• 한국안전학회지
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• 제32권2호
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• pp.34-37
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• 2017

In recent emerging industry, Display field becomes bigger and bigger, and also semiconductor technology becomes high density integration. In Flat Panel Display, there is an issue that electrostatic phenomenon results in fine dust adsorption as electrostatic capacity increases due to bigger size. Destruction of high integrated circuit and pattern deterioration occur in semiconductor and this causes the problem of weakening of thermal resistance. In order to solve this sort of electrostatic failure in this process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. X-ray Generating efficiency has an effect on soft X-ray Ionizer affects neutralizing performance. There exist variable factors such as type of anode, thickness, tube voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was measured according to target material thickness using MCNPX under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W), Gold(Au), Silver(Ag). At the result, Gold(Au) shows optimum efficiency. In Tube voltage 5 keV, optimal target thickness is $0.05{\mu}m$ and Largest energy of Light flux appears $2.22{\times}10^8$ x-ray flux. In Tube voltage 10 keV, optimal target Thickness is $0.18{\mu}m$ and Largest energy of Light flux appears $1.97{\times}10^9$ x-ray flux. In Tube voltage 15 keV, optimal target Thickness is $0.29{\mu}m$ and Largest energy of Light flux appears $4.59{\times}10^9$ x-ray flux.

• 설비공학논문집
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• 제22권7호
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• pp.492-507
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• 2010

This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2009. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) Research trends of thermal and fluid engineering have been surveyed as groups of general thermal and fluid flow, fluid machinery and piping, and new and renewable energy. Various topics were covered in the field of general thermal and fluid flow such as an expander, a capillary tube, the flow of micro-channel water blocks, the friction and anti-wear characteristics of nano oils with mixtures of refrigerant oils, etc. Research issues mainly focused on the design of micro-pumps and fans, the heat resistance reliability of axial smoke exhaust fans, and hood systems in the field of fluid machinery and piping. Studies on ground water sources were executed concerning two well type geothermal heat pumps and multi-heat pumps in the field of new and renewable energy. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics and industrial heat exchangers. Researches on heat transfer characteristics included the heat transfer in thermoelectric cooling systems, refrigerants, evaporators, dryers, desiccant rotors. In the area of industrial heat exchangers, researches on high temperature ceramic heat exchangers, plate heat exchangers, frosting on fins of heat exchangers were performed. (3) In the field of refrigeration, papers were presented on alternative refrigerants, system improvements, and the utilization of various energy sources. Refrigeration systems with alternative refrigerants such as hydrocarbons, mixed refrigerants, and $CO_2$ were studied. Efforts to improve the performance of refrigeration systems were made applying various ideas of suction line heat exchangers, subcooling bypass lines and gas injection systems. Studies on heat pump systems using unutilized energy sources such as river water, underground water, and waste heat were also reported. (4) Research trend in the field of mechanical building facilities has been found to be mainly focused on field applications rather than performance improvements. In the area of cogeneration systems, papers on energy and economic analysis, LCC analysis and cost estimating were reported. Studies on ventilation and heat recovery systems introduced the effect on fire and smoke control, and energy reduction. Papers on district cooling and heating systems dealt with design capacity evaluation, application plan and field application. Also, the maintenance and management of building service equipments were presented for HVAC systems. (5) In the field of architectural environment, various studies were carried to improve indoor air quality and to analyze the heat load characteristics of buildings by energy simulation. These studies helped to understand the physics related to building load characteristics and to improve the quality of architectural environment where human beings reside in.