• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.138-139
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• 2007

The use of conventional Twyman and Fizeau interferometers inevitably fails in testing high precision optics because of errors always existing in reference elements producing the reference wavefront. Therefore it is necessary to apply to this task the interferometers of a radically new type, which are able to produce perfect reference wavefront with the help of light diffraction by a small obstacle or pinhole. In this paper new theoretical approaches and schematics of point diffraction interferometers are considered in detail with paying attention to constructive reliability. Such interferometers do not use reference optical surfaces and readily provide adequate estimation of errors and aberrations value of 0.01 wavelengths.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Publications of The Korean Astronomical Society
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• v.32 no.1
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• pp.359-361
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• 2017

We report our research on aluminum mirror optics for future infrared astronomical satellites. For space infrared missions, cooling the whole instrument is crucial to suppress the infrared background and detector noise. In this aspect, aluminum is appropriate for cryogenic optics, because the same material can be used for the whole structure of the instrument including optical components thanks to its excellent machinability, which helps to mitigate optical misalignment at low temperatures. We have fabricated aluminum mirrors with ultra-precision machining and measured the wave front errors (WFEs) of the mirrors with a Fizeau interferometer. Based on the power spectral densities of the WFEs, we confirmed that the surface accuracy of all the mirrors satisfied the requirements for the SPICA Coronagraph Instrument. We then integrated the mirrors into an optical system, and examined the image quality of the system with an optical laser. As a result, the total WFE is estimated to be 33 nm (rms) from the Strehl ratio. This is consistent with the WFEs estimated from the measurement of the individual mirrors.