• 제목/요약/키워드: Erosion and Corrosion

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텅스텐 CMP에서 디싱 및 에로젼 결함 감소에 관한 연구 (A Study on the Reduction of Dishing and Erosion Defects in Tungsten CMP)

  • 박범영;김호윤;김구연;김형재;정해도
    • 한국정밀공학회지
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    • 제22권2호
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    • pp.38-45
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    • 2005
  • Chemical mechanical polishing(CMP) has been widely accepted for the planarization of multi-layer structures in semiconductor fabrication. But a variety of defects such as abrasive contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the metal resistance because they decrease the interconnect section area, and ultimately reduce the lift time of the semiconductor. Due to this reason dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred by over-polishing. The fixed abrasive pad(FAP) was applied and tested to reduce dishing and erosion in this paper. The abrasive concentration decrease of FAP results in advanced pattern selectivity which can lead the uniform removal in chip and declining over-polishing. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed FAP and chemicals.

해수와 청수환경에서 선박용 원심펌프 임펠러 재료의 캐비테이션 특성 (Cavitation Characteristics on Impeller Materials of Centrifugal Pump for Ship in Sea Water and Fresh Water)

  • 임명환
    • Corrosion Science and Technology
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    • 제10권6호
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    • pp.218-224
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    • 2011
  • The fresh water and sea water in present ships is used as cooling water for marine engine. Therefore, corrosion damage in seawater system is frequently occurred. In particular, in the impeller of pump, the performance and material span due to the corrosion and cavitation erosion has adverse effects. Most of the pump impellers in vessels are used Cu-Al alloy. Cu-Al alloy which having the excellent mechanical properties and corrosion resistance is widely used in marine environments. However, despite the excellent characteristics, the periodic replacement parts due to the cavitation damage in seawater is vulnerable to economic viewpoint. In this study, Cu-Al alloy used with impeller for centrifugal pump were conducted various experiments to evaluate its characteristics in seawater and fresh water solutions. As an electrochemical result, the dynamic conditions that exposed to the cavitation environment presented high corrosion current density with collapse of the cavity compared with the static conditions. Cavitation test results, the weightloss and weightloss rate in fresh water are observed more than those of seawater.

용융 알루미늄 도금된 절탄기 강재 튜브의 고상입자 침식 특성 (Solid Particle Erosion Properties of Hot-Dip Aluminized Economizer Steel Tube)

  • 박일초;한민수
    • Corrosion Science and Technology
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    • 제20권6호
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    • pp.384-390
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    • 2021
  • In this paper, durability evaluation and surface damage mechanism were investigated through solid particle erosion (SPE) test after applying hot-dip aluminizing (HDA) technology for the purpose of maintenance of marine economizer tube. Damaged surface shape was analyzed using SEM and 3D microscope. Compositional changes and microstructure of the HDA layer were analyzed through EDS and XRD. Durability was evaluated by analyzing weight loss and surface damage depth after SPE. HDA was confirmed to have a two-layer structure of Al and Al5Fe2. HDA+HT was made into a single alloy layer of Al5Fe2 by diffusion treatment. In the microstructure of HDA+HT, void and crack defect were induced during the crystal phase transformation process. The SPE damage mechanism depends on material properties. Plastic deformation occurred in the substrate and HDA due to ductility, whereas weight loss due to brittleness occurred significantly in HDA+HT. As a result, the substrate and HDA showed better SPE resistance than HDA+HT.

해수 열교환기용 재료의 부식특성에 관한 전기 화학적 연구 (An Electrochemical Study on the Corrosion Property of Materials for Sea Water Heat Exchange System)

  • 김진경;김강희;김성종;박근현;문경만
    • Journal of Advanced Marine Engineering and Technology
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    • 제26권1호
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    • pp.99-107
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    • 2002
  • Recently all kinds of structural materials are subjected to the severe corrosive environment. Especially corrosion problems of heat exchanger such as galvanic corrosion, erosion and cavitation raised by both contaminated solution and high velocity of fluid to increase cooling effect of heat exchanger have been frequently reported in these days. In this study two kinds of sheet materials and five kinds of tube materials are used for galvanic corrosion characteristics and their corrosion current density calculation. The tube materials having the most galvanic corrosion resistance between tube and sheet of heat exchanger were Al Brass(68700) and Al Brass(C6872TS) and although Ti tube predominantly indicated the highest individual corrosion resistance among those five tube materials. it appeared that Ti tube can be allowed as sheet materials to get galvanic corrosion easily. However it is considered that Cu-Ni tube materials is not only easy to produce galvanic corrosion significantly between tube and sheet regardless of kinds of sheet materials but also is appeared considerably its own high corrosion current density

Impact of geometric pattern corrosion on limit failure pressure of buried gas pipelines

  • Hassani, Nemat;Kolbadi, S. Mohammad S.;Shiravand, Mahmud Reza;Golafshani, Jafar H.
    • Structural Engineering and Mechanics
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    • 제59권5호
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    • pp.795-802
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    • 2016
  • Gas pipelines are types of structures that are highly susceptible to corrosion. Sometimes, the pipes are subjected to a thinning of the wall thickness at the inside or outside wall due to erosion/corrosion. Therefore, it is important to evaluate the strength of the pipes undergoing corrosion to maintain the integrity of the piping systems. The main purpose of this study is to understand failure aspects caused by degradation of metal due to corrosion through. The ASME standard offers a relationship for the yielding pressure of the corroded pipes which was compared with the finite element results. The results demonstrate to obtain accurate results, the ASME relationship is unreliable. Moreover, pitting corrosion must be considered critical more than of other types.

감육된 탄소강배관의 변형과 파괴거동 (Deformation and Fracture Behavior of Wall Thinned Carbon Steel Pipes)

  • 안석환;남기우
    • 한국해양공학회지
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    • 제20권4호
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    • pp.17-23
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    • 2006
  • Monotonic four-point bending tests were conducted on straight pipe specimens, 102 mm in diameter with local wall thinning, in order to investigate the effects of the depth, shape, and location of wall thinning on the deformation and failure behavior of pipes. The local wall thinning simulated natural erosion/corrosion metal loss. The deformation and fracture behavior of the straight pipes with local wall thinning was compared with that of non wall-thinning pipes. The failure modes were classifiedas local buckling, ovalization, or crack initiation, depending on the depth, shape, and location of the local wall thinning. Three-dimensional elasto-plastic analyses were carried out using the finite element method. The deformation and failure behavior, simulated by finite element analyses, coincided with the experimental results.

EIS를 이용한 염해에 노출된 철근콘크리트의 부식개시 측정에 관한 실험적 연구 (An Experimental Study on Measurement of Corrosion Initiation in Reinforced Concrete Exposed to Chloride Using EIS Method)

  • 박동진;박장현;이광수;이한승
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2017년도 추계 학술논문 발표대회
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    • pp.61-62
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    • 2017
  • In this study, the initiation of steel corrosion was monitored due to chloride attack using embedded sensor. In general, Steel bars embedded in concrete are protected from corrosion by being forming a passive film on the surface. However, the passive film is destroyed by chemical erosion such as concrete carbonation and chloride penetration, and the rebar is exposed to the deteriorating factor and corrosion proceeds. In order to realize the initiation of steel corrosion, OCP and change of Impedance parameter were observed by using Half-cell and EIS method depending on cover depth. As result, 10mm cover showed the impedence increased in 6weeks.

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세라믹 溶射皮膜의 强度向上에 관한 硏究

  • 김영식;배차헌;김영식
    • Journal of Welding and Joining
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    • 제9권3호
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    • pp.18-25
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    • 1991
  • The purpose of this paper was to investigate the effect of deposition configuration on the mechanical properties of the flame sprayed titania ceramic coating. The sprayed deposition configuration was made in different five types with titania ceramic and Ni-base alloy on the mild steel substrate. The composite coating exhibited superior mechanical properties such as hardness, adhesive strength, thermal shock resistance and corrosion resistance, whereas the mixed coating proved to be more resistant to erosion. Especially graded coating, which consist of Ni-base alloy undercost, intermediate grade coat and titania ceramic overcost, showed excellent mechanical properties.

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레이저를 이용한 크롬카바이드 플라즈마 용사층의 특성향상 (LASER CONSOLIDATION OF THE PLASMA COATED CHROME CARBIDE LAYER)

  • 안희석;이창희
    • 한국재료학회지
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    • 제7권3호
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    • pp.203-212
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    • 1997
  • This paper evaluated the feasibility of laser consolidation for improving the properties of the plasma coated layer, Further, the mechanim of the degradation sequence of the chrome carbide layer applied on the turbine blades was postualted. The laser consolidation could be successfully applied for improcing the surface properties of the plasma coated blade, if a proper condition was carefully chosen. The consolidated layer had erosion & corrosion resistance and vond strength superiro to those of the as-plasma coated layer. The properties of the consolidated layer were strongly dependent upon the degree of dilution, especially on the Fe pickup from the substrate. The degradation of the plasma coating layer was thought to be a reault of the repeating action of the solid particle erosion, corrosion penetration through the pores and oxide films formed along the interlayer surface and impact spalling.

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Modeling of deposition and erosion of CRUD on fuel surfaces under sub-cooled nucleate boiling in PWR

  • Seungjin Seo;Nakkyu Chae;Samuel Park;Richard I. Foster;Sungyeol Choi
    • Nuclear Engineering and Technology
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    • 제55권7호
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    • pp.2591-2603
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    • 2023
  • Simulating the Corrosion-Related Unidentified Deposit (CRUD) on the surface of fuel assemblies is necessary to predict the axial offset anomaly and the localized corrosion induced by the CRUD during the operation of nuclear power plants. A new CRUD model was developed to predict the formation of the CRUD deposits, considering the deposition and erosion mechanisms. The heat transfer and capillary flow within the CRUD were also considered to evaluate the boiling amount within the CRUD layer. This model predicted a CRUD deposit thickness of 44 ㎛ during a one-cycle operation of the Seabrook nuclear power plant. The CRUD deposition tended to accelerate and decelerate during the simulation, by being related to boiling mechanism on the deposits surface. Additionally, during a three-cycle operation corresponding to the refueling period, the CRUD deposition was saturated at a thickness of 80 ㎛, which was in good agreement with the suggested thickness for CRUD buildupin pressurized water reactors. Surface boiling on the thin CRUD deposits enhanced the acceleration of the deposition, even when the wick boiling properties were not favorable for CRUD deposition. To ensure the certainty of the simulation results, sensitivity analyses were conducted for the porosity, chimney density, and the constants employed in the proposed model of the CRUD.