• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.4
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• pp.261-266
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• 1998

In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.633-636
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• 1999

In this study, we have fabricated amorphous FeZrBAg thin films with low core losses by using DC magnetron sputtering method. After deposition, rotational field annealing (RFA) method was performed in the dc field of 1.5 kOe. The amorphous FeZrBAg thin films produced by annealing at 35$0^{\circ}C$ was founded to have high permeability of 8680 at 100 MHz, 0.2 mOe, low coercivity of 0.86 Oe high magnetization of 1.5 T and very low core loss of 1.3 W/cc at 1 MHz, 0.IT respectively. Excellent soft magnetic properties in a amorphous FeZrBAg thin films in the present study are presumably the homogeneous formation of very fine bcc $\alpha$-Fe crystalline with the 8.2 nm in an amorphous FeZrBAg thin film matrix.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.42-43
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• 2008

The numerous application of ceramic superconducting bulk such as magnetic levitation train flywheel energy, levitation transpormation, magnetic bulk magnet etc. To obtain YBaCuO materials in the form of large single crystals are necessary. A refreshment and uniform distributon of the superconducting particle in the sample. The enhancement of the critical density was ascribe to a fine dispersion of the superconducting particle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.827-832
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• 2001

A lot of investigations have been made in recent years on the equal channel angular pressing(ECAP) which produces ultra-fine grains(UFG). Among many process parameters such as channel angles, frictions, die deformations and materials employed, the effects of material properties on the deformation behavior have been investigated. The finite element method(FEM) has been used to investigate this issue.

• Food Science and Biotechnology
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• v.17 no.1
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• pp.46-51
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• 2008

The objective of this study was to investigate antioxidant activities of freeze-dried, main root, and fine root of ginseng (Panax ginseng CA. Meyer), which were extracted with various solvents including ethanol, methanol, and water. Ethanol extracts in both parts showed the most powerful scavenging activities against DPPH radicals. Especially, ethanol extract of fine root had higher reducing power and antioxidant capacity than that of main root. The highest antioxidant activity in linoleic acid emulsion system was also observed in fine root extracted with ethanol, followed by methanol and water. Both ferrous ion chelating activity and ferric reducing antioxidant power (FRAP) of extracts were increased with the increase of extracts concentration. These results suggest that ethanol extract of fine root of ginseng has the most effective antioxidant capacity compared to the methanol and water extracts tested in the present study. Thus it can be applied for the effective extraction of functional material from ginseng for the usage of pharmaceutical and/or food industries.

• Journal of the Korean Ceramic Society
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• v.51 no.5
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• pp.492-497
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• 2014

Artificial fine aggregates (denoted AFA) were fabricated using spent bleaching clay (denoted SBC) generated from processed vegetable oil and stone sludge (denoted SS) produced from crushed aggregate manufacturing materials for use as functional construction materials. Each raw material was crushed to particle size finer than $150{\mu}m$, and fine spherical pellets of approximately 1 ~ 4 mm in diameter were prepared by a pelletizing process. The physical properties of the AFA were measured with different types of sintering equipment. A new type of vertical furnace that sinters fine aggregates in a fluidized bed at high temperatures was designed and tested. AFA sintered in a rotary kiln at $1125^{\circ}C$ showed a bulk density of $1.5g/cm^3$ and a water absorption of 16%. AFA sintered in the vertical furnace at $1125^{\circ}C$ showed a bulk density of $1.9g/cm^3$ and water absorption of 8.5%. The bulk density of the AFA sintered in the vertical furnace showed a bulk density 27% higher and water absorption 47% lower than those of AFA sintered in the rotary kiln.

• Applied Chemistry for Engineering
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• v.4 no.2
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• pp.240-253
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• 1993

Silicon alkoxides are used as a raw materials of silica fibers, coating films and fine ceramics. Specially, the alkoxides have been confirmed the best raw material for VLSI thin film of computors in recent years. Because, the impotance of silicon alkoxides are increasing more and more now a days. And so, in thls report the synthetic methods, reaction mechanism, application fields of silicon alkoxides are summerized. Also, the results of our research and technical problems of silicon alkoxide preparation are introduced briefly.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.30-36
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• 2013

An FFD(flexible fine die) is an embossed mold that consists of a thin plate ranging from 0.6 to 3 mm in thickness. FFDs are primarily used for cutting LCD films and F-PCB sheets. In the high-speed micro-milling process of flexible fine dies, the lubrication and cooling of the cutting edges is very important from the aspect of eco machining and cutting performance. In this paper, a comparative study of tool wear and surface roughness between cutting fluid and hybrid lubrication for eco-machining of FFD was conducted for processes of high-speed machining of highly hardened material (STC5, HRC52). Especially, the incorporated fluid method for eco machining, in which the cutting performances can be simultaneously measured, was introduced. The machining results show that hybrid lubrication, instead of conventional cutting fluid, leads to excellent tool wear and surface roughness and represents the proper conditions for eco micro-machining of flexible fine dies.

• Computers and Concrete
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• v.18 no.2
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• pp.279-295
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• 2016

A new innovative composite material is textile reinforced cementitious composite (TRCC). To achieve high flexural performance researchers suggest polymer modification of TRCC matrices. In this study, nine ready mix repair mortars commonly used in construction industry and the production of TRCC elements were examined. Mechanical properties such as compressive and flexural strength, drying shrinkage were studied. Being a significant durability concern, alkali silica reaction tests were performed according to related standards. Results showed that, some ready repair mortar mixes are potentially reactive due to the alkali silica reaction. Two of the ready mortar mixes labelled as non-shrinkage in their technical data sheets showed the highest shrinkage. In this experiment, researchers designed new matrices. These matrices were fine grained concretes modified with polymer additives; latexes and redispersible powders. Two latexes and six redispersible powder polymers were used in the study. Mechanical properties of fine grained concretes such as compressive and flexural strengths were determined. Results showed that some of the fine grained concretes cast with redispersible powders had higher flexural strength than ready mix repair mortars at 28 days. Matrix composition has to be designed for a suitable consistency for planned production processes of TRCC and mechanical properties for load-carrying capacity.

• Journal of the Korean Society for Precision Engineering
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• v.10 no.1
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• pp.126-133
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• 1993

Conventional cutting(CC) and Ultrasonic Vibration Cutting(UVC) of 20[KHz] are practised with standard lathe for fine ceramics(A1$_{2}$O$_{3}$. UVC is suggested to good cutting method for difficult-to-machine-materials and it is known to excellent cutting method to super precision cutting and elevation of productibility for general, nonferrous matals. In this research, main results to be obtained are as follows: 1. From the CC and UVC results by general lathe with sintering diamond tool, the surface roughness and roundness are improved in UVC. Also tool life is longer in UVC than CC. From the observation of machined surface, it is found that brittle fracutural material remove occured in fine ceramics cutting. 2. It is verified that the thrust force is the biggest in fine ceramics cutting, principal force is the next, and feed rate force the third and it is appear a little, on the other hand the principal force is the biggest in metal cutting, feed rate frece is the second, and thrust force is the next.