• Journal of Mechanical Science and Technology
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• 제20권11호
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• pp.1834-1847
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• 2006

A robust minimum-time control (RMTC) strategy is addressed and it is extended to the dual-stage servo design. Rather than conventional switching type sub-optimal controls, it is a reference following control approach where the predetermined minimum-time trajectory (MTT) is tracked by the perturbation compensator based feedback controller. First, the minimum-time trajectory for a mass-damper system is derived. Then, the perturbation compensator to achieve robust tracking performance in spite of model uncertainty and external disturbance is suggested. The RMTC is also applied to the dual-stage positioner which consists of coarse actuator and fine one. To best utilize the actuation redundancy of the dual-stage mechanism, a null-motion controller to actively regulate the relative motion between the two stages is formulated. The performance of RMTC is validated through simulation and experiment.

• 한국정밀공학회지
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• 제34권1호
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1392-1395
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• 2004

In order to successfully develop attitude and orbit control subsystem(AOCS), AOCS engineer performs hardware selection, controller design and analysis, control logic and interface verification on electrical test bed, integrated system test, polarity test, and finally verification on orbit after launching. Attitude and orbit control subsystem for KOMPSAT-2 consists of standby mode, sun mode, maneuver mode, science mode, and power safe mode to stabilize and to control the spacecraft for performing the mission. The sun mode is usually divided into sun point submode, earth search submode and safe hold submode. The maneuver mode is divided into attitude hold submode and ${\triangle}$ V submode, while the science mode divided into science coarse submode and science fine submode. Moreover, it is added to back-up mode which uses wheels as an actuator for sun mode and maneuver mode. In this paper, we describe the controller design process and the performance of the design results with respect to the sun mode and the maneuver mode based on thrusters as an actuator using on flexible model.

• 반도체디스플레이기술학회지
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• 제7권3호
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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• pp.735-739
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• 2003

This paper presents a direct seek control algorithm for swing-arm type dual stage servo system that consists of a coarse actuator and a fine actuator. The proposed scheme is to design a control system that attenuates the effect of dynamic coupling between the two actuators so that the seek operation can be performed in a single-shot with stability. In an optical drive system with dual stage servo mechanism, the effect of dynamic coupling between the two actuators needs to be handled during the coarse seek operation due to its inherent structure. In an extreme case, the two actuators can collide each other, which leads to critical degradation of the seek performance. To handle this problem, our proposed control scheme is to generate the drive signals such that the two actuators behave as if they are a single fixed body. To this end, a feedforward controller and two feedback controllers are designed that enable the current drive system perform wide range of track seek. Simulation results are provided to show the validity and feasibility of our proposed algorithm.

• 한국전자통신학회논문지
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• 제16권2호
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• pp.271-278
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• 2021

본 논문은 외부환경을 인식하고 오염도에 따라 자동으로 오염물질을 제거하는, 스마트 필터 시스템의 구현에 관한 연구이다. 최근 실내외 공간에서 다양한 오염물질의 발생은 인체에 악영향을 미치고 있으며 특히 대기 중에서 발생되는 다양한 미세먼지는 밀폐된 주거 공간이나 사무공간에서 심해진다. 환기 등을 통해 일시적인 공기질 오염도를 낮출 수는 있으나 미세먼지 변화를 실시간적으로 대응하는 것이 어려워 가정이나 산업체와 같이 다수의 인력이 상주하는 공간에서 이와 같은 문제점은 심각해진다. 따라서 거주 공간의 내부의 미세먼지 농도를 실시간적으로 측정하고, 외부와의 자동 환기를 통해, 실내 환기의 오염농도를 저감시킬 필요성이 있다. 이와 같은 문제점을 개선하기 위하여, 본 논문에서는 외부환경 인식용 스마트 필터 시스템에 대한 구현을 제안하고자 한다. 실내외부의 공기질을 자동으로 측정하고, 오염물질을 제거하는 스마트 필터 시스템에 대한 구조를 설계하고 기능을 구현하였으며, 시제품을 제작하여 동작성을 확인하였다. 최종적으로는 스마트 필터 시스템의 미세먼지 문제 해결에 대한 효용성을 검토하였다.

• 한국전자통신학회논문지
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• 제16권3호
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• pp.551-558
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• 2021

IoT와 센서를 기반으로 원격으로 제어할 수 있는 액추에이터 모듈의 지능형 환기 기능을 구현하기 위해, 실내 가스/CO2/습도 온도 및 실내/외 미세먼지 관련 실외 환경을 감지하는 사전 설정된 개수의 데이터를 기반으로 환기 포트를 개폐하기 위한 알고리즘 설계 및 구동 회로를 구성하여 환기창시스템을 구현하였다. 실내공기 순환모듈의 전송데이터관련 센서와 조건이 많아 데이터 저장·관리·분석에 어려움을 겪고 있다. 빅데이터 기술은 실내 공기 순환 시스템에 채택되어야 한다. 원격 모니터링과 원격 무선 제어 화면은 환기구시스템의 상태를 추출하여 관리함으로써 분리 및 작동 조건을 자동화할 수 있도록 구축되었다. 엑츄에이터 및 센서로 구성된 환기창시스템의 제어 및 센싱용 대량의 데이터전송 안정성을 확보하기 위해 MQTT를 적용하고 시스템 오류를 대비하여 운용의 빅데이터 안정적인 전송 보장을 위해 RocketMQ를 활용하여 시스템을 구성하였다.

• 한국정밀공학회지
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• 제21권1호
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• pp.109-115
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• 2004

Polishing process has been applied to get extremely fine surfaces, e.g., mirror surfaces such as optical mirrors, lens, molds and etc. Nowadays not only fine surface quality but also submicron order of dimensional accuracy is required for many applications. To meet the requirements polishing process should be provided with an active control of polishing pressure especially for automation of polishing process. In this paper a study on development of an active polishing pressure control system has been presented. A new type of tool assembly has been developed to facilitate the control. The tool is attached to an axis of a polishing machine with a coil spring and control of the polishing pressure is done by the position control of the axis, which needs no additional actuator. The polishing pressure is successfully measured by the measurement of the spring deformation. Control specifications were quantitatively considered by weighting functions and a controller was designed by using loop-shaping technique based on the no synthesis. Some experiments have been executed on a polishing machine with a PC-NC controller. It is shown that the results were coincident well with the theoretical analyses and satisfied the design specifications.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.