• 제목/요약/키워드: Film Resistance

검색결과 2,220건 처리시간 0.033초

비정질 실리콘 박막 트랜지스터 소자 특성 향상을 위한 저 저항 금속 박막 전극의 형성 및 전기적 저항 특성 평가 (Metallizations and Electrical Characterizations of Low Resistivity Electrodes(Al, Ta, Cr) in the Amorphous Silicon Thin Film Transistor)

  • 김형택
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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    • pp.96-99
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    • 1993
  • 대면적 액정 표시판 (Liquid Crystal Display:LCD) panel내(內)의 구동소자인 비정질 실리콘 (amorphous silicon) 박막 트랜지스터 (Thin Film Transistor:TFT)의 구동신호전달 소자특성 향상을 위한 본(本) 연구의 목적은 액정 panel TFT 제조공정 상(上)의 증착금속 전극박막들의 Test Elements Group(TEG) metal line pattern별(別) 전기적 저항특성 평가에 있다. 현(現) TFT 전극용(用)으로 개발이 진행 중(中)인 Aluminum(Al), Tantalum(Ta) 및 Chromium(Cr) 이 특성평가 대상 금속 박막으로 선정 되었으며, 이들 금속막의 증착 thickness 와 TEG metal line width가 저항특성 변수로 성립 되었다. 본(本) 실험을 통해 금속 박막의 TEG line width별(別) 체적(體積)저항 (bulk resistance), 면(面)저항(sheet resistance), 비(比)저항 (resistivity) 및 기판 상(上)의 metal pattern 위치 변화에 따른 전기적 저항 uniformity 특성변화 평가가 있었다. TEG metal line 측정 변위에 따른 저항율의 선형변화 특성도 연구 되었으며, metal line별(別) 전기적 연속, 불연속 배선 단락 특성(electrical continuity test) 관찰도 있었다.

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폴리아마이드 필름이 코팅된 개량 아스팔트 방수시트의 SEM-EDX 분석을 통한 유기용제 저항성 확인 (Dissolution Resistance Property of Modified Asphalt Waterproofing Sheet Coated with Polyamide Film by SEM-EDX Analysis)

  • 안기원;유재용;오상근
    • 한국건축시공학회지
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    • 제17권5호
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    • pp.437-444
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    • 2017
  • 개량 아스팔트 방수시트 위에 폴리 우레탄 도막방수재가 도포되는 복합방수공법의 경우 시공성 향상을 위하여 도막 방수재에 유기용제를 희석해 사용하고 있지만, 유기용제가 폴리 우레탄 도막방수재의 완전 경화 전에 전부 휘발되지 못하고 시트재와 도막재 사이에 잔류하게 되고 이는 아스팔트 층을 융해시켜 방수층 손상 및 누수문제를 발생시켰다. 이에 용제에 의한 융해 문제를 개선하기 위해 내용제성이 강한 PA 필름을 개량 아스팔트 시트에 코팅(적층)하였고, 그 결과 융해에 대한 안전성을 육안을 관찰하였고, SEM 분석, EDX 분석을 통하여 PA 필름에 대한 내용제성을 정량적으로 확인하였다.

불소 단량체를 이용한 자외선 경화형 내 오존성 코팅 막 제조 (Preparation of UV-curable Ozone Resistance Coating Solutions using Fluoromonomer)

  • 이창호;이상구;김성래;이종대
    • Korean Chemical Engineering Research
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    • 제50권3호
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    • pp.421-426
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    • 2012
  • 불소계 아크릴레이트 2,2,2-trifluoroethylmethacrylate을 사용한 자외선 경화형 유-무기 하이브리드 코팅 막에 있어서 무기물 및 사용되는 유기 단량체의 종류 및 조성이 내 오존성 및 표면 특성에 미치는 영향에 대해 연구하였다. 코팅액은 금속 알콕사이드인 tetraethoxysilane(TEOS)와 실란 커플링제인 methacryloyloxypropyltrimethoxysilane(MPTMS)로 구성된 유-무기 혼성 용액에 2,2,2-trifluoroethylmethacrylate와 자외선 경화를 위한 유기물을 첨가하여 제조되었다. 코팅막은 코팅액을 기재위에 바 코팅 한 후 자외선 경화를 통해 제조되었다. 제조된 코팅 막의 내 오존성은 TEOS의 함량이 증가할수록 내 오존성과 표면경도는 향상되었다. 또한, 불소 함량이 증가할수록 내 오존성은 향상되었지만 표면 경도는 다소 떨어졌다. 우레탄 아크릴레이트를 첨가한 코팅 막은 높은 연필경도를 나타내었다. 코팅 막의 투과도는 TEOS와 2,2,2-trifluoroethylmethacrylate의 함량에 큰 영향을 받지 않았다. 더욱이, 코팅 막은 90% 이상의 높은 투과도를 나타내었다.

스퍼터링법으로 TiN 및 ZrN 피막 코팅된 STD 61의 표면특성 (Surface Characteristics of TiN and ZrN Film Coated STD 61 by Sputtering)

  • 은상원;최한철
    • 한국표면공학회지
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    • 제43권6호
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    • pp.260-265
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    • 2010
  • STD 61 steel has been widely used for tools, metallic mold and die for press working because of its favorable mechanical properties such as high toughness, and creep strength as well as excellent oxidation resistance. The STD 61 tool steel coated with TiN and ZrN by sputtering results in improvement of wear and corrosion resistance. In this study, surface characteristics of TiN and ZrN film coated STD 61 by sputtering were studied by using FE-SEM, EDS, XRD, and XRR and nanoindentation tests. From the results of surface characteristics of coated specimen, the ZrN coated surface showed finer granular than that of TiN coated surface. The coated layer structures of ZrN and TiN were grown to (111) and (200) preferred orientation. From the results of XRR test for surface roughness, density and growth rate of coating film, surface roughness and growth rate of ZrN coated film revealed lower values those of TiN coated film, whereas density of ZrN coated film showed higher values than that of TiN coated film. From the nanohardness and elastic modulus test, nanohardness value and elastic modulus of ZrN coated film became higher than those of TiN coated film.

PET 필름상 형성한 전자파차폐용 박막과 그 특성 (Formation of Electromagnetic Wave Shielding Thin Film on PET Film Substrate and Their Properties)

  • 임경민;이훈성;배일용;문경만;최철수;이명훈
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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    • pp.205-206
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    • 2011
  • Cu thin films for electromagnetic wave shielding were prepared on PET film and Ni-coated PET film by using Dry and Wet coating method, such as evaporation method, DC sputtering method and copper sulfate($CuSO_4$). After that, Zn thin film and Ni thin film were prepared onto the Cu thin films by using evaporation dry process and Ni electro plating wet process as a finishing treatment, respectively. The result of conductivity test and corrosion resistance test revealed Cu thin films which were formed with bigger grain size and high Cu composition rate have superior properties. Zn thin film by dry evaporation process and Ni thin film by wet electro plating process on Cu thin films were largely contributed to corrosion resistance. However, Ni thin film by wet process made conductivity of all specimen worse, the other hand, Zn thin film by dry process made it better to improve condictivity of specimens just prepared by dry process.

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절연 층이 고려된 YBCO 박막형 선재의 저항 증가 경향 및 회복 특성에 관한 연구 (Study on Resistance Increasement Tendency and Recovery Characteristics of YBCO Thin-film Wire Using Insulation Layer)

  • 두호익;김용진;이동혁;한병성;송상섭;이종수;한상철;이정필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.190-190
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    • 2010
  • The resistance and recovery properties of the YBCO thin-film wire according to the existence and thickness of an insulting layer, and the kinds of stabilization layers, were analyzed at 90 K, 180 K and 250 K. In this study, YBCO thin-film wires with different stabilizing layers and with insulating layers were examined in terms of their various characteristics, such as quenching occurrence, spread, and distribution, based on their resistance increase trends and their recovery from quenching, and the results were qualitatively explained. The results of this study on the characteristics of YBCO thin-film wires' superconducting and normal-conducting phase changes are expected to be useful in designing superconducting power machines and in improving their performance.

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전도성 잉크 박막의 건조특성 (Drying Characteristics of Conductive Thin Films)

  • 윤성만;조정대;김광영
    • 한국정밀공학회지
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    • 제31권6호
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    • pp.505-511
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    • 2014
  • In this paper, silver pastes were printed on polyethylene terephthalate (PET) film using screen printing and evaluated the drying characteristics by using dry oven and NIR drying system. The printed Ag films were dried at $140^{\circ}C$ and the drying time was changed from 10 to 90 seconds. To evaluate the electrical properties of printed Ag film, sheet resistance was compared. The sheet resistance of the dried thin silver film by using NIR drying system more rapidly decreased. To clarify this phenomena, the morphology and component of the dried surfaces were measured by using the scanning electron microscope (SEM) and the energy dispersive X-ray Spectroscopy (EDX), respectively. In the EDX measurement results, the oxidation of the surface was observed in the dried thin film by using the dry oven. The NIR drying system is more applicable than conventional hot air drying to apply continuous printing system.

알루미늄 3003 산화피막 성장 거동에 의한 표면 절연 특성 관찰 (Surface Electrical Conductivity and Growth Behavior of Aluminum 3003 Oxide Film)

  • 박수빈;정찬영
    • Corrosion Science and Technology
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    • 제21권6호
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    • pp.487-494
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    • 2022
  • Anodizing is a typical electrochemical surface treatment method that can improve the corrosion and insulating properties of aluminum alloys. The anodization process can obtain a dense structure. It can be used to artificially grow the thickness of an anodization film. Aluminum 3003 alloy used in this study is the most commonly used alloy for batteries due to its high strength and excellent formability as well as its weldability and corrosion resistance. Aluminum 3003 alloy was anodized at 0 ℃ with 0.3 M oxalic acid at 20 V, 40 V, or 60 V for 1 hour, 6 hours, or 12 hours. As a result of analyzing the composition of each specimen with an Energy Dispersive Spectrometer (EDS), aluminum was converted into an oxide film. The thickness of the formed anodization film increased when the applied voltage and anodization time increased. High corrosion potential values and low corrosion current density values were observed for the thickest oxide layer. The anodization film formed by anodization acted as a protective layer. The electrical resistance increased as the applied voltage and anodization time increased.

Titanium 양극산화시 TiO2 의 형상 및 특성에 미치는 전해질의 영향 (Influence of Electrolyte on the Shape and Characteristics of TiO2 during Anodic Oxidation of Titanium)

  • 최예지;정찬영
    • Corrosion Science and Technology
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    • 제22권3호
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    • pp.193-200
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    • 2023
  • Titanium alloy (grade-4) is commonly used in industrial and medical applications. To improve its corrosion resistance and biocompatibility for medical use, it is necessary to form a titanium oxide film. In this study, the morphology of the oxide film formed by anodizing Ti-grade 4 using different electrolytes was analyzed. Wetting properties before and after surface modification with SAM coating were also observed. Electrolytes used were categorized as A, B, and C. Electrolyte A consisted of 0.3 M oxalic acid and ethylene glycol. Electrolyte B consisted of 0.1 M NH4F and 0.1 M H2O in ethylene glycol. Electrolyte C consisted of 0.07 M NH4F and 1 M H2O in ethylene glycol. Samples B and C exhibited a porous structure, while sample A formed a thickest oxide film with a droplet-like structure. AFM analysis and contact angle measurements showed that sample A with the highest roughness exhibited the best hydrophilicity. After surface modification with SAM coating, it displayed superior hydrophobicity. Despite having the thickest oxide film, sample A showed the lowest insulation resistance due to its irregular structure. On the other hand, sample C with a thick and regular porous oxide film demonstrated the highest insulation resistance.

산화물 피복강재의 부식거동 및 밀착성 평가 (Evaluation on Corrosion Behaviour and Adhensivity of Oxide Coated Materials)

  • 이종락
    • 한국가스학회지
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    • 제2권4호
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    • pp.34-41
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    • 1998
  • 순철과 스테인리스강 위에 $A1_2O_3,\;Ta_2O_5$$ZrO_2$의 산화물을 RF스파터링법으로 피복시켜, 피막과 모재와의 밀착성 평가, 피복강에 대한 부식거동 및 피막결함률에 대하여 고찰을 실시하였다. 미소경도시험에서 밀착성지수 $\chi$를 이용하여 산화물피막의 밀착성을 평가할 수 있었다. 임계부동화전류밀도법은 세라믹피복강재의 결함률을 평가하는데 유용한 수단임을 알 수 있었다.

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