The Analysis of the Electron Drift Velocity and Characteristics Energy in $SiH_4$ Plasma gas by Electron Swarm method
(전자 Swarm법에 의한 $SiH_4$ 플라즈마의 전자이동속도 및 특성에너지 해석)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.12 no.1
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- pp.88-93
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- 1999