• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.203-208
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• 2001

In this paper, a novel dual-type positioning mechanism using a voice coil motor(VCM) and a piezoelectric actuator is proposed for optical disk drive or near-field recording type drive. The VCM is used for a coarse motion actuator and the piezoelectric actuator, "S" configuration deflection motion when voltage applied, is used for a fine motion actuator with self-sensing technique, which allows it to sense and actuate simultaneously in a closed loop frame work. When the VCM rotates and stops, a position feedback control algorithm is adopted to further control residu vibration. The performance of the control scheme is confirmed through simulations and experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.664-669
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.1
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• pp.17-25
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• 2002

This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed far fee positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator Coarse positioning using lead screw is thrived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMUUNK including various frictions those are composed of pre-design and system modeling.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.9 s.90
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• pp.891-896
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• 2004

'Coil' occupies very much important position in delivering driving force of optical pick-up actuators. Up to now the main stream has been a winding coil type actuator, but actuators using FP-Coil(fine pattern coil) have been considered for the more compacted and simple manufacturing process and have variously spreaded the application fields by product. We have tried to design actuators using PCB-Coil(printed circuit board coil) which has benefits in terms of price and manufacturing process. Especially this research has two main things to reduce the vibration of sub-resonance and to assure the DC sensitivity among the performances of asymmetric optical pick-up actuator with PCB-Coil.

• Journal of Magnetics
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• v.11 no.4
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• pp.151-155
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• 2006

The electromagnetic engine valve actuator is a key technology to achieve variable valve timing in internal combustion engine and the steel core and clapper of the electromagnetic engine valve actuator are laminated to reduce the eddy current loss. To design and characterize the performance of the electromagnetic engine valve actuator, FE (finite element) analysis is the most effective way, but FE (finite element) 3-D modeling of real lamination needs very fine meshes resulting in countless meshes for modeling and numerous computations. In this paper, the equivalent FE 2-D model of electromagnetic engine valve actuator is introduced and FE analysis is performed using the equivalent FE 2-D model.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.755-761
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• 2003

Recently, the development of mobile devices demands information storage systems to use micro drive devices and cheap media. These should have several characteristics, for example, the subminiature of size, the robustness of shock, the minimum of cost and power consumption, and the removability of multiple applications. A conventional optical disk drive is more suitable for these specifications than the others. The optical storage system of the new generation to use a blue laser and a high numerical aperture (NA) is the perfect candidate for micro optical disk drives. In this paper, the micro actuator that can be applied to a micro optical disk drive is designed by response surface methodology to use a structural analysis and an electro-magnetic analysis. Based on above results, the coarse actuator and fine actuator are designed and improved from the point of view of the size and the power. Consequently, the designs of a micro actuator are proposed through these courses.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.4 no.3
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• pp.316-321
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• 2004

In this paper, we have developed a new mounting head system for flip chip. The proposed head system consists of a macro/micro positioning actuator for stable force control. The macro actuator provides the system with a gross motion while the micro device yields fine tuned motion to reduce the harmful impact force that occurs between very small sized electronic parts and the surface of a PCB(printed circuit board). In order to show the effectiveness of the proposed macro/micro chip mounting system, we compared the proposed system with the conventional chip mounting head equipped with a macro actuator only. A series of experiments were executed under the mounting conditions such as various access velocities and PCB stiffness. As a result of this study, a satisfactory voice coil actuator as the micro actuator has been developed, and its performance meet well the specifications desired for the design of the chip mounting head system and show good correspondence between theoretical analysis and experimental results.

• Journal of the Korean Institute of Telematics and Electronics T
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• v.36T no.4
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• pp.38-46
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• 1999

This paper discusses the repetitive tracking control method for a coarse-fine actuator. The proposed system is composed of a magnetic linear drive as a coarse actuator and a piezoelectric linear positioner as a fine actuator. In particular, nonlinear friction in a magnetic linear drive and hysteresis characteristic of a piezoelectric linear positioner are modeled first. The feedback linearization loop uses these models in tracking position control. The control strategy is then further extended to include a repetitive control algorithm in tracking periodic reference inputs. This repetitive controller is implemented on the existing PID controller augmented with feedback linearization loop. The experimental results show that performance in tracking sinusoidal waveforms is noticeably improved by augmenting a PID controller with feedback linearization loop and a repetitive controller together.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.475-480
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• 2000

A new positioning mechanism with Parallel type actuator using piezoelectric material and with dual type actuators using voice coil motor (VCM) and piezoactuator is proposed for optical disk drive or near-field recording type drive, and high speed position and vibration control are investigated. Parallel type bimorph piezoactuator is used as a fine motion actuator with self-sensing technique, which allows a piezoelectric material to concurrently sense and actuate in a closed loop frame work, and positive position feedback control algorithm is adopted to further control residual vibration. For positioning control of VCM, PID control algorithm is adopted.