• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.303-306
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• 2005

High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.11
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• pp.857-861
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• 2012

FPN (fixed-pattern-noise) mainly comes from the device or pattern mismatches in pixel and color filter, pixel photodiode leakage in CMOS image sensor. In this paper, optical stack module related pixel FPN was investigated and the classification of pixel FPN contribution with the individual optical module process was presented. The methodology and procedure would be helpful in reducing the greater pixel FPN and distinguishing the complex FPN sources with respect to various noise factors.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.6
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• pp.403-407
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• 2015

Generally, MWCNT, with thermal, chemical and electrical superiority, is manufactured with CVD (chemical vapor deposition). Using MWCNT, it is comonly used as gas sensor of MOS-FET structure. In this study, in order to repeatedly detect gases, the author had to effectively eliminate gases absorbed in a MWCNT sensor. So as to eliminate gases absorbed in a MWCNT sensor, the sensor was applied heat of 423[K], and in order to observe how the applied heat was diffused within the sensor, the author interpreted the diffusion process of heat, using COMSOL interpretation program. In order to interpret the diffusion process of heat, the author progressed modeling with the structure of MWCNT gas sensor in 2-dimension, and defining heat transfer velocity($u={\Delta}T/{\Delta}x$), accorded to governing equation within the sensor, the author proposed heat transfer mechanism.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.221-221
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• 2010

수배전반 내부에서 Arc 사고 발생시 동반되는 광신호를 검출할 수 있는 광센서를 개발하였다. 개발된 광센서는 특정 부위에 설치되어 해당 위치에서 발생하는 광신호를 검출하는 Point Sensor와 넓은 범위를 감시할 수 있는 Loop Sensor의 두 가지 형태로 구성되어 있다. 두 가지 모두 광섬유를 통하여 계전기 등에 부착되며, 일반 통신용 광섬유보다 큰 core를 갖는 특수 광섬유가 사용되었다. Point Sensor는 광섬유 끝단에 부착된 Cap에 의해 광신호가 검출되고, Loop Sensor는 광섬유 자체가 Sensor로 사용되어 광신호의 검출 및 전승을 수행한다. Point Sensor에 부착되는 Cap은 보다 넓은 범위 감시하고, 광신호 발생 위치에 따른 편차를 줄일 수 있는 형태로 설계되었다.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.150-155
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• 2005

We propose a newly developed automobile sensor monitoring system incorporated with a tire pressure monitoring sensor(TPMS). The RF-transmitter based on a tire pressure sensor, sends a frame data about measured tire-pressure to RF receiver. And the various sensing signals based on sensors such as fuel-level sensor, engine oil level sensor and temperature sensors, are converted into 10-bit digital data. The microprocessor displays converting data such as tire pressure, trip distance, fuel quantity, coolant temperature and car-room temperature, on LCD panel. The proposed system can be successfully adapted to monitoring of the tire pressure and various automobile sensors.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.1
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• pp.63-71
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• 2020

Recently, to improve convenience, flexible electronics are quickly being developed for a number of application areas. Flexible electronic devices comprise characters such as being bendable, stretchable, foldable, and wearable. Effectively manufacturing flexible electronic devices requires high efficiency, low costs, and simple processes for manufacturing technology. Through this study, we enabled the rapid production of multifunctional flexible bending sensors using a simple, low-cost Fused Deposition Modeling (FDM) 3D printer. Furthermore, we demonstrated the possibility of the rapid production of a range of functional flexible bending sensors using a simple, low-cost FDM 3D printer. Accurate and reproducible functional materials made by FDM 3D printers are an effective tool for the fabrication of flexible sensor electronic devices. The 3D-printed flexible bending sensor consisted of polyurethane and a conductive filament. Two patterns of electrodes (straight and Hilbert curve) for the 3D printing flexible sensor were fabricated and analyzed for the characteristics of bending displacement. The experimental results showed that the straight curve electrode sensor sensing ability was superior to the Hilbert curve electrode sensor, and the electrical conductivity of the Hilbert curve electrode sensor is better than the straight curve electrode sensor. The results of this study will be very useful for the fabrication of various 3D-printed flexible sensor devices with multiple degrees of freedom that are not limited by size and shape.

• Proceedings of the IEEK Conference
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• 2003.07d
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• pp.1549-1552
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• 2003

Semiconductor gas sensor using tin oxide as sensing material has been used to detect gases based on the fact that impedance of the sensing material varies when the gas sensor is exposed to the gases. This variation comprises of two parts. The first one is variation in resistance of the sensing material and the other is expressed in terms of the sensor capacitance variation. Normally, only variation of the sensor resistance is considered. In this paper, using AC measurement with a capacitor-coupled inverting amplifier circuit, both changes in the sensor resistance and variations in the sensor capacitance were investigated. These characteristics were represented as magnitude gain and phase shift of AC signal at a specific frequency after passing it through the sensor and the designed circuit. A two-stage artificial neural network, which utilized the information above, was employed to identify and quantify three combustible gases: methane, propane and butane. The network outputs were approximately proportional to concentrations of test gases with reasonable level of error.

• Journal of Sensor Science and Technology
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• v.10 no.3
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• pp.180-186
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• 2001

Recently, FET type dissolved oxygen sensor was proposed to overcome the disadvantages of the amperometric Clark-type sensor. The inherent problem of the proposed sensor, however, is the flow dependence of the sensor performances since the proposed sensor detects the pH change in close proximity to the working electrode. In this study, we decided the direction which minimize the flow effect in FIA(flow injection analysis) system. And a hydrodynamic buffer layer which can reduce the flow dependence were proposed. The suggested buffer-layers were formed onto sensing area and working electrode with mixed polymer matrix of TEOS(tetraethylorthosilicate) and DEDMS(diethoxydimethylsilane).

• The Journal of the Korea institute of electronic communication sciences
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• v.10 no.3
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• pp.349-356
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• 2015

Remote monitoring partial discharge sensor, equipping with hybrid filter combining optical and electrical noise reduction capabilities and with signal integrating function to calculate total arc energy, was investigated. Hybrid filter showed insensitivity to fluorescent and incandescent lamps under simulated distribution panel condition. Signal integrating function showed selective detection capability corresponding to different arc energy levels, while convention arc sensor had difficulty to discriminate arc energy level due to bursty arc waveform and peak level detection characteristics. The sensor showed possibility for application to remote monitoring partial discharge sensor, since it detected arc energy level corresponding to normal open and close discharge in low voltage 100A MCCB at 2m distance.

• Journal of Sensor Science and Technology
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• v.29 no.6
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• pp.394-398
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• 2020

In this paper, we report the sensing performance of H₂ gas sensors composed of Pd/carbon nanotube (CNT) buckypaper at room temperature. The CNT buckypaper was made using a simple filtration process and subsequently deposited with Pd as the sensing material. The sensitivity of the sensor increased with respect to the gas concentration. To investigate the effect of Pd thickness, Pd layers of different thickness were deposited on the buckypaper, and the response of the sensor was evaluated. The proposed sensor exhibits excellent sensing properties with optimized Pd thickness at room temperature (25℃). Pd nanoparticles significantly impact the sensitivity and selectivity of the sensor because of the spillover effect. In addition, the sensor is highly suitable for bendable and wearable devices owing to its structural flexibility.