• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.189-190
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• 2011

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance (RC) delay나 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 SiO2와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 SiO2 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200 도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 SiO2와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장 했다. 이는 V의 oxide formation nergyrk Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, V+5 이온 반경이 Mn+2 이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• Economic and Environmental Geology
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• v.42 no.4
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• pp.357-366
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• 2009

Since weathering weakens the rock fabric and exaggerates any structural weakness, it affects mechanical properties as well as physical and chemical properties of rock. Weathering leads to a decrease in density, strength, friction angle and cohesion, and subsequently it affects negatively on the stability of rock slope. The purpose of the study is to investigate the changes of the rock slope stability caused by discontinuities which have different weathering grades. For that, the discontinuity samples which are divided into two different weathering grades are obtained from the field and tested their mechanical properties such as JCS, JRC and residual friction angle. In order to evaluate the effects on the stability of slope due to weathering, the deterministic analysis is carried out. That is, the factors of safety for planar failure are calculated for rock masses which have two different weathering grades, such as fresh and weathered rock mass. However, since the JRC and friction angle values are widely scattered and the deterministic analysis cannot consider the variation, the factors of safety cannot represent properly the stability of the rock slope. Therefore, the probabilistic analysis has been used to consider the scattered values. In the deterministic analysis, the factors of safety for the fresh discontinuity and weathered discontinuity are 1.25 and 1.0, respectively. The results indicate the fresh discontinuities are stable for planar failure and the weathered discontinuities are marginally stable. However, the probabilities of failure for the fresh discontinuity and weathered discontinuity are 25.6% and 45.9%, respectively. This shows that both discontinuities are analyzed as unstable in the probabilistic analysis.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.11 no.5
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• pp.38-59
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• 2008

This research has a meaning to provide basic data for eco-friendly way of district unit plans and ecological landscape planning by evaluation of biotope preservation value at the level of district unit and designating land development of the site, the whole area of Sinseo-dong (Dong-gu, Daegu metropolitan city) for research site. The summary of analysis result is as follows. As a result of classification of biotope types on the research site, it is divided into 11 biotope groups such as a residential biotope group and 51 specific biotope types which is subordinate to the groups. As a result of the first value assessment on classified biotope types, there are 16 types of natural rivers which is full of vegetation as a I class. Also it is analysed as 9 types of IIclass, 14 of IIIclass, 8 of IVclass, and 4 of Vclass. In particular, in light of a wildlife habitat, EB, in case of broad-leaved tree of mixed forest assessed as a II class, was classified into Iclass which is one-step upgraded as a final class with the analysis as there is a structural characteristic (more than 71% of low density, 50 years of age-class). As a result of second assessment, it is analysed that there are 17 special sites (1a,1b) and 33 special sites (2a, 2b, 2c) respectively for preservation of species and biotope. Particularly, in case of the No. 27 space, it was assessed that it has the value of about medium (IIIclass) level, but its value was upgraded with the on-spot detailed investigation that most of Aristolochia contorta, designated as a rare plant by Ministry of Environment, is growing. It is regarded that the above-mentioned research result on evaluation of biotope preservation value is expected to provide very important basic materials for future district unit plans and smooth integration with landscape ecology plans and eco-friendly space development.

• Journal of Biosystems Engineering
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• v.20 no.2
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• pp.162-172
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• 1995

The ventilation in greenhouse have been important for such as adjustment of temperature, supplying of the oxygen, prevention of the overhumidity, density adjustment of $CO_2$, discharge of harmfulness gas, etc. However, the general ventilation which had been used the quantitative control method in discharge of a property of air mechanism in greenhouse, and caused mainly in waste of the heating energy and growth obstacle of the vegetable. Therefore, this study was peformed to obtain more scientific ventilation method using by analysis and measurement of the isothermal lines according to opening of window ventilation in greenhouse, and the results are summarized as follows. 1. The ventilating amount was more influenced by rather opening amount of window than the ventilating time. 2. In window ventilation, the temperature in greenhouse was mostly changed within 5 minutes after ventilating not regard to the spot of opening, after about 10 minutes temperature became to equilibrium state under the respective ventilating conditions. 3. In opening of the skylight only, isothermal lines were complicated, therefore, a tall vegetable may be possible to damage by a cold-weather from the lower central port in greenhouse. 4. Isothermal lines were a tendency to simply in opening of a side window that may be more effective ventilation in kinds of the short vegetable. 5. In conditions of internal temperature>setting temperature>external temperature, a skylight can be suitable to open 10~20cm in order to the optimum ventilation in greenhouse. 6. In conditions of internal temperature>external temperature>setting temperature, opening of all the windows or both the side windows that can be suitable in order to obtain the optimum ventilation in greenhouse. 7. An effect of ventilation was the most excellent to open of all the windows or both the side windows, and it were also found orderly excellent to open of the side window and the skylight or the skylight only, to open of the side window only. 8. Temperature was varied as the equation of T=Tc+ (To-Tc)e-at, and the ranges of (a) values were limited within 0.34~0.68. 9. A variations of humidity were similar to that of temperature, s.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.131-139
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• 1998

$CdS_{0.67}Se_{0.33}$ single crystal was grown by vertical sublimation method of closed tube physical vapour deposition. The (0001) growth plane of oriented single crystals was confirmed from the back-ref1ection Laue patterns. From the Hall effects by van der Pauw method, the as-grown $CdS_{0.67}Se_{0.33}$ single crystals were found to be n-type semiconductors. The mobility appeared to be decreased by lattice scattering at temperature range from 150K to 293K and by impurity scattering at temperatures ranging from 30K to 150K In order to explore its applicability in photoconductive cells, we measured the ratio of photo-current to dark-current (pc/dc), maximum allowable power dissipation (MAPD), spectral response and response time respectively. The results indicated that for the samples annealed in Cu vapour the photoconductive characteristics are best. We obtained sensitivity of 0.99, the value of pc/de of $1.84{\times}10^{7}$, the MAPD of 323mW and the rise and decay time of 9.3 ms and 9.7 ms, respectively.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.491-495
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• 2005

Vanadium pentoxide xerogels with a doping ratio of $Al/V_2O_5$ ranging from 0.01 to 0.05 were synthesized by doping Al into $V_2O_5$ xerogel via the sol-gel process. By using the synthesized $Al_xV_2O_5$, the $Li/Al_xV_2O_5$ cells were assembled to investigate the chemical and electrochemical properties. Surface morphology of the $Al_xV_2O_5$ xerogel showed an anisotropic corrugated sheet-like matrix, and the interlayer distance was about $11.5{\AA}$. The IR spectra of the $Al_xV_2O_5$ revealed that the doped Al was coordinated to the vanadyl group in $V_2O_5$. The $Al_xV_2O_5$ xerogels showed enhanced reversibility and energy density compared with the $V_2O_5$ xerogel. The specific capacity of the $Al_{0.05}V_2O_5$ xerogel was more than 200 mAh/g at 10 mA/g discharge rate, and cycle efficiency was about 90% after the 31st cycling test between 1.9 V and 3.9 V.

• Korean Chemical Engineering Research
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• v.53 no.2
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• pp.211-215
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• 2015

The hydrolysis of defatted rice bran using near-critical water was performed, and the feasibility of consequent hydrolyzate as a growth medium was investigated by the cultivation of Saccharomyces cerevisiae. The near-critical water hydrolysis was carried out through a series of batch experiments, and the contents of total carbohydrates, disaccharides, and monosaccharides, total organic carbon (TOC), total nitrogen (TN), pH of products were measured. The growth rate of Saccharomyces cerevisiae was measured with optical density. The yield of total carbohydrates, TOC, and TN increased with temperature below $240^{\circ}C$, however, decreased above $240^{\circ}C$. The decrease of yields above $240^{\circ}C$ was caused by the formation of organic acids, and it agreed with the change of pH of products. The yield of glucose was a maximum at $200^{\circ}C$ and it decreased dramatically at higher temperature. The growth rate of Saccharomyces cerevisiae cultivated in the hydrolyzate was similar with that in the commercial medium under certain conditions. The growth rate was correlated with the content of glucose in hydrolyzate.

• Journal of the Korean Chemical Society
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• v.32 no.6
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• pp.593-602
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• 1988

Polymer-supported crown ethers (Ps-CE) which can be used for phase-transfer catalyst (PTC) were synthesized for the purpose of allowing reusable function to ordinary crown ethers, and the kinetics of the liquid-solid-liquid triphase-catalyzed nucleophilic displacement reaction of iodide (aqueous phase) on 1-bromooctane (organic phase) using synthesized Ps-CE (solid) were studied. Ps-CE were obtained by grafting of hydroxymethyl crown ethers to 1~2% cross-linked chloromethylated polystyrene. All reactions followed a pseudo-first order dependency on the 1-bromooctane concentration and the observed rate constants $(k_{obsd})$ were linearly related to the molar equivalents of Ps-CE, and were subjected to the influence of cross-linking density of polymer backbone, solvent and the reaction temperature. The catalytic activity of Ps-CE was also compared with that of structurally similar soluble crown ethers, and used Ps-CE were easily recovered after the reaction by simple filtration and could be reused without loss of catalytic activity in the same anionic displacement reaction. Enthalpies and entropies of activation associated with the displacement were 10~20kcal $mol^{-1}, 20~55eu. respectively, and the free energy of activation was ~30kcal mol^{-1}$.

• Geophysics and Geophysical Exploration
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• v.20 no.4
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• pp.207-215
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• 2017

To develope shale play which is one of unconventional energy resources, horizontal drilling and hydraulic fracturing are necessary and those are applied to the place where the differential horizontal stress ratio (DHSR) is low. The differential horizontal stress ratio is generally calculated by the minimum and maximum horizontal stress, but it is also calculated from dynamic elastic constants and anisotropic parameters. In this study we analyzed anisotropic properties through the core samples from Danyang limestone and calculated DHSR. The three types of core samples shaped in three directions (vertical, parallel and 45 degree to bedding) were used for laboratory test. We measured P-, S-wave velocities, and density and then calculated dynamic elastic constants, compliance and DHSR. According to the results of the core sample analysis the calculated DHSR is 0.185. Thomsen parameters of the Danyang limestone used in this study are characterized by the P- and S-wave velocities varying along the bedding symmetry axis. It is observed that the DHSR value is more affected by the change in compliance value than the Poisson's ratio. It is necessary to measure SH-wave velocity for more correct petrophysical properties.

• Food Science and Preservation
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• v.20 no.5
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• pp.650-658
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• 2013

Apple juices were sterilized by continuous pulsed electric field (PEF) treatments of pulse width of 25 ${\mu}s$ at electric field intensity of 20.0 kV/cm, and with the varied pulse frequencies of 35 Hz (40 kJ/L), 55 Hz (70 kJ/L), 72 Hz (100 kJ/L) and 85 Hz (130 kJ/L). The PEF treatments of apple juice reduced the microbial counts from 5.3 log CFU/mL of initial state to 3.0 log CFU/mL after PEF treatment at energy density of 130 kJ/L. Also yeast and fungi after PEF treatments were reduced from 5.3 log CFU/mL to 3.0 log CFU/mL and Escherichia coli were from 5.3 log CFU/mL of initial state to 4.7 log CFU/mL to < $10^1$ CFU/mL. The soluble solids and free sugars did not significantly differ (p<0.05) depending on conditions of PEF treatment. The total phenolic contents and antioxidant activity such as the DPPH and ferric reducing antioxidant power (FRAP) by PEF treatments were significantly partly reduced, but the PEF-reduced value came in smaller quantities than the heat treatment at $65^{\circ}C$. The iterative PEF treatments with pulse width of 25 ${\mu}s$ and pulse frequency of 85 Hz at electric field intensity of 20.0 kV/cm showed limited in microbial reduction. Also, total phenolic contents and antioxidant activity such as DPPH and FRAP, significantly decreased depending on treatment numbers of PEF (p<0.05).