• Journal of Welding and Joining
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• 제15권5호
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• pp.25-35
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• 1997

현재, 표면개질에 주로 많이 사용되는 레이저는 세 종류로서, C $O_{2}$$laser(파장길이:10.6.\mum),$ Nd:YAG(neodymium-doped yettrium aluminum garnet) $laser(파장길이:1.06.\mum)$ 및 excimer laser(157~350nm) 등이다. 이 외에도 초기에는 ruby레이저빔이 사용되기도 하였으나, 현재는 많이 사용되고 있지 않다. 레이저 빔에 의한 표면개질에는 몇가지 장점이 있는데, 이러한 장점은 주로 급속가열과 급속냉각 효과에 기인하는 것이다. 즉, 1) 급냉효과에 의한 미세한 결정입자 형성, 2) 불안정상 (metastable phase) 또는 비정질 상 생성, 3) 열역학적 용해도 보다 높은 용해도. 4) 편석이 없는 균질한 미세조직, 5) 극히 낮은 기공도, 6) 좁은 열영향 부위, 7) 표면층과 모재 사이의 높은 결합력 등이다. 이 외에도 공정상의 장.단점들이 Ref.5, 6에 잘 요약 정리되어 있다. 지금까지 국내에서 레이저 표면개질에 대한 조사가 몇몇 있었으나, 본 조사에서는 보통 많이 다루어지지 않은 부분, 즉 충격경화 및 표면제어에 비중을 두었으며, 비용융 부분(I)과 용융부분(II)을 분리하여 정리하였다.

• Bulletin of the Korean Chemical Society
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• 제32권3호
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• pp.905-908
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• 2011

We report fluorescence excitation and emission spectra of the CHBr molecule generated via pyrolysis of $CH_3Br$ in a molecular beam experiment. The 193 nm attenuation cross sections were estimated from the reduction of the CHBr signal as a function of the excimer laser fluence. The derived 193 nm absorption cross section for CHBr [$(3.24{\pm}0.59){\times}10^{-17}\;cm^2$] is slightly higher than the absorption cross section previously determined for CHCl [$(2.6{\pm}0.8){\times}10^{-17}\;cm^2$], but the difference is within the estimated uncertainties in the measured cross section.

• Bulletin of the Korean Chemical Society
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• 제30권5호
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• pp.1093-1096
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• 2009

Two new chemosensors 1 and 2 derived from 5,12- and 5,7-dioxocyclams were prepared and their signaling behaviors toward transition metal ions were investigated. Chemosensors 1 and 2 showed very efficient responses toward $Cu_{2+}$ and $Hg_{2+}$ ions. Ratiometric analysis of the fluorescence changes in pyrene monomer and excimer emissions clearly demonstrated the $Cu_{2+}$- and $Hg_{2+}$-selective signaling behavior. The signaling mechanism of the chemosensors is due to conformation changes upon complexation with metal ions and the inherent quenching nature of the complexed $Cu_{2+}$ and $Hg_{2+}$ ions themselves.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.7-7
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• 2007

Laser-irradiation-induced crystallization of as-deposited amorphous precursor films constitutes an integral step in fabricating LTPS TFTs. Consideration of various factors leads one to conclude that, for display manufacturers, choosing how to crystallize the films can be identified as being tactically and strategically significant. This paper will begin by reviewing the fundamental aspects of laser crystallization, and then present noteworthy advances and progress, which have recently been accomplished in the field. In particular, we will focus on communicating the evolving status associated with the sequential lateral solidification (SLS) method, which can be presently identified as the most strategically enabling crystallization method.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2001년도 춘계학술대회 논문집
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• pp.75-90
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• 2001

For the purpose of helping development of a GDI(Gasoline Direct Injection) engine, the in-cylinder phenomena, such as the spray behaviors and fuel distributions, unburned fuel, and flame characteristics were investigated in a single cylinder GDI engine. The GDI engine was equipped with a swirl type electronic injector and SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used for the measurements of the fuel distributions. The effects of the injector specifications, such as the spray cone angle and the offset angle on the fuel distributions and combustion characteristics were investigated. As a result, it was found that the injected fuel spray collided with the bottom of the bowl and moved upward along the exhaust side wall of the piston bowl. This fuel vapor played a important role in the instance of spark ignition. The injector specifications has a great influence on the flame characteristics.

• 한국광학회지
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• 제11권1호
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• pp.33-36
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• 2000

일반적으로 광섬유 격자에 사용되고 있는 KrF 엑시머 레이저를 광출력 스펙트럼 파장천이용으로 이용하였다. 실험 결과, FHD에 의해서 제작된 PLC형 WDM 방향성결합기에서는 UV에 의한 파장천이효과가 비교적 큼을 알 수 있었다. UV 노출량에 의한 파장천이량을 측정하여 UV 노출량에 따른 실리카 광도파로의 유효굴절률 변화량을 계산하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.33-35
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• 2000

Na-K-Nb system showed a number of ferroelectric phases in bulk ceramic. [001]-axis oriented single-phase Na$_{0.5}$K$_{0.5}$NbO$_3$ (NKN) thin film have been grown on LaA1O$_3$ substrates using KrF excimer laser. X-ray diffraction $\theta$-2$\theta$ scan, rocking curves, and $\phi$ scan data evidence highly c-axis oriented along the [001] direction.ion.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.476-479
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• 2000

In this study, mesh-type PECVD system was suggested to minimize the hydrogen concentration. The main structural difference between the triode system and a conventional system is that a mesh was attached to the substrate holding electrode. We investigated several conditions to compare with conventional PECVD. The main effect of mesh was to minimize the substrate damage by ion bombardment and to enhance the surface reaction to induce hydrogen desorption. It was also found that hydrogen concentration decreased but deposition rate increased as increasing applied dias. Applied DC bias enhanced sputtering process. Intense ion bombardment causes the weakly bonded hydrogen or hydrogen-containing species to leave the growing film and increased adatom mobility. Furthermore, addition of hydrogen gas enhance the surface diffusion of adatom. The structural properties of poly-Si films were analyzed by scanning electron microscopy(SEM).

• 한국전기전자재료학회논문지
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• 제13권11호
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.91-92
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• 2007

이 논문에서는 다양한 채널길이에 따른 n-채널 다결정 실리콘 TFT의 특징을 보고한다. Excimer laser annealing (ELA)를 이용한 다결정 실리콘은 디스플레이의 재료로써 줄은 특성을 갖는다. 유리기판 위에 buffered oxide 층을 올리고 ELA 처리를 하여 다결정 실리콘을 제작 하였다. 그 위에 $SiO_2$, $SiN_x$를 증착시켜 n-채널 다결정 실리콘 TFT를 만들었다. 다양한 채널의 길이에 따른 n-채널 TFT의 문턱전압 ($V_{TH}$), ON/OFF 전류비($I_{ON}/I_{OFF}$), 포화 전륙(IDSAT)를 조사하였다. 그 결과 채널의 길이가 짧은 소자에서 더 줄은 TFT의 특징이 나타난다.