• Journal of Information Processing Systems
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• v.16 no.6
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• pp.1271-1280
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• 2020

The yield and quality of a micromanufacturing process are important management factors. In real-world situations, it is difficult to achieve a high yield from a manufacturing process because the products are produced through multiple nanoscale manufacturing processes. Therefore, it is necessary to identify the processes and equipment that lead to low yields. This paper proposes an analytical method to identify the processes and equipment that cause a defect in the plastic ball grid array (PBGA) during the manufacturing process using logistic regression and stepwise variable selection. The proposed method was tested with the lot trace records of a real work site. The records included the sequence of equipment that the lot had passed through and the number of faults of each type in the lot. We demonstrated that the test results reflect the real situation in a PBGA manufacturing process, and the major equipment parameters were then controlled to confirm the improvement in yield; the yield improved by approximately 20%.

• KIPS Transactions on Software and Data Engineering
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• v.4 no.2
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• pp.65-70
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• 2015

In the PCB(Printed Circuit Board) manufacturing industry, the yield is an important management factor because it affects the product cost and quality significantly. In real situation, it is very hard to ensure a high yield in a manufacturing shop because products called chips are made through hundreds of nano-scale manufacturing processes. Therefore, in order to improve the yield, it is necessary to analyze main fault process and equipment that cause low PCB yield. This paper proposes a systematic approach to discover fault-causing processes and equipment by using a logistic regression and a stepwise variable selection procedure. We tested our approach with lot trace records of real work-site. A lot trace record consists of the equipment sequence that the lot passed through and the number of faults for each fault type in the lot. We demonstrated that the test results reflected the real situation of a PCB manufacturing line.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.121-125
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• 2020

With miniaturization of semiconductor, the manufacturing process become more complex, and undetected small changes in the state of the equipment have unexpectedly changed the process results. Fault detection classification (FDC) system that conducts more active data analysis is feasible to achieve more precise manufacturing process control with advanced machine learning method. However, applying machine learning, especially in supervised learning criteria, requires an arduous data labeling process for the construction of machine learning data. In this paper, we propose a semi-supervised learning to minimize the data labeling work for the data preprocessing. We employed equipment status variable identification (SVID) data and optical emission spectroscopy data (OES) in silicon etch with SF6/O2/Ar gas mixture, and the result shows as high as 95.2% of labeling accuracy with the suggested semi-supervised learning algorithm.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.67-68
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• 2011

This paper analysed a protective equipment in power distribution system linked distribution power system when a superconducting fault current limiter(SFCL) is installed. This paper focused on a recloser, because the recloser is a general protective equipment. When power distribution system linked distribution power system, a fault current is increased by adding fault current of distribution power system. The increased fault current makes many problems. But SFCLs are limiting fault current and help the protective equipment to operate normal process. We analysed the operation of protective equipment in power distribution system linked distribution power system with SFCLs.

• Korean Journal of Computational Design and Engineering
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• v.18 no.2
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• pp.138-147
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• 2013

The liquefaction process system is regarded as primary among all topside systems in LNG FPSO. This liquefaction process system is composed of many types of equipment. LNG equipment on offshore plants has quite different demands on the equipment compared to traditional onshore LNG plants, so the reliability analysis of this process system needs to be performed. This study investigates how DEVS formalism for discrete event simulation can be used to reliability analysis of the liquefaction cycle for LNG FPSO. The reliability analysis method based on DEVS formalism could be better model for reflecting the system configuration than the conventional reliability analysis methods, such as fault tree analysis and event tree analysis.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.4
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• pp.287-293
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• 2002

The unexpected failure of the induction motor makes the downtime of production, and the cost of the process cessation enormous. To reduce the downtime and increase the reliability of the motor, the vibration measurements for the fault detection have been used previously. Recently motor current signature analysis(MCSA) has been adapted for the fault detection and diagnosis of the motors. MCSA provides a powerful analysis tool for detecting the presence of mechanical and electrical faults in both the motor and driven equipment. In this paper, the fault severity of the rotor bar has been derived in terms of the resistance change which is calculated from the equivalent circuit model. Results show that the fault of the rotor can be easily detected and the measured value of the resistance change is verified by the detected fault from on-site tests using MCSA for the induction motors in an iron foundry.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2192-2197
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• 2005

This paper describes how to diagnose SBR plant equipment using time-series data mining. It shows the equipment diagnostics based upon vibration signals that are acquired from each device for process control. Data transform techniques including two data preprocessing skills and data mining methods were employed in the data analysis. The proposed method is not only suitable for SBR equipment, but is also suitable for other industrial devices. The experimental results performed on a lab-scale SBR plant show a good equipment-management performance.

• IE interfaces
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• v.22 no.2
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• pp.126-134
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• 2009

As product quality and yield are essential factors in semiconductor manufacturing, monitoring the main manufacturing steps is a critical task. For the purpose, FDC(Fault detection and classification) is used for diagnosing fault states in the processes by monitoring data stream collected by equipment sensors. This paper proposes an FDC model based on decision tree which provides if-then classification rules for causal analysis of the processing results. Unlike previous decision tree approaches, we reflect the structural aspect of the data stream to FDC. For this, we segment the data stream into multiple subregions, define structural features for each subregion, and select the features which have high relevance to results of the process and low redundancy to other features. As the result, we can construct simple, but highly accurate FDC model. Experiments using the data stream collected from etching process show that the proposed method is able to classify normal/abnormal states with high accuracy.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.36 no.4
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• pp.273-282
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• 2023

Probabilistic safety assessment (PSA) has been widely used to evaluate the seismic risk of nuclear power plants (NPPs). However, studies on seismic PSA for process plants, such as gas plants, oil refineries, and chemical plants, have been scarce. This is because the major disasters to which these process plants are vulnerable include explosions, fires, and release (or dispersion) of toxic chemicals. However, seismic PSA is essential for the plants located in regions with significant earthquake risks. Seismic PSA entails probabilistic seismic hazard analysis (PSHA), event tree analysis (ETA), fault tree analysis (FTA), and fragility analysis for the structures and essential equipment items. Among those analyses, ETA can depict the accident sequence for core damage, which is the worst disaster and top event concerning NPPs. However, there is no general top event with regard to process plants. Therefore, PSA cannot be directly applied to process plants. Moreover, there is a paucity of studies on developing fragility curves for various equipment. This paper introduces PSA for gas plants based on FTA, which is then transformed into Bayesian network, that is, a probabilistic graph model that can aid risk-informed decision-making. Finally, the proposed method is applied to a gas plant, and several decision-making cases are demonstrated.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.24 no.3
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• pp.453-460
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• 2014

Fault injection attack is the process of attempting to acquire the information on-chip through inject artificially generated error code into the cryptographic algorithms operation (or perform) which is implemented in hardware or software. From the details above, the laser-assisted failure injection attacks have been proven particularly successful. In this paper, we propose an improved laser probing system for fault injection attack which is called the Dual-Laser FA tool set, a hybrid approach of the Flash-pumping laser and fiber laser. The main concept of the idea is to improve the laser probe through utilizing existing equipment. The proposed laser probe can be divided into two parts, which are Laser-I for laser cutting, and Laser-II for fault injection. We study the advantages of existing equipment, and consider the significant parameters such as energy, repetition rate, wavelength, etc. In this approach, it solves the high energy problem caused by flash-pumping laser in higher repetition frequency from the fiber laser.