• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.244-244
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• 1999

Liquid Crystal Displays(LCDs) 투명성 전도막으로 사용하는 Indium Tin Oxide (ITO)의 고밀도 식각특성을 조사하였다. 특히 ITO식각의 경우, pixel electrode 전극에서 사용되는 underlayer인 SiO2, Si3N4와의 최적의 선택비를 얻는데 중점을 두고 있다. 따라서 본 실험에서는 Inductively Coupled Plasma(ICP)를 이용하여 source power, gas combination, bias voltage, pressure 및 기판온도에 따른 ITO의 식각 특성과 이의 underlayer인 SiO2, Si3N4와의 선택비를 조사하였다. Ar과 CH4를 주된 식각가스로서 사용하였으며 첨가가스로는 O2와 HBr를 사용하였다. ITO의 식각특성을 이해하기 위하여 Quadruple Mass Spectrometry(QMS), Optical emission spectroscopy(OES) 이용하였으며, 식각된 sample의 잔류물을 조사하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하여 분석하였다. Ar gas에 적정량의 CH4 혼합이 순수한 Ar 가스로 식각한 경우에 비하여 ITO와 SiO2, Si3N4의 선택비가 높았으며, 더 높은 식각 선택비를 얻기 위하여 Ar/CH 분위기에서 첨가가스 O2, HBr을 사용하였다. Source power 및 bias 증가에 따라 ITO의 식각률은 증가하나, underlayer와의 선택비는 감소함을 보였다. 본 실험에서 측정된 ITO의 high 식각률은 약 1500$\AA$/min이며, SiO2, Si3N4와의 high selectivity는 각각 7:1, 12:1로 나타났다. ITO의 etchrate 및 선택비는 source power, bias, pressure, CH 가스첨가에 의존하였지만 기판온도에는 큰 변화가 없음을 관찰하였다. 또한 적정량의 가스조합으로 식각된 시편의 잔류물을 줄일 수 있었다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.12
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• pp.1691-1701
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• 1998

Fly ash produced in coal combustion is a fine-grained material consisting mostly of spherical, glassy, and porous particles. A study on the formation mechanism of the fly ash from coal particles in the pulverized coal power plant is investigated with a physical, morphological, and chemical characteristic analysis of fly ash collected from the Samchonpo power plant. This study may contribute to the data base of domestic fly ash, the improvement of combustion efficiency, fouling phenomena and ash collection in the electrostatic precipitator. The physical property of fly ash is determined using a particle counter for the measurement of ash size distribution. Morphological characteristic of fly ash is performed using a scanning electron micrograph. The chemical components of fly ash are determined using an inductively coupled plasma emission spectrometry(ICP). The distribution of fly ash size was bi-modal and ranged from 12 to $19{\mu}m$ in mass median diameter. Exposure conditions of flue gas temperature and duration within the combustion zone of the boiler played an important role on the morphological properties of the fly ash such as shape, particle size and chemical components. The evolution of ash formation during pulverized coal combustion has revealed three major mechanisms by large particle formation due to break-up process, gas to particle conversion and growth by coagulation and agglomeration.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.2
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• pp.201-208
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• 2006

Several carbonyl compounds are important because of their irritant and toxic properties, mutagenicity and carcinogenicity. Therefore, they are regulated in korean odor emission standard. In this study, atmospheric pressure ionization-mass spectrometry(API-MS) is used for the analysis of carbonyl compounds after derivatization with 2, 4-dinitrophenylhydrazine (DNPH) and liquid chromatographic separation. In the negative ion mode, the $[M-H]^-$ pseudomolecular ions are most abundant for the carbonyls. Analytical parameters such as linearity, repeatability and minimum detection limit were evaluated. The linearities ($r^2$) for carbonyls were $0.9977{\sim}0.9999$ when analyte concentration ranges from $25\;to\;250{\mu}g/L$(n=6). The relative standard deviations (%RSD) for carbonyls were $0.55{\sim}3.51%$ for concentration of $100{\mu}g/L$(n=5). The minimum detection limit (MDL) was $1.88{\mu}g/L$(0.27 ppb) for i-valeraldehyde. It was shown that LC-MS method has a great potential for carbonyl compounds analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.180-180
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• 2010

The design and implementation of high rate deposition process and anti-scratch property of silicon oxide film by PECVD with UHF power were investigated according to the effect of UHF input power with HF bias. New regime of high rate deposition of SiOx films by hybrid plasma process was investigated. The dissociation of OMCTS (C8H24Si4O4) precursor was controlled by plasma processes. SiOx films were deposited on polyethylene terephthalate (PET) and polycarbonate substrate by plasma enhanced chemical vapor deposition (PECVD) using OMCTS with oxygen carrier gas. As the input energy increased, the deposition rate of SiOx film increased. The plasma diagnostics were performed by optical emission spectrometry. The deposition rate was characterized by alpha-step. The mechanical properties of the coatings were examined by nano-indenter and pencil hardness, respectively. The deposition rate of the SiOx films could be controlled by the appropriate intensity of excited neutrals, ionized atoms and UHF input power with HF bias at room temperature, as well as the dissociation of OMCTS.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1996.04a
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• pp.88-96
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• 1996

The characteristic analysis of fly ash generated from a fired power plant using bunker-C oil has been investigated. Ash size distribution by an optical microscopy with image processing technique, morphological shape by a scanning electron microscope(SEM) and microscope, chemical composition by the inductively coupled plasma emission spectrometry(ICP), and resistivity measurement as a function of temperature and moisture content by the resistivity meter are performed. A study of physical, chemical and electrical characteristics of bunker-C fly ash plays an important role of improving the performance of an electrostatic precipitator and protecting air pollution. The samples of bunker-C fly ash for analysis were collected from the electrostatic precipitator hopper of Ulsan Power Plant Unit 1 and Pusan Power Plant Unit 1. Mass median diameter(MMD) of bunker-C fly ash was measured 12.7${\mu}{\textrm}{m}$, while MMD of fly ash generated from the mixture of bunker-C oil(40%) and domestic anthracitic coal(60%) was 25.7${\mu}{\textrm}{m}$. The morphological structure of bunker-C fly ash consisted of fine particles of non-spherical shape. The primary chemical components of bunker-C fly ash were composed of SiO2(2.36%), Al2O3(4.91%), Fe2O3(14.33%) and C(11.84%). Resistivity of bunker-C fly ash was found to be increased with increasing temperature at the range of 100~15$0^{\circ}C$ and was measured 103~104 ohm-cm.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.85-87
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• 2000

In this study, high-density plasma etching characteristics of ITO(indium tin oxide) films used for transparent electrodes in display devices have been investigated. The etch characteristics of ITO as a function of $Ar/CH_4$ gas mixtures were analyzed using QMS(quadrupole mass spectrometry), OES(optical emission spectroscopy), and ESP(electrostatic probe). ITO etch rates were increased with the addition of moderate amount of $CH_4$ to Ar due to the increased chemical reaction between $CH_3$ or H and ITO in addition to the physical sputtering of ITO by Ar ion bombardment. However, the addition of excess amount of $CH_4$ decreased the ITO etch rates possibly due to the increased polymer formation on the ITO surface. Also, the measurement data obtained by QMS and OES suggested that $CH_3$ radicals are more activity involved in the etching of ITO compared to H radicals.

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.4
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• pp.331-337
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• 1995

This study was carried out to investigate the chemical composition of dustfall at Cheju(mean sea level; 71.7m, 33$^{\circ}$17'N, 126$^{\circ}$10'E) and Ullung island(mean sea level; 22.1m, 38$^{\circ}$29'N, 130$^{\circ}$54'E) from October 1993 to september 1994. The dustfall matter samples were collected by deposit gauges. The ionic components of each samples was analyzed by Ion Chromatograpy (Dionex 4000i), While heavy metals by Inductively Coupled Plasma Atomic Emission Spectrometry(ICP/AES; Shimadzu ICP-4). The results for seasonal variation of dustfall matter matter total amount, water-soluble ionic components and water-soluble ionic components total deposition amount to two sites were compared each other. The seasonal variations of dustfall amount at Ullung and Cheju island were found in order of Spring>Winter>Fall>Summer, and the maximum of dustfall amount were during the Yellow Sand period. Also, Total amount of water-soluble components except for $F^{[-10]}$ were high in Cheju more than Ullung island.more than Ullung island.

• Journal of the Korean Chemical Society
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• v.55 no.6
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• pp.1018-1023
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• 2011

Alzinc is a ursine situated in the Ghazaouet town western part of the republic of Algeria. The purpose of this study was to determine the degree of contamination which soil and plants are burdened with some heavy metals: Pb, Zn, Ni, Cu, Cd, Mn, Cr, Fe and As, then the accumulation of heavy metals in the soil and plant adjacent of area the alzinc ursine was detected and the interdependence of pollution among all three regions of the environment determined. This paper analyzes the heavy metal contents within a 2-years period in the soil and plants at the beginning of the vegetation period. The presence of Pb, Zn, Ni, Cu, Cd, Mn, Cr, Fe and As, in the samples were analyzed using Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES). Measurements of heavy metal contents were performed at three locations in soil and vegetative parts of three-plant types (plant alimentary) period during summer. The plant samples from the immediate environment of the dumpsite were highly contaminated with Zn, Cd and Mn. Three plants species: grape, artichoke and pepper, particularly, grape met some of the conditions to be classified as accumulators for Zn, Cu, Cd and Fe, consequently, she revealed a health risk for human and livestock due to the spread of the metal pollution from waste dumpsites to agricultural areas.

• Bulletin of the Korean Chemical Society
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• v.33 no.12
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• pp.3950-3956
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• 2012

In order to improve the bioactivity and mechanical properties of hydroxyapatite (HAp), chitosan (Chi) was in situ combined into HAp to fabricate a composite scaffold by a sublimation-assisted compression method. A highly porous film with sufficient mechanical strength was prepared and the bioactivity was investigated by examining the apatite formed on the scaffolds incubated in simulated body fluid. In addition, the cytotoxicity of the HAp/Chi composite was studied by evaluating the viability of murine fibroblasts (L-929 cells) exposed to diluted extracts of the composite films. The apatite layer was assessed using scanning electronic microscopy, inductively coupled plasma-optical emission spectrometry and weight measurement. Composite analysis showed that a layer of micro-sized, needle-like crystals was formed on the surface of the composite film. Additionally, the WST-8 assay after L-929 cells were exposed to diluted extracts of the composite indicated that the HAp/Chi scaffold has good in vitro cytocompatibility. The results indicated that HAp/Chi composites with porous structure are promising scaffolding materials for bone-patch engineering because their porous morphology can provide an environment conductive to attachment and growth of osteoblasts and osteogenic cells.

• Korean Journal of Materials Research
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• v.30 no.11
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• pp.589-594
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• 2020

Many electronic applications require magnetic materials with high permeability and frequency properties. We improve the magnetic permeability of soft magnetic powder by controlling the shape magnetic anisotropy of the powders and through the preparation of amorphous nanoparticles. For this purpose, the effect of the shape magnetic anisotropy of amorphous Fe-B-P nanoparticles is observed through a magnetic field and the frequency characteristics and permeability of these amorphous nanoparticles are observed. These characteristics are investigated by analyzing the composition of particles, crystal structure, microstructure, magnetic properties, and permeability of particles. The composition, crystal structure, and microstructure of the particles are analyzed using inductively coupled plasma optical emission spectrometry-, X-ray diffraction, scanning electron microscopy and focused ion beam analysis. The saturation magnetization and permeability are measured using a vibrating sample magnetometer and an LCR meter, respectively. It is confirmed that the shape magnetic anisotropy of the particles influences the permeability. Finally, the permeability and frequency characteristics of the amorphous Fe-B-P nanoparticles are improved.