A Study on the chemical-mechanical polishing process of Sapphire Wafers for GaN thin film growth. (사파이어웨이퍼의 기계-화학적인 연마 가공특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.05b
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- pp.31-34
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- 2003