• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.11
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• pp.1147-1152
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• 2004

The objective of this work is to develop a new design method to find optimal coils, especially the optimal coil configuration of an optical pickup actuator. In designing actuator coils, the developed Lorenz force in the coils along the desired direction should be made as large as possible while forces and torques in other directions should be made as small as possible. The design methodology we are developing is a systematic approach that can generate optimal coil configurations for given permanent magnet configurations. To consider the best coil configuration among all feasible coil configurations, we formulate the design problem as a topology optimization of a coil. The present formulation for coil design is noble in the sense that the existing topology optimization is mainly concerned with the design of yokes and permanent magnets and that the optimization of actuator coils is so far limited within shape or size optimization. Though the present design methodology applies to any problem, the specific design example considered is the design of fine-pattern tracking and focusing coils.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.174-185
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• 2005

This paper presents the design, fabrication, and testing results of a dual stage actuator system for a fine positioning of magnetic heads in magnetic disk drives. A novel rotary microactuator which is electrostatically driven and utilized as a secondary actuator was designed. The stator and rotor electrodes in the microactuator was revised to have the optimal shapes and hence produces much higher rotational torque compared with the conventional comb-shape electrodes. The microactuators were successfully fabricated using SoG(silicon on glass) processing technology, which is known as being cost-effective. The fabricated microactuator has the structural thickness of $45{\mu}m$ with the gap width of approximately $3{\mu}m$. The dynamic characteristic of microactuator/slider assembly was investigated, and its natural frequency and DC gain were measured to be 3.4kHz and 32nm/V, respectively. The microactuator/slider assembly was integrated into a HDD model V10 of Samsung Electronics Co. and a dual servo algorithm was tested to explore the tracking performance of dual stage actuator system where the LDV signals instead of magnetic head signals were used. Experimental results indicate that this system achieves the tracking accuracy of 30nm. This value corresponds to a track density of 85,000 track per inch(TPI), which is about 3 times greater than that of current hard disk drives.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Proceedings of the KSME Conference
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• 2001.11a
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• pp.477-482
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• 2001

To realize higher track density of HDD, the servo bandwidth should be higher, however, is limited by the mechanical resonances of the arm, coil of the VCM and ball bearing pivot. The dual-stage actuator systems have been suggested as a possible solution. For the dual-stage actuator systems based on the suspension, the suspension resonance frequencies in the radial access direction are important factors to increase a servo bandwidth, however the improvement of these frequencies may affect the shock resistance performance and spring constant. The slider's flying stability can be deteriorated by the change of a vertical stiffness. In this work, we have investigated a suspension design scheme possessing a milliactuator for dual-stage actuator systems and also achieved higher mechanical characteristics. Design parameters are deduced by finite element analysis with sensitivity function. It is confirmed that the proposed suspension with the milliactuator has the capability of fine tracking motion, due to its hinge structure on the spring region, and achieves higher mechanical resonance frequencies in the radial access direction with a high-shock resistance and a low-spring constant.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.11
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• pp.2732-2741
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• 2000

Combination of magnetic recording technology and optical recording technology such as Near Field Optical Recording is watched recently. In order to accomplish this technology, the development of an electromagnetic driven mm-sized mirror shifting laser beam in track direction have to needed. In Near Field Optical Recording System, shifting laser beam in track direction mean as fine tracking and means as coarse tracking. Therefore in Near Field Optical Recording, 2-stage actuator is composed of servo controller in reading or recording information on disc layer. In our research, through design and simulation process of driven mm-sized mirror, we arrange systematically design process of driven mm-sized mirror having good frequency transfer characteristics. Design and simulation processes included modal analysis of spring, calculation of magnetic moment according to the number of turns and geometric configuration of coil and magnetic circuit analysis meaning that calculation of magnetic flux density in air gap of magnetic circuit. After that we design and make parts of driven mm-sized mirror, assemble and evaluate our electriomagnetic driven mm-sized mirror. we compared design values with actual characteristic values and present solution scheme. Through these processes we performed manufacturing of an electromagnetic driven mm-sized mirror having good frequency-domain characteristics and high sensitivity characteristics.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.12
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• pp.1246-1253
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• 2007

The recent issue of optical pickup actuators is to apply optical storage devices to mobile devices such as a cellular phone and PDA. It requires actuators to become smaller than conventional types. As the size becomes smaller, the magnetic force is reduced and the assembly of optical pickup actuators becomes more difficult. In addition, its dynamic characteristics are changed. In this paper, methods to improve magnetic forces and dynamic characteristics are suggested and the optimal result of the plate spring design is obtained. A diamond shape magnet and the fine pattern coil (FPC) are used to improve magnetic forces and damping elements are attached to decrease the peak magnitude of the mode instead of using structural damping, mostly for the purpose of improving the accuracy of the finite element simulation. To get more stable dynamic characteristics than conventional ones, a plate spring is applied to the optical pickup actuator and it is optimized with topology and parameter optimization to obtain the concept and the detail design, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1039-1043
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• 2007

In this paper, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator application, PMN-PZN-PZT ceramics were fabricated using $LiCO_3,\;Bi_2O_3$ and CuO as sintering aids. And also, their piezoelectric and dielectric properties were investigated according to the milling time. All the specimens sintered at $930\;^{\circ}C$ showed tetragonal phases without secondary phases. With increasing milling time, piezoelectric and dielectric characteristic of specimens increased up to 60 hours milling time and then decreased due to the agglomeration of fine particle. Accordingly, it seems that 60 hour is optimum milling condition. At the sintering temperature of $930\;^{\circ}C$ and milling time of 60 hour, density, dielectric constant(${\varepsilon}_r$), electromechanical coupling factor (kp), mechanical quality factor (Qm), piezoelectric d constant showed the optimum value of $7.95\;g/m^3$, 1382, 0.546, 1749, 330 pC/N, respectively for multilayer piezoelectric actuator application.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.340-341
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• 2005

Three different composition 130um thickness PZT were fabricated by extrusion method and burned out at $550^{\circ}C$ and sintered at $1260^{\circ}C$/2.5hrs. Actuator was fabricated using glass and Si(100) wafer by MEMS process. From XRD data, in case of DECH, perovskite phase peak strength is higher than others. We were able to obtain the information of grain growth and porosity by SEM images. Also DECH PZT on glass membrane(100um thickness) have larger displacement than others.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1028-1033
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• 2005

Robot is composed of various devices but, those are incompatible with each other and hardly developing reusable control software. We suggest standard abstract interface for robot software component to make portable device and reusable control software of robot. This assures uniform abstracted interface to the device driver software like sensor and actuator and, control program can be transparent operation over device. We can develop devices and control software separately and independently with this idea. This makes it possible to replace existing devices with new devices which have a improved performance.