• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.12
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• pp.639-647
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• 2001

We present an integrated optical microswitch, composed of silicon waveguides, gold-coaled silicon micromirrors, and electrostatic contact actuators, for applications to the optical signal transceivers. For a low switching voltage, we modify the conventional curled electrode microactuator into a electrostatic microactuator with touch-down beams. We fabricate the silicon waveguides and the electrostatically actuated micromirrors using the ICP etching process of SOI wafers. We observe the single mode wave propagation through the silicon waveguide with the measured micromirror loss of $4.18\pm0.25dB$. We analyze major source of the micromirror loss, thereby presenting guidelines for low-loss micromirror designs. From the fabricated microswitch, we measure the switching voltage of 31.74V at the resonant frequency of 6.89kHz. Compared to the conventional microactuator, the present contact microactuator achieves 77.4% reduction of the switching voltage. We also discuss a feasible method to reduce the switching voltage to 10V level by using the electrode insulation layers having the residual stress less than 30MPa.

• 한국정보통신설비학회:학술대회논문집
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• 2006.08a
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• pp.208-211
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• 2006

In this paper, a tunable image rejection filter using two varactors is developed for mobile convergence. The filter is fabricated on a 0.25um substrate. ESD Pad is embedded to prevent damage caused by electrostatic discharge(ESD). Bias voltages are at WCDMA(2.1GHz). WiBro(2.3GHz), and WLAN(2.45) are 0.5V, 0.95V and 1.8V respectively. And the image rejection rations are more than 28dB at each band and insertion losses are less than 2dB at each band.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.621-624
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• 2001

A metal sheath provides a cable with electrostatic screening and a degree of magnetic screening. The presence of a screen on a cable also reduces the induction arising from the high-frequency components of transients caused by power-line switching and also induced transients from lightning strokes; such transient induced voltages are of increasing importance with the increasing use of miniaturized telecommunication equipment with very small thermal capacity. This paper describes electrostatic induction and electromagnetic induction caused by power interference. Also screening factors are proposed.

• Journal of the Korean Society of Safety
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• v.9 no.4
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• pp.58-68
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• 1994

A miniature size electrostatic induction motor has been fabricated and studied parameters Influencing dominantly to the motor speed, such as a voltage and frequency of the 3 phase ac power source supplied to the stator of fabricated motor, the surface resistivity and relative dielectric constant of the rotor surface materials and the concurrently calculated relaxation time constants. It is found that the higher resitivity and/or the higher relative dielectric constant, concurrently the longer relaxation time constant of the rotor surface materials make the motor speed get higher speed. In case of discrete coated rotor surface it is found that the motor speed was increased logarithmically as narrow as width of the discrete coated Ti. And the degree of width of discrete coated Ti to the axial direction of the rotor was 60$^{\circ}$ and 150$^{\circ}$, the motor has got a 125% higher than that at the degree of 0$^{\circ}$.

• Structural Engineering and Mechanics
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• v.29 no.5
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• pp.581-597
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• 2008

In this paper, the double displacement coupled statics and dynamics of the electromechanical integrated electrostatic harmonic drive are developed. The linearization of the nonlinear dynamic equations is completed. Based on natural frequency and mode function, the double displacement coupled forced response of the drive system to voltage excitation are obtained. Changes of the forced response along with the system parameters are investigated. The voltage excitation can cause the radial and tangent coupled forced responses of the flexible ring. The flexible ring radius, ring thickness and clearance between the ring and stator have obvious influences on the double displacement coupled forced responses.

• Journal of Electrical Engineering and Technology
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• v.13 no.5
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• pp.2017-2032
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• 2018

This study presents, for the first time, state-of-the art review of the various techniques for the modeling of the electrostatic discharge (ESD) generators for the ESD analysis and testing. After a brief overview of the ESD generator, the study provides an in-depth review of ESD generator modeling (analytical, circuit and numerical modeling) techniques for the contact discharge mode. The proposed techniques for each modeling approach are compared to illustrates their differences and limitations.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.50 no.2
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• pp.73-78
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• 2001

With the increasing demands for clean environment, development of air cleaning systems has been received increasing attention. One of the key technologies in the electrostatic precipitator(EP) is high voltage pulsed power supply, which affects the performance of the overall system. In this study, a high voltage microsecond pulse power supply for the pilot EP is developed. The power supply has a dc source and a pulsed one. The ratings of the dc and the pulse source are 60kV and 70kV respectively. The width of pulse voltage is 140us and the maximum pulse repetition frequency is 200Hz.

• Bulletin of the Korean Space Science Society
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• 2003.10a
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• pp.82-82
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• 2003

It is well known that electromagnetic (EM) waves are mode converted to electrostatic (ES) waves in inhomogeneous plasmas. We examine this issue in a three-dimensional multi-fluid numerical model. First, we derive a set of coupled linear wave equations when a one-dimensional inhomogeneous density profile is assumed in a cold and collisionless plasma. The massive ions are considered as fixed because we are interested in high frequency waves in plasmas. It is shown that the EM mode satisfies the 0th order modified Bessel equation near the resonant region where the frequency matches the local electron plasma frequency. It is expected that the EM waves are coupled and damped to the ES waves owing to the logarithmic singular behavior at such resonances. Second, we numerically test the same case in a 3-D multi-fluid model. An impulsive input is assumed to excite EM waves in the inhomogeneous 3-D box model. The wave spectra of electric and magnetic fields are presented and compared with the analytical results. Our results suggest that the EM energy is irreversibly converted into the ES energy wherever the resonant condition is satisfied. Finally we discuss how the mode conversion appears in both electric and magnetic fields by analyzing time histories of each component. We also compare our results with MHD wave coupling. It is numerically confirmed in this study that the coupling of EM and ES waves is similar to that of compressional and transverse MHD waves.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1857-1862
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• 2008

Resonant frequency tuning of micro devices is essential to achieve performance uniformity and high sensitivity. Previously reported frequency tuning methods using electrostatic force or mass deposition are not directly applicable to non-conducting polymer devices and have limitations such as dielectric breakdown or low tunable bandwidth. In this paper, thermally frequency-tunable microactuators with poly-dimethylsiloxane membranes are proposed. Permanent and/or nonpermanent frequency tunings are possible using a simple temperature control of the device. Resonant frequency and Q-factor variations of devices according to temperature change were studied using a micro heater and laser Doppler vibrometer. The initial resonant frequencies determined by polymer curing and hardening temperatures are reversibly tuned by thermal cycles. The measured resonant frequency of 9.7 kHz was tuned up by ${\sim}25%$ and Q-factor was increased from 14.5 to 27 as the micro heater voltage increased from 0 to 70 V.