• Title/Summary/Keyword: Excimer

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Fabrication and characteristics of low temperature poly-Si thin film transistor using Polymer Substrates (저온에서 제작된 고분자 기판 위의 poly-si TFT 제조 및 특성)

  • Kang, Soo-Hee;Kim, Yong-Hoon;Han, Jin-Woo;Seo, Dae-Shik;Han, Jeong-In
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.04a
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    • pp.62-63
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    • 2006
  • In this paper, the characteristics of polycrystalline silicon thin-film transistors (poly-Si TFTs) fabricated on polymer substrates are investigated. The a-Si films was laser annealed by using a XeCl excimer laser and a four-mask-processed poly-Si TFT was fabricated with fully self-aligned top gate structure. The fabricated nMOS TFT showed field-effect mobility of $30cm2/V{\cdot}s$, on/off ratio of 105 and threshold voltage of 5 V.

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Schottky Barrier Thin Film Transistor by using Platinum-silicided Source and Drain (플레티늄-실리사이드를 이용한 쇼트키 장벽 다결정 박막 트랜지스터)

  • Shin, Jin-Wook;Chung, Hong-Bay;Lee, Young-Hie;Cho, Won-Ju
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.6
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    • pp.462-465
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    • 2009
  • Schottky barrier thin film transistors (SB-TFT) on polycrystalline silicon(poly-Si) are fabricated by platinum silicided source/drain for p-type SB-TFT. High quality poly-Si film were obtained by crystallizing the amorphous Si film with excimer laser annealing (ELA) or solid phase crystallization (SPC) method, The fabricated poly-Si SB-TFTs showed low leakage current level and a large on/off current ratio larger than 10), Significant improvement of electrical characteristics were obtained by the additional forming gas annealing in 2% $H_2/N_2$ ambient, which is attributed to the termination of dangling bond at the poly-Si grain boundaries as well as the reduction of interface trap states at gate oxide/poly-Si channel.

Mycosis Fungoides Responsive to Oral Alitretinoin and Ultraviolet B Phototherapy: A Case Report

  • Han, Song Hee;Hong, Ji Youn;Hong, Joo Ran;Hur, Min Seok;Youn, Hae Jeong;Lee, Yang Won;Choe, Yong Beom;Ahn, Kyu Joong
    • Korean journal of dermatology
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    • v.56 no.10
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    • pp.636-639
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    • 2018
  • Mycosis fungoides is the most common type of cutaneous T-cell lymphoma. Patients with early stage disease usually respond well to conventional therapies, with a relatively favorable prognosis. However, a few patients are refractory to treatment and need alternative strategies, even at the patch and plaque stages. We report the case of a middle-aged woman with long-standing and refractory mycosis fungoides that responded to combination therapy with the 308-nm excimer laser and oral alitretinoin.

Ultraviolet-emissive BaSiO3:Ce3+ Phosphor for VUV Excimer Lamp

  • Lee, Jugyeong;Afandi, Mohammad M.;Kim, Jongsu;Heo, Hoon
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.2
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    • pp.1-5
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    • 2021
  • Ultraviolet (UVA)-emissive BaSiO3:Ce3+ phosphor was astonishingly reproducible by vacuum-sintering at a high temperature through a simple solid-state reaction method. It was conveniently formed in BaSiO3 phases. The compound showed the UVA emission and the UV-VUV excitation due to 5d-4f transitions from Ce3+ ions: emission peak at 380 nm with a 56 nm width. Its temperature dependence and vacuum UV excitability were examined for practical application as an excimer discharge lamp, which showed the high thermal stability (80% at 100℃) and the strong VUV excitations at 145 nm and 172 nm.