• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.71-79
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• 1995

For the fabrication of high sensitive intrinsic fiber optic Fabry-Perot interferometeric sensor, the deposition conditions of $TiO_{2}$ thin film used to the internal mirrors of the sensor were investigated. The $TiO_{2}$ film deposited by RF magnetron sputter had higher refractive index ($2.36{\sim}2.48$) and better stoiciometry (O/Ti = 2) than that deposited bye-beam evaporator. In the case of forming $TiO_{2}$ internal mirror by using fusion splicing technique, the $TiO_{2}$ reflection mirror deposited by RF magnetron sputter in the condition of 120W RF power showed high. reflectance and excellent controllability of reflection power. The fabricated intrinsic fiber optic Fabry-Perot interferometer with two $TiO_{2}$ internal mirrors deposited under the condition showed very stable fringe patterns. It is, therefore, expected that the interferometer will be applicable to various high precision sensors.

• Journal of Integrative Natural Science
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• v.3 no.3
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• pp.168-173
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• 2010

Novel porous silicon chip exhibiting dual optical properties, both Frbry-Perot fringe (optical reflectivity) and photoluminescence had been developed and used as chemical sensors. Porous silicon samples were prepared by an electrochemical etch of p-type sillicon wafer (boron-doped, <100> orientation, resistivity 1 - 10 ${\Omega}$). The ething solution was prepared by adding an equal volume of pure ethanol to an aqueous solution of HF (48% by weight). The porous silicon was illuminated with a 300 W tungsten lamp for the duration of etch. Ething was carried out as a two-electrode Kithley 2420 preocedure at an anodic current. The surface of porous silicon was characterized by FT-IR instrument. The porosity of samples was about 80%. Three different types of porous silicon, fresh porous silicon (Si-H termianated), oxidized porous silicon (Si-OH terminated), and surface-derivatized porous silicon (Si-R terminated), were prepared by the thermal oxidation and hydrosilylation. Then the samples were exposed to the wapor of various organics vapors. such as chloroform, hexane, methanol, benzene, isopropanol, and toluene. Both reflectivity and photoluminescence were simultaneously measured under the exposure of organic wapors.

• Journal of Sensor Science and Technology
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• v.16 no.5
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• pp.342-348
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• 2007

A high-speed signal processor for Fabry-Perot interferometric sensors using modified ramp modulation is implemented. The main idea for the signal processing is to find a modulation waveform that could induce a linear frequency change in a laser diode to linearize the relationship between the optical phase shift and measurand. It is found that the waveform could be modeled as the addition of a linear term and an exponential term. A signal processor adopting modified ramp modulation technique is implemented and evaluated to find linearity, drift and random walk of $<{\pm}1.5%$, $0.4^{\circ}C$, $5.28{\times}10^{-4}^{\circ}C/{\sqrt{Hz}}$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.12
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• pp.691-697
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• 2000

A fiberoptic sensor using a low-coherence SLD as a light source has been studied. The sensor system employing an intrinsic fiber Fabry-Peort interferometer as a sensing tip and a fiber Mach-Zehnder interferometer as a processing one, overcomes the ambiguous reading caused by the highly periodic natrue of conventional high-precision interferometric sensors and provides unambiguous identification of the desired phase among several candidates on the transfer function of an interferometric signal. A tentative application to the temperature sensor shows the potential that the fiberoptic sensor has a side-dynamic range of $0-900^{\circ}C$ as well as reasonable resolution higher than $0.1^{\circ}C$ without ambiguity. Due to the inherent property of the optical fiber itself and the intrinsic fiber Fabry-Perot interferometer, the proposed fiberoptic sensor will give obvious benefits when it is applied to harsh environments to monitor some physical parameters such as temperature, strain, pressure and vibration.

• Smart Structures and Systems
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• v.12 no.1
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• pp.41-54
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• 2013

Concrete is known as a heterogeneous product which is composed of complex chemical composition and reaction. The development of concrete thermal effect during early age is critical on its future structural health and long term durability. When cement is mixed with water, the exothermic chemical reaction generates hydration heat, which raises the temperature within the concrete. Consequently, cracking may occur if the concrete temperature rises too high or if there is a large temperature difference between the interior and the exterior of concrete structures during early age hydration. This paper describes the contribution of novel Fabry-Perot (FP) fiber optic temperature sensors to investigate the thermal effects of concrete hydration process. Concrete specimens were manufactured under various water-to-cement (w/c) ratios from 0.40 to 0.60. During the first 24 hours of concreting, two FP fiber optic temperature sensors were inserted into concrete specimens with the protection of copper tubing to monitor the surface and core temperature change. The experimental results revealed effects of w/c ratios on surface and core temperature developments during early age hydration, as well as demonstrating that FP fiber optic sensors are capable of capturing temperature variation in the concrete with reliable performance. Temperature profiles are used for calculating the apparent activation energy ($E_a$) and the heat of hydration (H(t)) of concrete, which can help us to better understand cement hydration.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.402-407
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• 2012

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.7
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• pp.418-423
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• 2000

The fiber Fabry-Perot interferometric(FFPI) sensor is well known in the field of industrial diagnosis due to its outstanding properties such as tiny size, simple and rugged structure, and easy interrogation. As other fiber interferometric sensors, it also suffers from ambiguous output caused by highly periodic feature in its optical transfer function. In most cases, the ambiguity leads to relatively short dynamic operating range and long processing time during power-on reset, which limits its application to some specific fields requiring very high resolution. In this paper a method based on double sensing scheme was proposed to overcome the above difficulty. By employing a fringe selection auxiliary FFPI sensor the original FFPI sensor can identify its true position on the phase domain. The performance test with 10mm FFPI sensor and a thermocouple temperature sensor for reference shows wide dynamic range 0-900$\ell$ keeping a reasonable resolution of 0.1$\ell$ over the entire range.

• Smart Structures and Systems
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• v.1 no.4
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• pp.369-384
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• 2005

The main objectives of this paper are to demonstrate the feasibility of using newly developed smart GFRP reinforcements to effectively monitor reinforced concrete beams subjected to flexural and creep loads, and to develop non-linear numerical models to predict the behavior of these beams. The smart glass fiber-reinforced polymer (GFRP) rebars are fabricated using a modified pultrusion process, which allows the simultaneous embeddement of Fabry-Perot fiber-optic sensors within them. Two beams are subjected to static and repeated loads (until failure), and a third one is under long-term investigation for assessment of its creep behavior. The accuracy and reliability of the strain readings from the embedded sensors are verified by comparison with corresponding readings from surface attached electrical strain gages. Nonlinear finite element modeling of the smart concrete beams is subsequently performed. These models are shown to be effective in predicting various parameters of interest such as crack patterns, failure loads, strains and stresses. The strain values computed by these numerical models agree well with corresponding readings from the embedded fiber-optic sensors.

• Journal of Sensor Science and Technology
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• v.6 no.3
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• pp.172-179
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• 1997

This paper describes a multiplexed-multivariate fiber-optic interferometric sensor system with remote sensing capability. Signal processor of the implemented sensor system is designed as a digital fringe counter that is well adapted to the signal processing of the remote fiber-optic Fabry-Perot interferometric sensor array. By summing up the reported optical data of the optical fiber, a guideline for choosing the optical effect suitable for a specific measurand is presented. As an example, a pressure sensing device that utilizes the strain-optic effect of the optical fiber by attaching it onto a stainless steel diaphragm of which diameter is 4.3 cm, is built and attached to the sensor system. The changes in optical phase difference of the fiber-optic Fabry-Perot interferometric press ure sensor while filling a water tank 2 meters high, was counted by the half-fringe counting signal processor. Test results showed that the measurement error is less than ${\pm}3.6\;cm$ over the measured range of 2 meters.