• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.7-10
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• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• 한국환경보건학회지
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• 제27권1호
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• pp.20-26
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• 2001

personal nitrogen dioxide(NO$_2$) exposures for 31 professional drivers were measured using passive sampler and time activity diary in Asan and Chunan area, and were estimated using time-weighted average model. Mean concentrations of driver’s indoor and outdoor were 24.7$\pm$10.7 ppb and 23.3$\pm$8.3 ppb, respectively with indoor/outdoor of 1.1. Mean personal NO$_2$ exposure was 30.3$\pm$9.7 ppb. Personal NO$_2$ exposures were strongly correlated with indoor car NO$_2$ levels ($R^2$=0.80) rather than residential indoor NO$_2$ level ($R^2$=0.55). and outdoor NO$_2$ level ($R^2$=0.50). The driver’s NO$_2$ exposure using LP-gas with 24.4$\pm$8.0 ppb were statistically different from those using diesel with 36.3$\pm$14.1 ppb(p<0.01). The effect of driver’s smoking for personal NO$_2$ exposure was not found. It was considered that the main NO$_2$in driver is transportation. Since drivers mostly spent their times in indoor and inside car, time-weighted average model could be used to estimated personal NO$_2$ exposure using time activity diary, Though we did not measure all microenvironments, the estimated personal NO$_2$ exposures with 26.9$\pm$10.2 ppb were statistically correlated with measured personal NO $_2$ exposures30.3$\pm$9.7 ppb ($R^2$=0.89). The mean and standard deviation of personal NO$_2$ exposure using Mote-Carlo simulation were 26.6$\pm$7.2 ppb.