• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2000년도 추계학술발표회 초록집
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• pp.3-4
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• 2000

Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

• 한국산학기술학회논문지
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• 제18권9호
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• pp.418-424
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• 2017

마그네슘은 다른 금속들에 비해 비강도가 높으며, 우수한 진동 흡수능, 전자파 차폐성 등으로 산업 전반에 많이 활용되고 있다. 예를 들면, 자동차 시트 프레임, 실린더 헤드 등 자동차 부품으로도 사용되며 노트북 케이스, 핸드폰 케이스 등의 전자제품에도 널리 사용되고 있다. 또한 신체의 뼈가 금이 가거나 부서졌을 경우, 그 손상된 뼈의 치료를 보조하기 위해 사용되는 골 접합용 임플란트 재료로 각광받고 있다. 현재 임플란트 재료로는 Ti alloy, Stainless steel, Co-Cr-Mo alloy등이 사용되어 지고, Mg 합금은 연구단계에 머물러 있다. 현재 골접합용 임플란트 재료의 문제점으로는 한번 접합 수술 후에 회복이 되면 이것을 제거하기 위한 수술을 또 해야 한다는 점이 있다. 하지만 마그네슘은 현재 재료와 비교하여 충분한 강도를 실현 할 수 있으며, 일정시간 후 자체적으로 분해되고 인체에 무해한 원소기 때문에 연구가 진행되고 있다. 그러나 순수 Mg으로는 충분한 강도와 내식성을 가질 수 없기 때문에 합금원소를 첨가하여 Mg 합금을 설계한다. 본 논문에서는 마그네슘에 인체에 무해한 Ca, Zn를 첨가하여 합금을 설계하였고, 추가적으로 강도와 내식성을 향상시키기 위해서 Grain refiner로서 Sr을 소량 첨가하여 최종 합금을 설계하였다. Sr은 방사선 원소는 인체에 유해하지만, 그 외 천연 Sr 원소는 인체에 무해하다. 이렇게 제조된 합금을 광학현미경, 주사전자현미경을 통해 미세조직분석을 수행하고, 인장시험, 동전위 분극 시험, 침지시험을 통해 기계적 특성 및 부식특성을 평가하였다. 결론적으로, Sr 첨가에 의해 조직이 미세해졌으며, 기계적 특성 및 내식성이 향성된 것을 확인 할 수 있었다.

• Corrosion Science and Technology
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• 제8권4호
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• pp.162-169
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• 2009

Pure titanium and its alloys are drastically used in implant materials due to their excellent mechanical properties, high corrosion resistance and good biocompatibility. However, the widely used Ti-6Al-4V is found to release toxic ions (Al and V) into the body, leading to undesirable long-term effects. Ti-6Al-4V has much higher elastic modulus than cortical bone. Therefore, titanium alloys with low elastic modulus have been developed as biomaterials to minimize stress shielding. For this reason, Ti-30Ta-xZr alloy systems have been studied in this study. The Ti-30Ta containing Zr(5, 10 and 15 wt%) were 10 times melted to improve chemical homogeneity by using a vacuum furnace and then homogenized for 24 hrs at $1000^{\circ}C$. The specimens were cut and polished for corrosion test and Ti coating and then coated with TiN, respectively, by using DC magnetron sputtering method. The analyses of coated surface were carried out by field emission scanning electron microscope(FE-SEM). The electrochemical characteristics were examined using potentiodynamic (- 1500 mV~+ 2000 mV) and AC impedance spectroscopy(100 kHz~10 mHz) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The equiaxed structure was changed to needle-like structure with increasing Zr content. The surface defects and structures were covered with TiN/Ti coated layer. From the polarization behavior in 0.9% NaCl solution, The corrosion current density of Ti-30Ta-xZr alloys decreased as Zr content increased, whereas, the corrosion potential of Ti-30Ta-xZr alloys increased as Zr content increased. The corrosion resistance of TiN/Ti-coated Ti-30Ta-xZr alloys were higher than that of the TiN-coated Ti-30Ta-xZr alloys. From the AC impedance in 0.9% NaCl solution, polarization resistance($R_p$) value of TiN/Ti coated Ti-30Ta-xZr alloys showed higher than that of TiN-coated Ti-30Ta-xZr alloys.

• Radiation Oncology Journal
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• 제18권1호
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• pp.1-10
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• 2000

목적 : 비인강암에서 방사선치료는 근치적 목적으로 사용되고 있으나 방사선치료 후 이하선 기능 저하에 따른 구강 건조증이 생기는 것이 문제이다. 방사선치료에 의한 구강 건조증의 발생을 감소시키기 위해 방사선조사시 이하선을 보호하는 새로운 치료 기법을 개발하고자 하였다. 대상 및 방법 : 림프절 전이가 없고 종양의 침범 범위가 서로 상이한 비인강암 4례를 대상으로 2가지의 새로운 치료계획을 수립하고 기존의 2차원 통상치료계획과 비교하였다. 치료계획-A는 기존의 2차원 통상치료 방법이며, 치료계획-B는 져 Gy 이후에 축소조사를 3차원 입체 조형치료로 하는 것이며, 치료계획-C는 방사선 치료 처음부터 3차원 입체 조형치료를 이용하여 양측 이하선을 방사선 조사영역에서 제외시키면서 30.6 Gy에서 척수 차폐를 시행하고 져 Gy 이후에 축소조사시 비동일 평면 3차원 입체조형치료를 시행하는 방법이다. 위 3가지 치료계획은 모두 70.2 Gy의 선랸을 계획용 표적체적내 회전중심점에 처방하여 각 치료계획마다 계획용 표적체적과 이하선의 등선량 분포, 선량체적 히스토그람(dose volume histogram, DVH), 선량통계(dose statistics), 정상조직손상확률(normal tissue complication probability, NTCP)을 비교하였다. 결과 : 전 예의 환자에서 치료 표적 부위의 등선량 분포, 선량통계와 선량체적 히스토그람상 치료계획-C에서 치료선량이 표적체적 내에 보다 균일하게 조사되었다. 선량통계분석에서 이하선에 조사되는 평균 방사선량은 치료계획-C에서 가장 적었으며(치료계획-A 58 Gy, 치료계획-B 50 Gy, 치료계획-C 48.5 Gy), 46 Gy가 조사되는 체적도 가장 적었다(치료계획-A 100$\%$, 치료계획-B 98$\%$, 치료계획-C 69$\%$). 선량체적 히스토그람도 치료계획-C에서 가장 우수하였고, 선량체적 히스토그람을 이용하여 계산된 정상조직 부작용 확률도 치료계획-C에서 가장 낮았다. 결론 : 방사선치료 초기부터 3차원 입체조형치료를 적용하여 이하선을 치료 조사영역에서 제외하고, 축소 조사시에 다양한 조사방향을 가능하게 하기 위해 45 Gy 이전에 척수 차폐(spinal cord block)를 적용하는 이 같은 새로운 방사선치료 기법이 림프절 전이가 없는 비인강암의 환자에서 구강 건조증 발생을 감소시키는 방사선치료기법으로 추천될 수 있다고 사료된다.