• Title/Summary/Keyword: Film Sensor

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고정밀 2상유동 액막두께 측정을 위한 연성회로기판 기반 3-전극 센서 개발 (Development of Three-ring Conductance Sensor based on Flexible Printed Circuit Board for Measuring Liquid Film thickness in Two-phase Flow with High Resolution)

  • 이규병;김종록;어동진;박군철;조형규
    • 센서학회지
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    • 제25권1호
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    • pp.57-64
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    • 2016
  • To understand a two-phase flow, a liquid film thickness is one of the important factors. A lot of researches have been performed to measure liquid film thickness with various approaches. Recently, an electrical conductance method which uses the conductivity of the liquid film has been widely applied on measuring the liquid film thickness. Though the electrical method has an advantage in high spatial resolution, as the conductivity of liquid can be affected by its temperature variation, the conventional electrical conductance methods have a limitation in being applied on varying temperature conditions where a heat transfer is involved. The purpose of this study is to develop a three-ring liquid film sensor that overcomes the limitation of the conventional method. The three-ring conductance method can measure the film thickness regardless of temperature variation by compensating the change of liquid conductivity. Considering its application on a wide range of conditions such as high temperature or curved surfaces, the sensor was fabricated on flexible printed circuit board (FPCB) in this study. This paper presents the concept of the measurement method, design procedure, prototype sensor fabrication and calibration results.

MWCNT/ZnO 복합체 필름을 이용한 가스센서의 NOx가스 검출 특성 분석 (The Analysis of NOx Gas Detection Characteristics for the Gas Sensor Using the MWCNT/ZnO Composites Film)

  • 김현수;이원재;박용서;장경욱
    • 한국전기전자재료학회논문지
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    • 제29권5호
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    • pp.312-316
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    • 2016
  • In this study, we fabricated $NO_x$ gas sensor by using multi-walled carbon nanotubes(MWCNT)/zinc oxide(ZnO) composite film. Carbon nanotubes (CNTs) have good electronic, chemical-stability, and sensitivity characteristics. And zinc oxide (ZnO) is a wide band gap and large exciton binding energy semiconductor. In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect $NO_x$ gas for different values of the $NO_x$ gas concentrations. The gas sensor that absorbed$NO_x$ gas molecules showed a increasing in resistance. The sensitivity of the gas sensor was increased by increasing the gas concentrations. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained the sensitivity. And the comparison analysis to ZnO film gas sensor for detecting $NO_x$ gas. From the experiment result, we confirmed improvement of $NO_x$ gas detection characteristics using the MWCNT/ZnO composite film.

Cure real monitering sensor for UV curable thin epoxy film based on side-polished single mode fiber

  • Kim, Kwang-Taek;HwangBo, Sueng;Kang, Yong-Chul
    • 센서학회지
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    • 제16권4호
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    • pp.254-258
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    • 2007
  • A novel cure sensor based on the side-polished single mode fiber has been proposed and demonstrated. Two different UV curable epoxies were used to verify the feasibility of the side-polished single mode fiber as a high sensitivity cure sensor. The volume change of the epoxy by UV curing results in a corresponding change of the refractive index. The sensor can be used to monitor the curing process, the refractive index variation and the volume change of epoxy in real time during the UV curing process. In addition, small birefringence of the epoxy film can be detected using the sensor.

Distributed Flexible Tactile Sensor System Using Piezoelectric Film

  • Yoon, Myoung-Jong;Yu, Kee-Ho;Kwon, Tae-Gyu;Lee, Seong-Cheol
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2001년도 ICCAS
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    • pp.61.4-61
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    • 2001
  • This research is the development of a distributed flexible tactile sensor for service robots using PVDF (polyvinylidene fluoride) film for the detection of the contact state in real time. The tactile sensor which has 8$\times$8 taxels is fabricated using PVDF film and flexible circuitry. The proposed fabrication method is simple and easy to make the sensor in the laboratory without using any special equipment. Experimental results on static and dynamic properties are obtained. In order to investigate the properties of the sensor, the sensor output to the arbitrary forces and frequencies are measured using the shaker with the force sensor.

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세라믹 다이어프램을 이용한 후막 스트레인 게이지 압력센서 (Thick-Film Strain-gage Ceramic-Pressure Sensor)

  • 이성재;박하용;민남기
    • 한국전기전자재료학회논문지
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    • 제14권12호
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    • pp.987-993
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    • 2001
  • In this paper, we presents the construction details and output characteristics of a thick film piezoresistive strain gage. The thick film was printed on the ceramic diaphragm back side by screen printing and cured at 850$^{\circ}C$. The strain distribution and deflection on ceramic diaphragm were performed with finite-element method(FEM tool ANSYS-5.3). Various thick film strain gage characteristics were analysed, including nonlinearity, hysteresis, stability and sensitivity of thick film strain gages.

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Sensor Applications of Thin-Film Transistors - Photosensor, Magnetic Sensor, Temperature Sensor and Chemical Sensor -

  • Kimura, Mutsumi;Miura, Yuta;Ogura, Takeshi;Hachida, Tomohisa;Nishizaki, Yoshitaka;Yamashita, Takehiko;Shima, Takehiro;Hashimoto, Hayami;Yamaguchi, Yohei;Hirako, Masaaki;Yamaoka, Toshifumi;Tani, Satoshi;Imuro, Yoshiki;Bundo, Kosuke;Sagawa, Yuki;Setsu, Koushi
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.957-960
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    • 2009
  • Sensor applications of thin-film transistors (TFTs), such as photosensor, magnetic sensor, temperature sensor and chemical sensor, are introduced. Active-matrix circuits and amplifying circuits using poly-Si TFTs are integrated with these sensors to improve sensor performances and generate additional functions. These sensors may be promising applications after flat-panel displays (FPDs) in giant-micro electronics.

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건식법에 의해 제조된 내열성 폴리이미드박막의 열적특성 및 습도감지특성 (Thermal and Humidity Sensing Properties of Heat Resistant Polyimide Thin Film Manufactured by Dry Process)

  • 임경범;김기환;황선양;김종윤;황명환
    • 전기학회논문지
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    • 제56권6호
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    • pp.1080-1086
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    • 2007
  • The aim of this paper is to establish the optimum fabrication condition of specimens, using the Vapor Deposition Polymerization Method(VDPM), which is one of modesto prepare functional organic thin films using a dry process, and to develop a thin film type humidity sensor which has good humidity sensitive characteristics. The inner part of the film became denser and roughness of the film surface eased as curing temperature increased so that thickness of the film could be made uniform. This also shows the appropriate curing temperature was $250^{\circ}C$. The basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Aluminum/Polyimide/Aluminum. The result of SEM and AFM measurement shows that the thickness of PI thin films decreased and the refraction increased as curing temperature increased, which indicates that a capacitance-type humidity sensor utilizing polyimide thin film is fabricated on a glass substrate. The characteristics of fabricated samples were measured under various conditions, and the samples had linear characteristics in the range of 20-80 %RH, independent of temperature change, and low hysteresis characteristic.

Flexible Hydrogen Sensor Using Ni-Zr Alloy Thin Film

  • Yun, Deok-Whan;Park, Sung Bum;Park, Yong-il
    • 한국재료학회지
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    • 제29권5호
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    • pp.297-303
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    • 2019
  • A triple-layered $PMMA/Ni_{64}Zr_{36}/PDMS$ hydrogen gas sensor using hydrogen permeable alloy and flexible polymer layers is fabricated through spin coating and DC-magnetron sputtering. PDMS(polydimethylsiloxane) is used as a flexible substrate and PMMA(polymethylmethacrylate) thin film is deposited onto the $Ni_{64}Zr_{36}$ alloy layer to give a high hydrogen-selectivity to the sensor. The measured hydrogen sensing ability and response time of the fabricated sensor at high hydrogen concentration of 99.9 % show a 20 % change in electrical resistance, which is superior to conventional Pd-based hydrogen sensors, which are difficult to use in high hydrogen concentration environments. At a hydrogen concentration of 5 %, the resistance of electricity is about 1.4 %, which is an electrical resistance similar to that of the $Pd_{77}Ag_{23}$ sensor. Despite using low cost $Ni_{64}Zr_{36}$ alloy as the main sensing element, performance similar to that of existing Pd sensors is obtained in a highly concentrated hydrogen atmosphere. By improving the sensitivity of the hydrogen detection through optimization including of the thickness of each layer and the composition of Ni-Zr alloy thin film, the proposed Ni-Zr-based hydrogen sensor can replace Pd-based hydrogen sensors.

NOX 가스 검출 특성을 이용한 MWCNT/ZnO 복합체 필름 가스 센서의 메커니즘 분석 (The Analysis of Mechanism for the Gas Sensor of MWCNT/ZnO Composites Film Using the NOX Gas Detection Characteristics)

  • 손주형;김현수;박용서;장경욱
    • 한국전기전자재료학회논문지
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    • 제31권3호
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    • pp.188-192
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    • 2018
  • In this study, we fabricated an $NO_X$ gas sensor using a composite film of multi-walled carbon nanotubes (MWCNT)/zinc oxide (ZnO). Carbon nanotubes (CNTs) show good electronic conductivity and chemical-stability, and zinc oxide (ZnO) is a wide band gap semiconductor with a large exciton binding energy. Gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect $NO_X$ gas at different $NO_X$ concentrations. The sensitivity of the gas sensor increased with increasing gas concentrations. Additionally, while changing the temperature inside the chamber containing the MWCNT/ZnO gas sensor, we obtained the sensitivity and normalized responses for detecting $NO_X$ gas in comparison to ZnO and MWCNT film gas sensors. From the experimental results, we confirmed that the gas sensor sensing mechanism was enhanced in the composite-film gas-sensor and that the electronic interaction between MWCNT and ZnO contributed to the improved sensor performance.

ITO Nanoparticle Film을 이용한 센서의 전극 구조가 동작 성능에 미치는 영향에 대한 연구 (Study on the Effect of the Electrode Structure of an ITO Nanoparticle Film Sensor On Operating Performance)

  • 안상수;노재하;이창한;이상태;서동민;이문진;장지호
    • 센서학회지
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    • 제31권2호
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    • pp.90-95
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    • 2022
  • The effect of the structure of an ITO nanoparticle film sensor on its performance was studied. A printed ITO film (P-ITO film) was fabricated on a flexible polyethylene terephthalate (PET) substrate, and the contact resistance of the electrode and sensor response change were clarified according to the detection position. The contact resistance between Ag and P-ITO was observed to be -204.4 Ω using the transmission line method (TLM), confirming that a very good ohmic contact is possible. In addition, we confirmed that the contact position of the analyte had a significant influence on the response of the sensor. Based on these results, the performance of the four types of sensors was compared. Consequently, we observed that 1) optimizing the resistance of the printed film, 2) optimizing the electrode structure and analyte input position, and 3) optimizing the electrode area are very important for fabricating a metal oxide nanoparticle (MONP) sensor with optimal performance.