• 제목/요약/키워드: FT-IR/FT-Raman

검색결과 124건 처리시간 0.035초

Change the Properties of Amorphous Carbon Hardmask Film Prepared with the Variation of Process Parameters in Plasma Enhanced Chemical Vapor Depostion Systems

  • Kim, Seok Hwan;Yeo, Sanghak;Yang, Jaeyoung;Park, Keunoh;Hur, Gieung;Lee, Jaeho;Lee, Jaichan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.381.2-381.2
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    • 2014
  • In this study the amorphous carbon films were deposited by PECVD at the substrate temperature range of 250 to $600^{\circ}C$, and the process conditions of higher and lower precursor flow rate, respectively. The temperature was a main parameter to control the density and mirco-structures of carbon films, and their's properties depended with the process temperatrue are changed by controlling precursor flow rate. The precursor feeding rate affect on the plasma ion density and a deposition reactivity. This change of film properties was obtained the instrinsic stress, FT-IR & Raman analysis, refractive index (RI) and ext. coef. (k) measured by ellipsometer. In the process conditions of lower and higher flow rate of precursor it had a different intrinsic stress as a function of the substrate temperature.

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탄소나노튜브 첨가에 따른 복합나노섬유의 기계적-광학적 특성 변화

  • 이미현;송우석;박종윤
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.289-289
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    • 2010
  • 나노섬유는 지름이 수십에서 수백 나노미터(1나노미터=10억분의1m)에 불과한 초극세 물질로 비표면적이 매우 크고[1], 제작이 간편하여, 사용되어지는 고분자의 종류에 따라 에너지 환경 의료 관련 분야에서 전극소재 필터재 피복재 인공 피부등 다양한 분야에서의 활용이 가능하여 전 세계적으로 연구개발이 활발하게 이루어지고 있다. 그러나 그 자체만으로 응용하기에는 그 기계적 전기적 특성의 한계 때문에 응용의 다양성에 제약을 받고 있다. 그러나 그 자체만으로 응용하기에는 그 기계적 열적 전기적 특성을 가진 탄소나노튜브를 첨가한 복합나노섬유에 의해 그 응용영역의 한계를 넓혀가고 있다.[2] 본 연구에서는 전도성 고분자인 polymethyl methacrylate (PMMA)에 multi-walled carbon nanotubes (MWCNTs)를 첨가한 복합나노섬유를 전기방사법(electrospinning method)을 통해서 제조하였다. [2~3] CNTs 첨가농도에 따른 제조된 복합나노섬유의 형상변화와 섬유내의 CNTs 배열상태를 각각 주사전자 현미경(scanning electron microscope: SEM)과 투과전자현미경(transmission electron microscope: TEM)을 이용하여 관찰하였다. 또한, 복합나노섬유의 광학 특성 변화를 CNTs 첨가농도에 따라서 FT-IR과 Raman spectroscopy등을 이용하여 조사하였으며, 나노섬유의 tensile strength의 측정을 통해 CNTs 함량에 따른 기계적 특성 변화를 분석하였다.

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Structural behavior of polyphenylcarbosilane through pyrolysis process

  • 이윤주;김영희;김종일;김수룡;권우택
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.94.1-94.1
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    • 2012
  • 폴리페닐카보실란은 페닐그룹을 포함하고 있는 카보실란계 고분자로서 열분해 후 과량의 탄소를 함유할 수 있는 세라믹 전구체이다. 카보실란계열의 고분자는 산화특성이 있어 SiOC 코팅 용도에도 사용되고 있는데, 폴리페닐카보실란은 free 탄소를 함유하는 SiOC:C 필름을 형성할 수 있다. SiOC 코팅 전구체로는 일반적으로 실리카졸, 실라잔 계열의 고분자, 실록산 계열의 고분자가 사용되고 있으나, 폴리페닐카보실란의 경우 상기 전구체에 비하여 보관 안정성 및 뛰어난 부착특성을 나타낸다. 기존 연구에서는 폴리페닐카보실란으로부터 형성된 SiOC:C 필름의 저유전막, 산화방지막, 분진방지막 등의 응용성에 대하여 고찰한 바 있다. 폴리페닐카보실란은 열처리 온도 영역에 따라 응용 분야가 달라질 수 있는데, 이에 본 연구에서는 각 열처리 온도 영역에 따라 형성되는 SiOC:C 필름의 구조적 변화를 고찰하였다. 필름 형성은 20 % 폴리카보실란 용액을 스핀코팅하고 대기상에서 경화를 실시하였으며, 질소 분위기에서 400 ~ 1200 도 범위에서 열처리하였다. 이렇게 얻어진 300 nm 두께의 필름은 XPS 표면분석과 FT-IR, Solid-NMR을 이용하여 C-Si-O 네트워크 형성의 거동을 확인하였으며, 800 도 이상에서 나타나는 특징적인 free 탄소는 Raman을 이용하여 확인하였다.

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나노세공 Zirconia의 합성 및 특성평가 (Synthesis and Characterization of Nanoporous Zirconia)

  • 우승식;김호건
    • 한국분말재료학회지
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    • 제14권5호
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    • pp.309-314
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    • 2007
  • Zirconia powders with nano size pores and high specific surface areas were synthesized via aqueous precipitation and hydrothermal synthetic method using $ZrOCl_28H_2O$ and $NH_4OH$ under pH=11 and ambient condition. By this reaction. zirconia hydrate $(ZrO_x(OH)_{4-2x})$ was primarily synthesized and the obtained zirconia hydrate was heat treated hydrothermally using an autoclave at various temperatures under pH=11. X-ray diffraction, Scanning electron microscopy, Energy dispersive X-ray spectroscopy, FT-IR, Raman, Particle size analysis, DTA-TG, and BET techniques were used for the characterization of the powder. The synthesized zirconia showed an amorphous phase, however, the phase was transformed to the crystalline state during the hydrothermal process. The observed crystalline phase above $160^{\circ}C$ was a mixed phase of monoclinic and tetragonal zirconia. By the BET analysis, it was found that the specific surface area was ranged in $126{\sim}276m^2/g$ and the zirconia had the cylindrical shaped pores with average diameter of $2{\sim}7nm$.

LPCVD로 성장된 다결정 3C-SiC 박막의 물리적 특성 (Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD)

  • 정귀상;김강산
    • 한국전기전자재료학회논문지
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    • 제19권8호
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    • pp.732-736
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    • 2006
  • This paper describes the physical characterizations of polycrystalline 3C-SiC thin films heteroepitaxially grown on Si wafers with thermal oxide, In this work, the 3C-SiC film was deposited by LPCVD (low pressure chemical vapor deposition) method using single precursor 1, 3-disilabutane $(DSB:\;H_3Si-CH_2-SiH_2-CH_3)\;at\;850^{\circ}C$. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_2$ were measured by SEM (scanning electron microscope). Finally, residual strain was investigated by Raman scattering and a peak of the energy level was less than other type SiC films, From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror, and low defect and strain. Therefore, the polycrystalline 3C-SiC is suitable for harsh environment MEMS (Micro-Electro-Mechanical-Systems) applications.

$SnO_2-P_2O_5-B_2O_3$ 유리구조 및 열적 특성 (Structure and thermal properties of $SnO_2-B_2O_3-P_2O_5$ glasses)

  • 안용태;최병현;지미정;고영수;김형순
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.91-91
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    • 2008
  • $SnO_2-B_2O_3-P_2O_5$ system were prepared by melt-quenching technique in the compositional series containing 50, 55 aod 60mol.% of $SnO_2$. A large glass-forming region was found at the phosphate side of the ternary system with homogeneous glasses containing up to 5-25mol.% of $B_2O_3$. For these glasses, thermal expansion coeffient($\alpha$), glass transition temperature(Tg), and glass softening temperature(Ts), were determined. The values a decrease with increasing $B_2O_3$ content, while Tg and Ts increased. The reason for the observed changes is local structure of the glasses. Local structure of the glasses was investigated by Raman and FT-IR measurements, suggesting that the number of bridging oxygens decreased whereas the non-bridging oxygen concentration increased with increasing $SnO_2$ content in the glasses.

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Effect of Microwave Irradiation on Morphology and Size of Anatase Nano Powder: Efficient Photodegradation of 4-Nitrophenol by W-doped Titania

  • Shojaei, Abdollah Fallah;Loghmani, Mohammad Hassan
    • Bulletin of the Korean Chemical Society
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    • 제33권12호
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    • pp.3981-3986
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    • 2012
  • Anatase nanocrystalline and its tungsten-doped (0.4, 2, and 4 mol %) powders have been synthesized by microwave irradiation through hydrolysis of titanium tetra-isopropoxide (TIP) in aqueous solution. The materials are characterized by XRD, Raman, SEM-EDX, TEM, FT-IR and UV-vis techniques. The nanocrystalline $TiO_2$ particles are 30 nm in nature and doping of tungsten ion decreases their size. As seen in TEM images, the crystallites of W (4 mol %) doped $TiO_2$ are small with a size of about 10 nm. The photocatalytic activity was tested on the degradation of 4-nitrophenol (4-NP). Catalytic activities of W-doped and pure $TiO_2$ were also compared. The results show that the photocatalytic activity of the W-doped $TiO_2$ photocatalyst is much higher than that of pure $TiO_2$. Degradation decreases from 96 to 50%, during 115 min, when the initial 4-NP concentration increases from 10 to 120 ppm. Maximum degradation was obtained at 35 mg of photocatalyst.

Butyl 및 Hexyl기가 도입된 다중벽 탄소나노튜브의 분산성 (Dispersibility of multi-walled carbon nanotubes functionalized with butyl and hexyl group)

  • 유정현;남병욱
    • 한국산학기술학회논문지
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    • 제11권7호
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    • pp.2713-2718
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    • 2010
  • 탄소나노튜브의 분산성을 개선하고자 다중벽 탄소나노튜브(multi-walled carbon nanotube, MWNT)를 초음파 반응기에서 butyllithium 및 hexyllithium solution을 이용하여 표면을 화학적으로 개질하였다. 개질된 MWNT는 적외선 분광분석 및 라만분광법을 이용하여 MWNT에 알킬기가 도입되었는지를 확인하였다. 또한, 열중량분석기를 이용하여 알킬기가 MWNT에 도입된 함량을 분석하였으며, MWNT 및 개질된 MWNT를 다양한 용매에 따른 분산성을 조사하였다. 그 결과 유기물의 함량은 5% 내외로 분석되었고 일정 범위내의 용해도 상수를 갖는 용매에 분산성이 개선됨을 확인하였다.

A Basic Research for Preservation of Works Exhibited in the Outdoor Sculpture Park - A Scientific Analysis of Painted Work 'Conversion' Exhibited in the Cheonmasan Sculpture Park -

  • Oh, Seung-Jun;Wi, Koang-Chul
    • 보존과학회지
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    • 제37권4호
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    • pp.391-401
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    • 2021
  • Outdoor sculptures of modern art works are being damaged and deteriorated as they are exposed to the outdoor environment due to the nature of exhibition in the outdoor environment, but secure of basic data through the measures for conservation and advanced researches still remain in the early stage. The surface of "Conversion" which is exhibited in the Busan Cheonmasan Sculpture Park has been exfoliated and deteriorated due to outdoor exhibition for a long time, so systematic conservation and management of works are considered necessary. Prior to the conservation and management, this study conducted observation of cross section, analysis of inorganic components, FT-IR, Raman and Py-GC/Mass analysis to examine the nature and type of paints used for the work through a scientific analysis. As a result of analysis, paints used for the "Conversion" include paint mixed with silvery aluminium powder and white pigment, reddish paint mixed with toluidine red, bluish paint that mixed prussian blue and titanium white and mixture of phthalocyanine blue and titanium white. The result is expected to be used as basic data for selecting materials necessary for conservative treatment of and establishing a plan for conservative treatment of the "Conversion".

Coordination of an Amino Alcohol Schiff Base Ligand Toward Cd(II)

  • Mardani, Zahra;Hakimi, Mohammad;Moeini, Keyvan;Mohr, Fabian
    • 대한화학회지
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    • 제63권1호
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    • pp.29-36
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    • 2019
  • A potentially tetradentate Schiff base ligand, 2-((2-((pyridin-2-ylmethylene)amino)ethyl)amino)ethan-1-ol (PMAE), and its cadmium(II) complex, [$Cd(PMAE)I_2$] (1), were prepared and characterized by elemental analysis, FT-IR, Raman, $^1H$ and $^{13}C$ NMR spectroscopies and single-crystal X-ray diffraction. In the crystal structure of 1, the cadmium atom has a slightly distorted square-pyramidal geometry and a $CdN_3I_2$ environment in which the PMAE acts as an $N_3$-donor. In the crystal packing of the complex, the alcohol and amine groups of the coordinated ligands participate in hydrogen bonding with iodide ions and form $R^2{_2}(14)$ and $R^2{_2}(8)$ hydrogen bond motifs, respectively. In addition to the hydrogen bonds, the crystal network is stabilized by ${\pi}-{\pi}$ stacking interactions between pyridine rings. The thermodynamic stability of the isolated ligand and its cadmium complex along with their charge distribution patterns were studied by DFT and NBO analysis.