• 제목/요약/키워드: FA system

검색결과 366건 처리시간 0.026초

반도체 웨이퍼 제조공정 클린룸 구조, 공기조화 및 오염제어시스템 (Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process)

  • 최광민;이지은;조귀영;김관식;조수헌
    • 한국산업보건학회지
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    • 제25권2호
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    • pp.202-210
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    • 2015
  • Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

지역난방용 중온수 열원 유기랭킨사이클 성능 특성 (Performance Characteristics of Organic Rankine Cycles Using Medium Temperature District Heating Water as Heat Source)

  • 박우진;유호선
    • 플랜트 저널
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    • 제12권1호
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    • pp.29-36
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    • 2016
  • 최근 늘어가는 에너지 수요를 화석연료에만 의존 할 수 없게 되면서 대체 에너지의 중요성이 대두되고 있으며, 이러한 상황에서 유기랭킨 사이클(Organic Rankine Cycle, 이하 ORC)등 산업체 폐열, 태양열, 지열, 해수 온도차 등의 저등급 에너지를 효과적으로 활용하기 위한 많은 연구가 진행되고 있다. 본 연구에서는 지역난방 축열시 회수수를 혼합하지 않고 ORC를 이용하여 하부사이클을 구성하여 성능해석 상용프로그램으로 작동유체 및 운전특성을 예측하였다. 지역난방수 운전조건인 열원 온도 $120^{\circ}C$, 열원 유량 $163m^3/h$(회수수 유량을 고려한 값)로 하고 이 온도에 적합한 다수의 작동유체를 선정하여 성능해석을 수행하였으며, 최고의 성능이 나타난 R245fa의 경우 269.2kW출력과 6.37%효율을 얻을 수 있었다. 또한 ORC 시스템의 응축기 압력변화에 따라 지역난방 회수수 온도가 $57.3{\sim}85^{\circ}C$범위에 형성됨으로서 보일러 입구온도상승에 따른 연료 절감 효과가 예상되었다.

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정규화 신뢰도를 이용한 핵심어 검출 성능향상 (Improvement of Keyword Spotting Performance Using Normalized Confidence Measure)

  • 김철;이경록;김진영;최승호;최승호
    • 한국음향학회지
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    • 제21권4호
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    • pp.380-386
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    • 2002
  • Rahim의 논문 (M.G. Rahim, et al., PROC. of ICASSP96, 1996)과 같은 기존의 후처리 방법은 음소 모델과 반모델 (anti-model)의 유사도를 이용하여 음소 단위 신뢰도를 계산하고, 이들의 평균을 단어 단위 신뢰도로 정의한다. 그런데 음소단위의 신뢰도가 동일한 확률밀도함수를 갖는 것이 아니기 때문에 특정단어의 경우 계산된 신뢰도는 대체로 낮은 값을 갖는다. 이를 극복하기 위한 방법으로서, 본 논문에서는 기존의 신뢰도를 통계적으로 정규화한 신뢰도를 제안한다. 즉 음소단위의 신뢰도가 가우시안 분포를 갖는다고 가정한 후 트라이 폰(sri-phone) 단위로 정규화하여 동일한 정규분포를 갖도록 한다. 본 논문에서는 제안된 방법의 검증을 위하여 문맥종속 핵심어 모델과 문맥독립 필러 모델을 이용한 일반적인 핵심어 검출기를 사용하였다. 실험결과 제안된 정규화 신뢰도 (NCM: Normalized Confidence Measure)가 불검출율 (WDR: Missed Detection Rate) 8%정도에서 오검출율 (PAR: false alarm rate)을 0.44에서 0.33 FA/KW/HR (false alarm/keyword/hour)로 저하시켰다. 이것은 오검출율에서 성능이 25% 향상된 것이다.

외란에 강인한 정밀공중물자수송시스템 연착륙 알고리즘 설계 (Design of a Robust Precision Aerial Delivery System Soft Landing Algorithm)

  • 김태욱
    • 항공우주시스템공학회지
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    • 제16권4호
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    • pp.77-87
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    • 2022
  • PADS(Precision Aerial Delivery System)은 원형 낙하산을 이용한 공중 물자수송 시스템의 낮은 착륙 정확도를 개선해줄 수 있는 장비로 AGU(Airborne Guidance Unit)을 장착하여 원하는 목적지로 안전하게 물자를 수송할 수 있다. 현재 외국에서 개발된 PADS 성능은 착륙 정확도가 CEP50 100m 범위로 보고되고 있으나 실제 지형 및 기상환경에 따라 많은 차이를 보인다. 산악지역이 많은 국내 환경에서는 국부적인 지형변화에 따른 풍향, 풍속 변화가 심하고 이는 착륙 정밀도에 영향을 미친다. 본 연구에서는 이러한 문제점을 해결하기 위해 PADS의 6DOF 비선형 모델링을 기반으로 HILS(Hardware In the Loop Simulation)를 구축하여 바람 환경에서 Ram air parachute의 기동 특성을 분석하였다. 이러한 기동 특성을 고려하여 EM(Energy Management) 기동과 FA(Final Approach) 기동을 포함한 정밀 연착륙 알고리즘을 설계하였다. PADS 시뮬레이션 결과 CEP50 40m 이내로 정밀 연착륙이 가능하였으며, 향후 이러한 연구 결과를 바탕으로 실제 PADS 투하시험을 통하여 정밀 공중 물자수송 시스템에 적용될 수 있을 것이다.

Construction of the permeate tuner system by the steeple morph of the matter

  • Kim, Jeong-lae;Lee, Woo-cheol
    • International Journal of Advanced Culture Technology
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    • 제6권3호
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    • pp.187-192
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    • 2018
  • Permeate alteration technique is compounded the steeple sway-tuner status of the gleam-differential realization level (GDRL) on the permeate realization morph. The realization level condition by the permeate realization morph system is associated with the sway-tuner system. As to search a dot of the dot situation, we are gained of the permeate value with character-dot by the output signal. The concept of realization level is composed the reference of gleam-differential level for alteration signal by the permeate tuner morph. Moreover displaying a steeple alteration of the GDRL of the average in terms of the sway-tuner morph, and permeate dot tuner that was the a permeate value of the far alteration of the $Per-rm-FA-{\alpha}_{AVG}$ with $14.63{\pm}1.23units$, that was the a permeate value of the convenient alteration of the $Per-rm-CO-{\alpha}_{AVG}$ with $8.28{\pm}0.97units$, that was the a permeate value of the flank alteration of the $Per-rm-FL-{\alpha}_{AVG}$ with $3.28{\pm}0.58units$, that was the a permeate value of the vicinage alteration of the $Per-rm-VI-{\alpha}_{AVG}$ with $0.51{\pm}0.10units$. The sway tuner will be to evaluate at the steeple ability of the sway-tuner morph with character-dot by the permeate realization level on the GDRL that is displayed the gleam-differential morph by the realization level system. Sway realization system will be possible to control of a morph by the special signal and to use a permeate data of sway tuner level.

Constitution of diffusivity variation system by the smooth morph of the material

  • Kim, Jeong-lae;Hwang, Kyu-sung
    • International Journal of Internet, Broadcasting and Communication
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    • 제10권2호
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    • pp.39-44
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    • 2018
  • Wideness variation technique is compounded the smooth diffusivity-vibration status of the fulgurate-space realization level (FSRL) on the wideness realization morph. The realization level condition by the wideness realization morph system is associated with the diffusivity-vibration system. As to search a position of the dot situation, we are acquired of the wideness value with constructed-point point by the diffusivity upper structure. The concept of realization level is composed the reference of fulgurate-space level for variation signal by the wideness vibration morph. Further displaying a smooth variation of the FSRL of the maximum-minimum in terms of the diffusivity-vibration morph, and wideness position vibration that was the a wideness value of the far variation of the $Wid-rm-FA-{\alpha}_{MAX-MIN}$ with $23.24{\pm}3.37units$, that was the a wideness value of the convenient variation of the $Wid-rm-CO-{\alpha}_{MAX-MIN}$ with $7.83{\pm}1.32units$, that was the a wideness value of the flank variation of the $Wid-rm-FL-{\alpha}_{MAX-MIN}$ with $2.99{\pm}0.51units$, that was the a wideness value of the vicinage variation of the $Wid-rm-VI-{\alpha}_{MAX-MIN}$ with $0.51{\pm}(-0.01)units$. The diffusivity vibration will be to evaluate at the smooth ability of the diffusivity-vibration morph with constructed-point by the wideness realization level on the FSRL that is displayed the fulgurate-space morph by the realization level system. Diffusivity realization system will be possible to control of a morph by the special signal and to use a wideness data of diffusivity vibration level.

주파수 선택적 레일리 페이딩 채널에서의 DMF 초기동기 장치의 성능분석 (Performance Analysis of DMF Acquisition System in Frequency-Selective Rayleigh Fading Channel)

  • 김성철;이연우;조춘근;박형근;차균현
    • 한국통신학회논문지
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    • 제24권7B호
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    • pp.1351-1360
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    • 1999
  • 기존의 PN 부호 초기동기 장치는 AWGN 채널에 이상적으로 설계되었으므로 주파수 선택적 레일리 페이딩 채널에서는 이상적인 구조가 아니다. 따라서 본 논문에서는 자동 임계치 제어(Automatic Threshold Control: ATC) 알고리즘을 적용한 디지틀 정합 필터링(DMF)을 기반으로 하여 직접 시퀀스 대역확산(DSSS) 방식에서의 PN 부호 초기동기 장치를 제안하고, 검출확률(PD)과 오류 경보확률(PFA)에 대한 성능을 분석하였다. 초기동기를 위한 탐색 기법은 직렬탐색기법을 고려하였으며, 성능평가를 위한 두 가지 확률은 도플러 주파수, 샘플링 주기, 평균 초기동기 시간 및 PN 칩율 등을 고려하여 주파수 선택적 레일리 페이딩 채널환경에서 유도하고 분석하였다. DMF를 기반으로 한 초기동기 시스템 모델은 시뮬레이션을 결과로부터 ATC 알고리즘을 채택한 모델이 기존의 일정 임계치 시스템보다 성능이 우수하다는 결론을 보였다.

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스포츠 조정·중재제도의 활용방안 - K 선수 사례 중심으로- (The Plan for Application of a Sports Arbitration and Conciliation System -With Kim yeon-kyoung's Case as the Center -)

  • 김규범
    • 한국중재학회지:중재연구
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    • 제26권2호
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    • pp.67-89
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    • 2016
  • An ADR arbitration system has a necessary value in the sports industry for settlement of disputes. Sports disputes should be resolved independently by enacting internal regulations within the basic principles of national law rather than treated as a civil action. If the dispute is not fair and transparent, it may cause distrust. Because an arbitration system has values such as speed, flexibility of economic decisions, professionalism of arbitrator and confidentiality of arbitration-related information, the efficiency of the arbitration system for conflict resolution has emerged recently. We have to assign sports experts to reactivate sports arbitration commission committees which existed from 2006 to 2009 in Korea. Many countries, such as the UK, USA, Canada, New Zealand, Hungary, the Netherlands, Poland, Germany, and Japan, which attain advancement of sports and the International Court of Arbitration establish and run their own sports arbitration agencies. However, Korea disbanded its sports arbitration commission committee for political and economic reasons. In 2012, after their disbanding, athlete Kim Yeon-kyoung came into conflict with Heungkuk Life over terms of free agent acquisition and international transfer certification. Finally they were able to settle those political conflicts. However if there had been related laws in Korea, they could have resolved those problems easily without international disputes. Practically, it would have been almost impossible for Kim Yeon-kyoung to win the dispute. But her problem became an issue after the London Olympics, so she could win. Although it is well for her to take an active role on the international stage, it left much to be desired on account of the intervention of political circles in order to resolve the conflict. If the sports arbitration commission committee in Korea had still been active, it could have come to a peaceful settlement domestically. Therefore we have to reestablish a Korean sports arbitration committee centered around experts of sports law.

Detection of the Popple Spot on the Pulse Variance of the Sonance

  • Kim, Jeong-lae;Kim, Hye-ju;Lee, Kee-young
    • International journal of advanced smart convergence
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    • 제8권1호
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    • pp.106-112
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    • 2019
  • Pulsation variance technique is blended the bumpy popple-sonance status of the brilliant-disparity understanding level (BDUL) on pulsation understanding gestalt. The understanding level condition by the pulsation understanding gestalt system is composed with the popple-sonance system. As to look for a two-node white-small dot of the brilliant situation, we are to take of the pulsation value with two-node white-small dot by the output signal. The concept of understanding level is composed the reference of brilliant-disparity level for variance signal by the pulsation sonance gestalt. Moreover indicating a bumpy variance of the BDUL of the maximum-minimum in terms of the popple-sonance gestalt, and pulsation two-node white-small dot sonance that was the a pulsation value of the far variance of the Pul-ug-FA-${\pi}_{MAX}$-MIN with $23.24{\pm}3.36units$, that was the a pulsation value of the convenient variance of the Pul-ug-CO-${\pi}_{MAX}$-MIN with $7.97{\pm}1.60units$, that was the a pulsation value of the flank variance of the Pul-ug-FL-${\pi}_{MAX}$-MIN with $3.02{\pm}0.47units$, that was the a pulsation value of the vicinage variance of the Pul-ug-VI-${\pi}_{MAX}$-MIN with $0.50{\pm}(-0.01)units$. The popple sonance will be to evaluate at the bumpy ability of the popple-sonance gestalt with two-node white-small dot by the pulsation understanding level on the BDUL that is indicated the brilliant-disparity gestalt by the understanding level system. We will be possible to suppress of a gestalt by the special signal and to utilize a pulsation data of popple sonance level by the popple understanding system.

Analysis on the spread variance by the spill-over spot on the spark sonance

  • Kim, Jeong-lae;Hwang, Kyu-sung
    • International Journal of Advanced Culture Technology
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    • 제7권1호
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    • pp.237-242
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    • 2019
  • Spark variance technique is melded the jagged spill-over-sonance status of the glitter-differentiation knowledge level (GDKL) on the spark knowledge gestalt. The knowledge level condition by the spark knowledge gestalt system is comprised with the spill-over-sonance system. As to search a spot of the glitter situation, we are obtained of the spark value with black-red dot by the spill-over upper structure. The concept of knowledge level is comprised the reference of glitter-differentiation level for variance signal by the spark sonance gestalt. Further presenting a jagged variance of the GDKL of the maximum in terms of the spill-over-sonance gestalt, and spark spot sonance that was the a spark value of the far variance of the Spa-kg-FA-${\rho}_{MAXN}$ with $17.68{\pm}2.22units$, that was the a spark value of the convenient variance of the Spa-kg-CO-${\rho}_{MAXN}$ with $7.55{\pm}0.59units$, that was the a spark value of the flank variance of the Spa-kg-FL-${\rho}_{MAX}$ with $2.70{\pm}0.48units$, that was the a spark value of the vicinage variance of the Spa-kg-VI-${\rho}_{MAX}$ with $0.48{\pm}0.05units$. The spill-over sonance will be to appraisal at the jagged ability of the spill-over-sonance gestalt with black-red dot by the spark knowledge level on the GDKL that is presented the glitter-differentiation gestalt by the knowledge level system. Spill-over knowledge system will be possible to restrain of a gestalt by the special signal and to employ a spark data of spill-over sonance level.