낮은 온도에서 제거하여 고품질 박막 형성에 매우 효과적이라는 것을 나타낸다. 따라서, microwave irradiation 열처리 방법은 비정질 산화막이 포함되는 박막 transistor 소자 제작에 대하여 결정적인 열처리 방법이 될 것으로 기대한다.

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Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2012 (설비공학 분야의 최근 연구 동향 : 2012년 학회지 논문에 대한 종합적 고찰)

  • Han, Hwataik;Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Choi, Jong Min;Park, Jun-Seok;Kim, Sumin
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.25 no.6
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    • pp.346-361
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    • 2013
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2012. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. The conclusions are as follows : (1) The research works on thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and valves, fuel cells and power plants, ground-coupled heat pumps, and general heat and mass transfer systems. Research issues are mainly focused on new and renewable energy systems, such as fuel cells, ocean thermal energy conversion power plants, and ground-coupled heat pump systems. (2) Research works on the heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer, and industrial heat exchangers. Researches on heat transfer characteristics included the results for natural convection in a square enclosure with two hot circular cylinders, non-uniform grooved tube considering tube expansion, single-tube annular baffle system, broadcasting LED light with ion wind generator, mechanical property and microstructure of SA213 P92 boiler pipe steel, and flat plate using multiple tripping wires. In the area of pool boiling and condensing heat transfer, researches on the design of a micro-channel heat exchanger for a heat pump, numerical simulation of a heat pump evaporator considering the pressure drop in the distributor and capillary tubes, critical heat flux on a thermoexcel-E enhanced surface, and the performance of a fin-and-tube condenser with non-uniform air distribution and different tube types were actively carried out. In the area of industrial heat exchangers, researches on a plate heat exchanger type dehumidifier, fin-tube heat exchanger, an electric circuit transient analogy model in a vertical closed loop ground heat exchanger, heat transfer characteristics of a double skin window for plant factory, a regenerative heat exchanger depending on its porous structure, and various types of plate heat exchangers were performed. (3) In the field of refrigeration, various studies were executed to improve refrigeration system performance, and to evaluate the applicability of alternative refrigerants and new components. Various topics were presented in the area of refrigeration cycle. Research issues mainly focused on the enhancement of the system performance. In the alternative refrigerant area, studies on CO2, R32/R152a mixture, and R1234yf were performed. Studies on the design and performance analysis of various compressors and evaporator were executed. (4) In building mechanical system research fields, twenty-nine studies were conducted to achieve effective design of mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, renewable energy systems, and lighting systems in buildings. New designs and performance tests using numerical methods and experiments provide useful information and key data, which can improve the energy efficiency of buildings. (5) In the fields of the architectural environment, studies for various purposes, such as indoor environment, building energy, and renewable energy were performed. In particular, building energy-related researches and renewable energy systems have been mainly studied, reflecting interests in global climate change, and efforts to reduce building energy consumption by government and architectural specialists. In addition, many researches have been conducted regarding indoor environments.