• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.105-105
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• 2009

$ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

• 환경영향평가
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• 제27권2호
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• pp.194-202
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• 2018

국내 법적인 건강영향평가로서 환경영향평가 내 위생 공중보건 항목의 평가는 특정 개발 사업에서 배출되는 유해대기오염물질 배출량 및 주변 주요 지점의 노출농도 산정, 이를 활용한 위해성 평가로 진행되고 있다. 하지만 개발 사업부지 주변의 노출 가능한 인구집단 규모를 고려하지 못하는 등 개발 사업부지 주변의 수용체 특성은 해당 위해성 평가에서 제대로 반영되지 못하고 있다. 본 논문의 목적은 개발 사업부지 주변의 노출 가능한 인구수를 산정 반영한 위해성 평가를 위해 잠재노출 인구수의 산정 및 이를 실제 위생 공중보건 항목 작성 시 활용하는 방안을 제안하는 것이다. 개발 사업부지 주변의 인구수 산정 관련한 국내 자료 현황을 파악하고 이를 고려한 잠재노출 인구수 산정 알고리즘을 제안하였다. 나아가 산업단지 개발 시 유해대기오염물질 배출을 가정한 사례 분석을 수행하였다. 잠재노출 인구수를 활용한 위해성 평가는 인구집단 위해도 개념이 적용되어야 함을 제시하였으며, 향후 연구로 평가결과에 대한 건강영향 여부의 판단기준 설정이 요구됨을 제안하였다. 또한 본 논문의 잠재노출 인구수 산정방법을 통해 개발사업의 입지제한 도구로의 활용가능성을 제안하였다. 이번 논문은 위생 공중보건 항목 작성 시 개발 사업부지 주변의 수용체 특성을 반영한 위해성 평가를 수행하는 방안을 제시했다는 것에 의미가 있다.

• 분석과학
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• 제10권2호
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• pp.105-113
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• 1997

본 실험은 경남 일광 지역의 한 폐광의 토양에 함유된 중금속의 함량을 연구한 것이다. 세 지점을 선택하여, 각 지점마다 30cm씩 210 또는 240cm까지 굴착하였다. 각 시료는 풍건한 후 왕수분 해법으로 추출한 다음, 유도결합쌍 플라즈마 원자방출분광법(ICP-AES)으로 정량분석하였다. Zn, Pb, Cr, Cd, Cu, Mn 및 Fe를 대상으로 분석하였고, Pb, Cd 및 Zn의 함유량의 최대값은 $(4.6{\pm}0.1){\times}10^3$, 9.4(${\pm}3.6$) 및 $(2.7{\pm}0.1){\times}10^2{\mu}g/g$으로 각각 나타났다. 1번 지역의 평균 pH값은 3.2, 2번 지역은 2.6, 그리고 3번 지역은 2.8로 나타났다. 그 값들은 4.9로 나타난 표준 시료 토양의 pH값에 비해 현저히 낮다. 각 시료 채취 지점에서, 중금속의 최대값은 30cm부터 60cm 깊이 사이에서 관찰되었다. Zn, Cd, Pb 및 Cu의 깊이에 따른 중금속 함량들은 분포된 경향이 비슷하게 나타나지만, Fe, Cu 및 Mn은 앞의 중금속들과는 분포된 경향이 다르게 나타났다.

• 한국환경독성학회:학술대회논문집
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• 한국환경독성학회 2003년도 춘계학술대회
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• pp.148-148
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• 2003

This study is to investigate the environmental levels and trend of dioxins, which was the 3$\^$rd/ year of environmental monitoring research for endocrine disrupting chemicals since 1999. Total 282 samples were analyzed from 115 sites including 26 sites of airs, 43 sites of waters, 11 sites of sediments and 35 sites of soil, which were the same as those of investigated sites in 2000. Sampling period was from June 2001 to June 2002. Target chemicals were seventeen species of 2,3,7,8-chlorine-substituted PCDD and PCDF congeners and were analyzed by the standard methods, established by National Institute Environmental Research (NIER). The average concentration of dioxins in air decreased from 0.324 pg-TEQ/N㎥ in 2000 to 0.287 pg-TEQ/N㎥ in 2001, and those in water and soil were 0.073pg-TEQ/L and 1.703pg-TEQ/dry g, respectively, which was the less values detected in 2000. In sediment, however, the value was 0.086pg-TEQ/dry g, which was the increase from the value of the year 2000. The concentration range of dioxins in air for 26 sites in 17 regions detected were 0.013∼l.664pg-TEQ/N㎥, 4 sites from those were exceeded the Air Quality Standards of Dioxin in Japan (0.6 pg-TEQ/N㎥). The tolerable daily intake of dioxins was calculated at the highest level (1.664) in air, with referring the soil and food data from Japan, was calculated to be 2.85pg-TEQ/kg/day, which was below the level of 4 pg-TEQ/kg/day suggested in KFDA(Korea). While the average concentration of dioxins in 15 big cities was 0.190 pg-TEQ/N㎥, that in 8 medium/small cities constituting an industrial complex was 0.558 pg-TEQ/N㎥. In water, the concentration range detected were 0∼0.946pg-TEQ/L and the trend of the average concentrations shows an increase from those of 1999 but decreased from those of 2000, any sites however were not exceeded the Water Quality Standards of Dioxin in Japan (1 pg- TEQ/L). In soil. the detected range were 0∼43.333 pg-TEQ/dry g and the average concentration decreased, compared with the results of 2000. According to the monitoring results by land utilization, the detected range were 0∼43.333pg-TEQ/dry g in farmland, 0.017∼0.601 pg-TEQ/dry g in the industrial area, 0.005∼0.049pg-TEQ/dry g in the park and 0.008∼1.825 pg-TEQ/dry g in the rest. In sediment, the detected range increased from 0∼0.244 pg-TEQ/dry g to 0∼0.537 pg-TEQ/dry g, based on the results of 2000. For the proper control of dioxins, continuous monitoring needs to be performed and in addition, the dioxin inventory should be prepared for major sources through the dioxin emission survey. These results would provide sound and solid basis for proper decision making of dioxins management like establishment of environmental quality standards in Korea.

• Journal of Pharmaceutical Investigation
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• 제35권6호
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• pp.437-443
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• 2005

A rapid, selective and sensitive reversed-phase HPLC method for the determination of a major metabolite of terfenadine, fexofenadine, in human serum was developed, validated, and applied to the pharmacokinetic study of terfenadine. Fexofenadine and internal standard, haloperidol were extracted from human serum by liquid-liquid extraction with acetonitrile and analyzed on a $Symmetry^{TM}$ C8 column with the mobile phase of 1% triethylamine phosphate (pH 3.7)-acetonitrile (67:33, v/v, adjusted to pH 5.6 with triethylamine). Detection wavelength of 230 nm for excitation, 280 nm for emission and flow rate of 1.0 mL/min were fixed for the study. The assay robustness for the changes of mobile phase pH, organic solvent content, and flow rate was confirmed by $3^{3}$ factorial design using a fixed fexofenadine concentration (50 ng/mL) with respect to its peak area and retention time. In addition, the ruggedness of this method was investigated at three different laboratories using same quality control (QC) samples. This method showed linear response over the concentration range of 10-500 ng/mL with correlation coefficients greater than 0.999. The lower limit of quantification using 0.5 mL of serum was 10 ng/mL, which was sensitive enough for the pharmacokinetic studies of terfenadine. The overall accuracy of the quality control samples ranged from 95.70 to 114.58% for fexofenadine with overall precision (% C.V.) being 3.53-14.39%. The relative mean recovery of fexofenadine for human serum was 90.17%. Stability studies (freeze-thaw, short-term, extracted serum sample and stock solution) showed that fexofenadine was stable during storage, or during the assay procedure in human serum. However, the storage at $-70^{\circ}C$ for 4 weeks showed that fexofenadine was not stable. The peak area and retention time of fexofenadine were not significantly affected by the changes of mobile phase pH, organic solvent content, and flow rate under the conditions studied. This method showed good ruggedness (within 15% C.V.) and was successfully used for the analysis of fexofenadine in human serum samples for the pharmacokinetic studies of orally administered Tafedine tablet (60 mg as terfenadine) at three different laboratories, demonstrating the suitability of the method.

• Journal of Pharmaceutical Investigation
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• 제32권2호
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• pp.119-125
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• 2002

A rapid, selective and reproducible high-performance liquid chromatographic method has been developed for the determination of terazocin in human plasma. Terazocin plus the internal standard, prazocin hydrochloride, were extracted from alkalified plasma with tert-butylmethyl ether, back-extracted into 0.05% phosphoric acid. Fifty ${\mu}l-portions$ of extract were injected onto a octadecylsilane column and eluted with a mixture of acetonitrile, water and triethylamine (30 : 70 : 0.1 v/v, adjusted to pH 5.0 with dilute phosphoric acid) at a flow rate of 1.0 ml/min. The fluorescence intensity of column eluents was monitored at excitation wavelength of 250 nm and emission wavelength of 370 nm. No interference peaks were observed. The practical limit of quantitation was 5 ng/ml for terazocin. The average intraday and interday coefficients of variation were 4.15 and 3.54%, respectively. Also intraday and interday precisions over the range $5{\sim}60\;ng/ml$ were $0.49{\sim}2.92\;and\;0.38{\sim}5.12%$, respectively. The bioequivalence of two terazosin tablets, the $Hytrine^{\circledR}$ (Il Yang Pharmaceutical Co., Ltd.) and the $Teratonin^{\circledR}$ (Sam-A Pharmaceutical Co., Ltd.), was evaluated according to the guideline of Korea Food and Drug Administration (KFDA). Sixteen healthy male volunteers $(24.6{\pm}2.0\;years\;old)$ were divided into two groups and a randomized $2{\times}2$ cross-over study was employed. After one tablet containing 2 mg of terazosin was orally administered, blood was taken at predetermined time intervals and the concentration of terazosin in plasma was determined with a HPLC method using spectrofluorometric detector. AUC was calculated by the linear trapezoidal method. $C_{max}\;and\;T_{max}$ were compiled from the plasma drug concentration-time data. Analysis of variance (ANOVA) was utilized for the statistical analysis of the parameters. The results showed that the differences in $AUC_t,\;C_{max}\;and\;T_{max}$ between the two preparations were 0.21 %, 5.53% and 8.82%, respectively. The powers $(1-{\beta})\;for\;AUC_t,\;C_{max}\;and\;T_{max}$ were >99%, 97.49%, and 33.26%, respectively. Minimum detectable differences $({\Delta},\;%)\;at\;{\alpha}=0.1\;and\;1-{\beta}=0.8$ and the 90% confidence intervals were all less than ${\pm}20%$ except for $T_{max}.\;AUC_t\;and\;C_{max}$ met the criteria of KDFA for bioequivalence, indicating that $Teratonin^{circledR}$ tablets are bioequivalent to $Hytrine^{circledR}$ tablets.

• 한국미생물·생명공학회지
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• 제45권3호
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• pp.257-264
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• 2017

혼합유박은 황화물, 암모니아 그리고 아민이 발생하는 것으로 알려져 있다. 악취 저감 미생물을 선별하기 위해 물과 혼합유박이 포함된 바이얼을 농화 배양하였다. 황화물 저감 미생물의 분리를 위해 황화수소 및 메틸메르캅탄 저감 활성실험을 수행하였다. 대조군에는 100 ml 바이알에 혼합유박(0.25 g)과 증류수(10 ml)를 넣어 악취를 발생시켰으며 실험군에는 대조군 바이알과 같은 상태에서 분리균주를 접종하였다. 분리균주 중에서 황화합물의 저감효율이 가장 높은 균주를 일반적인 동정 방법인 16S rRNA sequence 분석으로 동정 결과 Brevundimonas diminuta로 동정되었으며 KCTC에 기탁하여 기탁번호 KCTC11724BP를 부여받았다. B. diminuta는 황화수소 표준가스를 200 ppmv까지 24시간내에 모두 제거하였다. 또한, 황화수소와 메틸머캅탄의 최대 제거 효율은 바이알 실험에서 453 ppmv과 98 ppmv에서 각각 100% 효율을 나타냈다. 또한 돈분을 이용한 악취발생반응기에서는 접종량 20% (v/weight of swine manure)일 때 황화물 95% 이상 제거 효율을 나타냈다.

• 한국습지학회지
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• 제9권1호
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• pp.79-89
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• 2007

This paper provides a comprehensive overview of the present status of several environmental problems caused by emerging toxic substances such as persistent organic pollutants (POPs), endocrine disrupting chemicals (EDCs), and arsenic in various environmental media in Vietnam. Monitoring data reported during the 1990s demonstrated elevated contamination of DDTs in most of these compartments in Vietnam. Studies in frame of the Asia-Pacific Mussel Watch Program revealed that fish, mussels and resident birds from Vietnam contained higher concentrations of DDTs as compared to other countries in region, suggesting the role of Vietnamese environment as a significant emission source of DDT in the Southeast Asian region. The estimated dietary intakes of PCBs and DDTs for Vietnamese were relatively high among Asian developing countries, suggesting potential risk for humans posed by thesechemicals. Widespread contamination of some endocrine active compounds such as alkylphenols and phthalates was observed at various sites along the coasts of northern and middle Vietnam. The presence of significant source of bisphenol-A along Red River estuary was revealed with the concentrations comparable to those reported for developed nations. A case study on seasonal variation of alkylphenols and phthalates in surface water of river delta and estuary of north and middle Vietnam indicated the differences in distribution of these compounds between dry and rainy seasons. Higher concentrations of alkylphenols and phthalates were found in dry season in estuary; while the contrasting pattern was observed in the river delta, showing elevated residues in rainy season. This result suggests the different behavior of alkylphenols and phthalates in river delta and coastal environment. From ecotoxicological perspectives, concentrations of bis-phenol A and di(2-ethylhexyl)phthalates [DEHP] in surface water from some locations in Vietnam exceeded the guideline values for Ecotoxicological Effects and the Environmental Risk Limit, respectively, suggesting potential for toxic implications on aquatic wildlife. Widespread and elevated arsenic contamination was discovered inour recent surveys in groundwater in a large area of suburban areas of Hanoi city, the capital of Vietnam. The most recent investigation in 4 villages showed about more than 50 % of groundwater samples contained As concentrations exceeding 50 g/L (the WHO and Vietnamese standard). In particular, in Son Dong villages, 58 % of samples analyzed contained As concentrations higher than 200 g/L. Good correlations were found in As concentrations in water and hair and urine of peoples in corresponding families, suggesting the chronic exposure to As by people living in As-contaminated ground water areas. In Son Dong village, As levels in hair (mean: 1.7 mg/kg dry wt) and urine (g/g creatinine) exceeding the reference values recommended by WHO, suggesting potential for human risk posed by long term accumulation of As in human body. Future studies should be focused on the time trends of POPs and EDCs in biota in Vietnam in order to predict future trend of contamination and to reveal new clues for understanding possible toxic impacts on aquatic organisms. The issues of arsenic contamination in groundwater and their chronic toxic implications on human health should be systematically investigated in the future.

• 대한토목학회논문집
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• 제34권4호
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• pp.1053-1063
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• 2014

본 연구에서는 자원과 에너지를 후손들까지 이용 가능하도록 확보하며 개발하는 지속가능개발 개념을 바탕으로 콘크리트구조기준을 만족시키면서 철근콘크리트 보의 내재에너지와 이산화탄소 배출량을 최적화 할 수 있는 지속가능 설계법을 제시한다. 극한하중을 견딜 수 있는 휨강도를 얻기 위한 콘크리트구조기준의 요구조건을 구속조건으로 설정하고 내재에너지와 이산화탄소 배출량을 목적함수로 하는 최적화 단면설계를 수행했다. 지속가능 설계법은 건설재료의 생산, 구조물의 건설 관리 해체시 소비되는 내재에너지와 이산화탄소 배출량을 최소화할 수 있는 방안으로 활용될 수 있다. 실제 철근콘크리트 보를 대상으로 내재에너지와 이산화탄소 배출량을 최적화하여 얻은 단면과 공사비를 최적화하여 얻은 단면을 비교한 결과, 약 10% 정도의 비용증가를 통해 내재에너지와 이산화탄소 배출량을 각각 20% 정도와 35% 정도까지 감소할 수 있음을 보였다. 결과적으로 지속가능 설계법은 기존의 공사비 최소화를 근간으로 하는 강도설계법을 유지하면서 경제성과 지속가능성을 동시에 확보할 수 있는 설계수단을 제공해주며, 추후 보다 다양한 구조물의 설계로 확장될 수 있을 것으로 기대된다.

• 청정기술
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• 제23권1호
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• pp.73-79
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• 2017

기후 변화 대응을 위한 온실가스 감축 측면에서, 석탄화력발전소에서 바이오매스 사용량은 계속하여 증가되어 왔다. 파리 협정 이후 온실가스 감축 목표치가 더욱 구체화되면서 바이오매스 사용은 급격히 더 많아질 것으로 예상된다. 미분탄 석탄 화력발전에서 바이오매스 혼소시 가장 큰 문제점 중 하나는 바이오매스의 미분성이 석탄에 비해 훨씬 낮다는 것으로, 이를 해결하기 위해 가장 먼저 바이오매스의 미분성 측정 방법을 확립하는 작업이 필요하다. 석탄의 경우 HGI (hardgrove grindability index)측정 장치를 통해 분쇄도 측정이 가능하여 이를 표준으로 삼고 있지만, 바이오매스의 경우 표준 측정 방법이 확립되어있지 않다. 본 연구에서는 볼 밀과 입자 크기별 분포량을 이용한 석탄과 바이오매스의 분쇄 실험을 진행하였다. 실험에는 석탄 1종과 바이오매스 6종을 사용하였다. 분쇄시간에 따른 입자 분포량을 비교하고, $75{\mu}m$ 이하 입자 분포량으로 분쇄도를 평가하였다. 실험결과 반탄화 바이오매스 TBC (torrefied biomass chip)와 TWP (torrefied wood chip)는 발전용 사용적합 기준에 대해 대략적으로 70%의 값을 나타냈다. 다른 바이오매스들의 경우 반탄화 바이오매스와 비교했을 때 분쇄성이 훨씬 더 낮은 결과를 보였다. TBC와 TWP는 수분이 감소하고 섬유질 구조가 분해되는 반탄화 과정을 통해 분쇄가 향상되었다. 또한 분쇄도가 높은 반탄화 바이오매스가 소모전력이 낮게 측정되었다. 본 연구를 통해 바이오매스의 석탄화력발전 적용을 위한 표준화 작업의 기초 자료들을 확보할 수 있다.