• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.14 no.5
• /
• pp.385-393
• /
• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.11a
• /
• pp.424-429
• /
• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Journal of Korean Society of Industrial and Systems Engineering
• /
• v.33 no.2
• /
• pp.33-38
• /
• 2010

To survive head-to-head competition, we should keep our labor productivities above those of other nations. However, our labor productivities are low compared to those of the developed countries. It is the well-known fact that we make up for the productivities with long work hours. Entering the line of developed nations safely and enjoying well-being age freely, we need to achieve high labor productivities without sacrificing work hours. What would be a fine solution? Back to the basics! Although it is important to enforce R&D on high-tech products, we should have so-called bluebird philosophy, being faithful to the basics and trying to find solutions at a stone's throw. Basics of basics may be unceasing improvement, establishing reasonable standard times, and maintaining them. To support going back to the basics, this thesis proposes VITAMAX, a motion and time study software. As VITAMAX stands for "Visual Improvement and Time Analysis for Maximizing Profits", it provides a simple and powerful visual tool which is useful for improving manual works and determining standard times. Since VITAMAX is based on the Microsoft Excel and VBA, it is very cost-effective and easy to use. VITAMAX may contribute to the profit increase of manufacturing companies, especially for the small and medium-sized enterprise.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.1
• /
• pp.25-31
• /
• 2021

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1883-1886
• /
• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Speech Sciences
• /
• v.11 no.2
• /
• pp.193-210
• /
• 2004

In this paper, we develop a real time lip-synch system that activates 2-D avatar's lip motion in synch with an incoming speech utterance. To realize the 'real time' operation of the system, we contain the processing time by invoking merge and split procedures performing coarse-to-fine phoneme classification. At each stage of phoneme classification, we apply the support vector machine (SVM) to reduce the computational load while retraining the desired accuracy. The coarse-to-fine phoneme classification is accomplished via two stages of feature extraction: first, each speech frame is acoustically analyzed for 3 classes of lip opening using Mel Frequency Cepstral Coefficients (MFCC) as a feature; secondly, each frame is further refined in classification for detailed lip shape using formant information. We implemented the system with 2-D lip animation that shows the effectiveness of the proposed two-stage procedure in accomplishing a real-time lip-synch task. It was observed that the method of using phoneme merging and SVM achieved about twice faster speed in recognition than the method employing the Hidden Markov Model (HMM). A typical latency time per a single frame observed for our method was in the order of 18.22 milliseconds while an HMM method applied under identical conditions resulted about 30.67 milliseconds.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.10
• /
• pp.1141-1145
• /
• 2011

Recently, there are many issues about R2R printing technique for mass production of electronic devices. Among the various Roll-to-roll based printing techniques such as gravure, off-set, flexo and so on, "Gravure off-set printing technique" has an advantage of higher printing resolution. The printing unit of gravure off-set printing technique usually consists of plate roll, blanket roll and impressure roll whose. Linear velocities should be synchronized each other for fine pattern printing. However, roller's manufacturing error and printing variations such as pringting pressure, printing speed, roll stroke and so on actually affected their synchronization anf thus the quality of fine fattern. In this paper, we analyzed the effective of synchronization error on printing quality. Also, this paper reviews the relative motion with each roll. And, this paper studys the synchronization error about its generation problem.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.19 no.4
• /
• pp.553-561
• /
• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.22 no.10
• /
• pp.949-958
• /
• 2012

Position tracking control of a link of a slave manipulator which needed to track the corresponding link of a master manipulator was addressed in this paper. Since driving torque from motor is transmitted through a set of flexible cable to link, the motion control system is modeled by a two-mass model connected with elastic coupling which has finite stiffness. Relative vibration of two-mass resonant system is a serious problem to operate manipulator. This paper proposed sliding mode control to reduce resonant vibration and fine position tracking control. Also, a pseudo-sliding mode control which uses a saturation function instead of a signum function was discussed and showed that the pseudo-sliding mode control can improve disturbance regulation performance as well as guarantees fine command tracking without chattering which is an inherent drawback of basic sliding mode control. In addition, a disturbance observer based sliding mode control has been suggested to improve disturbance regulation performance. The feasibility of the proposed control design was verified along with some simulation results.

• Journal of the Korean Magnetics Society
• /
• v.11 no.5
• /
• pp.179-183
• /
• 2001

Magnetoresistance and Planar Hall effect of Glass/Ni$\sub$83/Fe$\sub$17/(2 nm)/[Cu(2 nm)Ni$\sub$83/Fe$\sub$17/(20 nm)]$\sub$50/ multilayer were measured. Repeated saw tooth like planar Hall effect signal was observed in the range of magnetization reversal process, while no sign of such saw tooth was observed in Magnetoresistance diagram. For the reason of saw tooth like signal, it is supposed that subsequent abrupt domain wall motion of each magnetic layer in the process of magnetization reversal process was observed in planar Hall effect in transverse direction to the current direction. This fine structure of planar Hall effect was observed for applied fields in any direction. Magnetoresistance curve did not show this fine structure of magnetization reversal, of course, since only net magnetization of each layer has to do with the resistivity. Extended research on the reason of this sawtooth like signal should be conducted.