• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1448-1450
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• 2001

본 연구에서는 알루미늄 마스크를 이용하여 다결정 실리콘 결정립의 수평성장을 유도하는 새로운 엑시머 레이저 어닐링 방법을 제안한다. 제안된 방법은 비정질 실리콘 박막 위에 알루미늄 패턴을 형성하여 선택적으로 레이저 빔을 차단시키고, 액상 실리콘의 열을 금속박막을 통해 방출시킴으로써 다결정 실리콘 결정립의 수평성장을 유도할 수 있다. 제안된 레이저 결정화 방법을 이용하여 최대 1.6${\mu}m$의 수평성장 결정립을 형성하였고, 알루미늄 패턴의 경계로부터 결정립을 성장시킴으로써 결정립 경계의 위치를 제어하였다. 제안된 방법을 이용하여 제작한 다결정 실리콘 박막 트랜지스터는 기존의 다결정 실리콘 박막 트랜지스터에 비해 전계효과 이동도 및 온/오프 전류비 등의 전기적 특성이 우수하였다.

• 한국세라믹학회지
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• 제33권3호
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• pp.313-320
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• 1996

We have fabricated an in-plane aligned a-axis oriented YBa2Cu3O7-x (a-YBCO) thin film on a LaSrGaO4(100) substrate with a PrBa2Cu3O7-x(PBCO) template layer by two step plused laser deposition using 308 nm XeCl excimer laser. A YBCO layer and PBCO layer grown at low temperatures were used as template layers. We have investigated the effect of the deposition temperature of template layers on the superconducting and struc-tural properties of in-plane aligned a-YBCO thin films. An optimal deposition temperature of the PBCO template layers was 630. In-plane aligned a-YBCO thin films showed an anisotropy ratio in resistivity of 11.5 and a zero resistance temperature of 88 K.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.356-356
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• 2010

In this paper, Poly silicon thin-film transistors (poly-Si TFTs) with employed the SPC (Solid phase crystallization) and ELA (Excimer laser annealing) methods on glass panel substrate are fabricated to investigate the electrical poperies. Poly-Si TFTs have recess-channel structure with formated source/drain regions by LPCVD n+ poly Si in low $650^{\circ}C$ temperature. the ELA-TFT show higher on/off current ratio and subthreshold swing than a-Si and SPC TFT that therefore, these results showed that the ELA-TFT might be beneficial for practical embedded TFT memory device application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.343-343
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• 2010

In this paper, Schottky barrier thin-film-transistors (SB-TFTs) with platinum silicide at source/drain region based on glass substrate were fabricated. Poly-silicon on glass substrates was crystallized by excimer laser annealing (ELA) method. The formation of pt-silicide at source/drain region is the most important process for SB-TFTs fabrication. We study the optimal condition of Pt-silicidation on glass substrate. Also, we propose this device as promising structure in the future.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.89-90
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• 2008

본 연구에서는 PECVD(Plasma Enhanced CVD) 에서 사용하는 유해 가스인 $SiH_4$ 대신에 유기 사일렌 반응 물질인 TEOS(Tetraethyl Orthosilicate, Si$(OC_2H_5)_4)$를 이용하여 상압 화학 기상 증착법 (Atmospheric Pressure CVD, APCVD)으로 실리콘 산화막을 증착하고 박막의 조성과 특성 및 화학적, 전기적 특성들을 살펴보았다. TEOS 반응원료를 이용한 CVD 공정에서 공정 온도를 낮추기 위한 방법으로 강력한 산화제인 오존을 이용하여 공정온도를 $400^{\circ}C$이하로 낮췄으며, 유리기판 상의 ELA(Excimer Laser Annealing)처리된 다결정 실리콘 기판에 트랜지스터 소자를 제작하고, 게이트 절연막으로의 전기적 특성을 살펴보았다.

• 한국분무공학회지
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• 제7권4호
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• pp.42-49
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• 2002

In this study, quantitative measurement of nitric oxide concentration distributions were investigated in the laminar CH4/O2/N2 premixed flame by laser-induced fluorescence (LIF). The NO A-X (0,0) vibrational band around 226nm was excited using a XeCl excimer-pumped dye laser. Selecting an appropriate NO transition minimizes interference from Rayleigh scattering and O2 fluorescence. The measurements were taken in CH4/O2/N2 premixed flame with equivalence ratios varying from $1.0{\sim}1.6$, and a fixed flowrate of 5slpm. NO was found to produce primarily between an inner premixed and an outer nonpremixed flame front, and total NO concentration is raised when equivalence ratios increase. These results suggest that prompt NO is likely to contribute to NO formation in CH4/O2/N2 premixed flame. Furthermore, this trend was well matched with previous works.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2003년도 추계학술발표대회 논문집
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• pp.7-10
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• 2003

Blue-light-emitting peiymer/dielectric nanolayer nanocomposites were prepared by the solution intercalation method and employed in electroluminescent device. Their photoluminescence and electroluminescence characteristics suggested that the nanolayers isolate the polymer chains and hinder the formation of excimers and aggregates. By reducing the excimer formation and its deleterious effects on emission efficiency, both the color purity and the luminescence stability were improved. Furthermore, the dielectric nanolayers have an aspect ratio of about 500 and therefore act as efficient barriers to oxygen and moisture diffusion, which produced a dramatic increase in the device stability.

• Journal of Advanced Marine Engineering and Technology
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• 제27권2호
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• pp.260-271
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• 2003

For the Purpose of understanding the mixing phenomena of a GDI(Gasoline Direct Injection) engine, the spray behaviors and fuel distributions were investigated in a single cylinder transparent GDI engine. The experimental engine is a swirl type GDI engine with a SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used for the measurement of the fuel distributions. The effects of SCV opening angles and the injector specifications on the fuel distribution characteristics were investigated. As a result, it was found that the SCV opening angle had a great effect on the fuel distributions in the late stage of compression process by changing the flow fields in the combustion chamber.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.156-161
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• 2000

In this study, quantitative nitric oxide concentration distributions are investigated in the post-flame zone of laminar premixed $CH_4/O_2/N_2$, flames by laser-induced fluorescence (LIF). The measurements are taken in flames for different equivalence ratios varying from $0.8{\sim}1.4$, and flow rate is fixed as 5slpm. The NO A-X (0,0) vibrational band around 226 nm is excited using a XeCl excimer-pumped dye laser. Selecting an appropriate NO transition minimizes interferences from Rayleigh scattering and $O_2$ fluorescence. NO concentration is rised when equivalence ratios increase at different vertical distances form nozzle tip. In any case, the maximum NO concentration reaches the maximum in reaction zone.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1344-1348
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• 2003

It is generally known to be difficult to etch a surface of a transparent material such as fused silica by conventional laser ablation in which the surface is simply irradiated with a laser beam. A lot of studies have been done to provide a method capable of efficiently etching transparent materials without defects such as cracks. One of the promising methods or the micro-machining of optically transparent materials is laser induced etching. In this study, micro-drilling of fused silica by laser induced wet etching was conducted. KrF excimer and YAG laser were used as light sources. Acetone solution pyrene and ethanol solution of rhodamine were used as etchant.