• Applied Microscopy
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• v.51
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• pp.7.1-7.9
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• 2021

Neuromorphic systems require integrated structures with high-density memory and selector devices to avoid interference and recognition errors between neighboring memory cells. To improve the performance of a selector device, it is important to understand the characteristics of the switching process. As changes by switching cycle occur at local nanoscale areas, a high-resolution analysis method is needed to investigate this phenomenon. Atomic force microscopy (AFM) is used to analyze the local changes because it offers nanoscale detection with high-resolution capabilities. This review introduces various types of AFM such as conductive AFM (C-AFM), electrostatic force microscopy (EFM), and Kelvin probe force microscopy (KPFM) to study switching behaviors.

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.133-133
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• 2007

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.702-707
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• 2005

The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1067-1071
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• 1997

A new type of gripper for micrometer-size objects is developed using piezoelectric multi-layer benders. It is composed of three chopsticks, two of which are designed to grip micro-objects. The third one is reserved for helping the two when objects are released from the chopsticks. It is well known that a micro object is much easier to grasp than to release it after holding it. The electrostatic force between the chopsticks and an object is believed to be the main cause of adhesion in a dry environment. The surface tension becomes very important when liquids are present or in a liquid. The third auxiliary chopsticks is introduced to solve there surface effects. All the three chopsticks are made of tungsten wires with sharpened ends by etching. When grasping microparts, the two chopsticks are utilized, and, when releasing them anywhere the parts are located, the third one reduces the electrostatic force between the objects and the chopstick may be to help the other two chopsticks to hold an objects in a desired orientation. We constructed the three chopstick gripoer for micro objects and test their function by holding and releasing an object of a diameter of 100 micrometers. We make use of open loop voltage control. The bender displacement resolution is sub-micrometer. The gripping forces, about tens of mN are obtained. The experiment shows that the third auxiliary chopstick functions effectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.59-62
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• 2005

Small force measurements ranging from 1 pN to $100{\mu}N$, we call it Nano Force, become the questions of common interests of biomechanics, nanomechanics, material researches, and so on. However, unfortunately, quantitative and accurate force measurements have not been taken so far. This is because there ,are no traceable force standards and a calibration scheme. This paper introduces a quantitative force metrology, which provides traceable link to SI (International Systems of Units). We realize SI traceable force ranging from 1 nN to $100{\mu}N$ using an electrostatic balance and disseminate it through transfer standards, which are self-sensing cantilevers that have integrated piezoresistive strain gages. We have been built a prototype electrostatic balance and Nano Force Calibrator (NFC), which is an AFM cantilever calibration system. As a first experiment, we calibrated normal spring constants of commercial AFM cantilevers using NFC. Calibration results show that the spring constants of them are quite differ from each other and nominal values provided by a manufacturer (up to 240% deviation).

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.1
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.447-452
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• 2011

This paper predicted the dynamic behaviors of a cantilevered carbon nanotube(CNT) incorporating the electrostatic force, van der Waals interactions between the CNT and ground plane. The structural model of the CNT includes geometric and inertial nonlinearities for predicting various phenomena of nonlinear responses of the CNT due to the electrostatic force. In order to solve the problem, we used Galerkin's approximation and the numerical integration techniques and as a result, we predicted characteristics of nonlinear response of nano resonator. The cantilevered CNT shows complex dynamic responses and instabilities due to the applied ac and ac voltages, and driving frequencies. The results investigated in this paper are helpful to the modeling of nanotube based electromechanical devices such as nano-resonators and nano-sensors.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.4
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• pp.448-452
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• 2004

The micromachined variable optical attenuator(VOA) was presented in the paper. The VOA has two single mode fiber(SMF) aligned with free space and symmetric parallel plate actuator with microshutter, which can control a amount of light by driving the actuator. In the paper, analysis on driving performances of the VOA was performed and can be reduced threshold voltage through the decreasing displacement actuating range. This paper presents a VOA that is fabricated using bosch deep silicon etching process with silicon on insulator(SOD wafer. The VOA consists of driving electrode, ground electrode, actuating microshutter, and mechanical stopper. In this VOA, actuating shutter is driven by electrostatic force and the threshold voltage is close to 28V, 46V come along with the spring width of 5${\mu}{\textrm}{m}$, 7${\mu}{\textrm}{m}$ respectively. Attenuation range is measured from 2.4㏈ to 16.7㏈.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.656-661
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• 2004

Static and dynamic responses of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• Resources Recycling
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• v.23 no.6
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• pp.30-39
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• 2014

The trajectories of PCB(Printed Circuit Board) particles in the corona discharge electrostatic separation was simulated. The PCB particles are prepared by crushing bare board, which disassembled from electronic components, consist mostly of copper and FR-4(Flame Retardant Level-4) Firstly, a model was established for calculating of detachment points of PCB particles from the rotating electrode in separator. The model of detachment points was derived from equilibrium of force such as gravity force, centrifugal force, electrostatic force. The trajectories of particles after detachment was calculated by acceleration derived from time-integrating method of motion equation. In this simulation, particle size, supplied voltage, rotation speed of rotating roll electrode and angle of induction electrode were adopted as variables. While the trajectories of FR-4 particles were affected by all variables, rotation speed of rotating roll electrode was dominant variables affecting trajectories of copper particles.