• 한국정밀공학회지
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• 제25권12호
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• pp.132-138
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• 2008

Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

• 방사선산업학회지
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• 제5권2호
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• pp.107-112
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• 2011

Electron beam-induced crosslinking of polycaprolactone (PCL) films containing various crosslinking agents (CAs) was investigated in this study. PCL films containing various CAs prepared by a solution casting method were irradiated by electron beams at various absorption doses and the irradiated PCL films were investigated in terms of their crosslinking degree, thermal and mechanical properties, and biodegradability. Based on the results of the crosslinking degree measurement, triallyl isocyanurate was found to be most effective for the electron-beam induced crosslinking of PCL films. The results of the UTM, DMA, and TMA revealed that the thermal and mechanical properties of the crosslinked PCL films were greatly improved in comparison to those of the pure PCL. The results of the enzymatic degradation test revealed that the biodegradability of the crosslinked PCL films was reduced in comparison to that of the pure PCL.

• 대한기계학회논문집A
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• 제39권1호
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• pp.1-9
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• 2015

이 논문은 SEM(Scanning Electron Microsopy) 경통부에서 전자빔의 집속특성을 최적화하기 위한 방법을 다루고 있다. SEM 에서 물체 표면을 확대하기 위해서는 경통부를 지나는 전자빔을 효과적으로 집속하여 표면에 충돌하는 프로브 직경을 줄이는 것이 중요하다. 이 전자빔의 집속정도를 나타내는 지표가 반배율이다. 본 연구는 전자빔의 집속특성을 효과적으로 구현하기 위해 그에 영향을 끼치는 경통부의 설계 인자들을 렌즈 해석과 광선 추적을 통해 알아본다. 이 결과를 근거로 민감도 분석을 수행하여 설계 인자들이 빔의 집속에 끼치는 영향의 정도를 정량적으로 비교해 볼 수 있다. 이러한 전자빔의 특성에 따른 설계 인자의 분석은 경통부 설계에 있어 중요한 기초 정보로 활용될 수 있다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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• pp.1380-1383
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• 2007

The secondary electron emission coefficient (${\gamma}$) of the cathode is an important factor for improving the discharge characteristics of AC-PDP, because of its close relationship to discharge voltage. In this experiment, we have investigated the electronic structure of the energy band in the MgO layer responsible for the high ${\gamma}$. We used three kinds of MgO pellet that have another component, and each MgO layers have been deposited by electron beam evaporation method. The work-functions of MgO layer have been investigated from their ion-induced secondary electron emission coefficient (${\gamma}$), respectively, using various ions with different ionization energies in a ${\gamma}-FIB$ (Focused Ion Beam) system. We have compared work-function with ${\gamma}-FIB$ system current signal for measurement defect energy level in MgO layer. MgO-A in the three types has lowest work-function value (4.12eV) and there are two defect energy levels.

• 한국생산제조학회지
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• 제18권6호
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• pp.558-564
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• 2009

To aim at obtaining a correct and fine small pattern by an electron beam lithography several conditions and methods affecting a real pattern shape needs to be investigated. A micro/nano sized pattern shape is sometimes dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a $11\times11um$ pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape. It is proved that abrupt change in the pattern generation limits to obtaining a fine and small pattern.

• 한국표면공학회지
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• 제50권6호
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• pp.465-472
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• 2017

The ingot fabrication conditions related with the thermal shock bearing phase and microstructure have investigated for the rare earth zirconate ceramic material, lanthanum gadolinium zirconate, as a thermal barrier coating using electron beam evaporation method. The thermal shock resistance of the prepared ingot was evaluated by high energy electron beam irradiation. The rare earth zirconate ceramic powder was prepared by controlling the raw material powder composition of $La_2O_3$, $Gd_2O_3$ and $ZrO_2$ so as to have a composition of $(La_{0.3}Gd_{0.7})_2Zr_2O_7$ which was selected from the former study. Ingot samples were prepared under two conditions. The first condition is prepared by sintering the prepared powder mixture to form an ingot. The second condition is prepared by calcining the prepared powder mixture to form a composite phase and then sintering to form an ingot. X-ray diffraction(XRD) and Scanning Electron Microscope(SEM) were used to analyze phase forming behavior and microstructure of ingot samples. Nanoindentation method used to obtain elastic modulus and hardness of each ingot specimen. Also the stress distribution of ingot was simulated by using FEM method assuming the ingot surface was exposed to electron beam. As a results, in the case of an ingot having a network-shaped microstructure in which relatively coarse pores are included, it seems that the thermal shock resistance was higher than in the case of an ingot having a microstructure composed of relatively fine grains only or particles with the similar level size when the high energy electron beam irradiation.

• 대한방사선치료학회지
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• 제6권1호
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• pp.89-93
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• 1994

Authors have measured virtual source distance of electron beam from CL/1800 medical linear accelerator, with newly designed method. Beam scanning was performed with the direction of beam axis in the air. Compared results between this study and well established in phantom measurement shows good agreement with in experimental error. And we have found that build-up cap plays very important role in air measurement because of charge build up. The method of in-air measurement of virtual source distance is very easy to set-up and generate accurate results.

• 한국정밀공학회지
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• 제32권4호
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• pp.387-394
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• 2015

We analyze heat generation as well as temperature distribution induced by accelerated electron impact on a target in a closed x-ray tube. For the sake of accuracy, we use Monte carlo analysis. This method gives accurate energy deposit in a medium with additional information such as secondary and backscattered electron as well as their paths. A Tungsten coated layer is divided by small rectangular cell which accumulate energy loss of primary electron beam. The cells and their accumulated energy datum are used for the input of finite element analysis. The Maximum temperature rising and temperature distribution were analyzed by transient heat analysis. Some temperature parameters such as target size and coating thickness were varied to investigate temperature sensitivity. Temperatures were compared each other to find primary variable that affect temperature rising on the x-ray target. The results will be helpful in development highresolution x-ray tube and related industries.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.236-239
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• 2002

The electron-atom collision studies has been essentially use\ulcorner for testing and developing suitable theories of the scattering and collision processes, and for providing a tool for obtaining detailed information on the structure of the target atoms and molecules and final collision products. And, the development of that has also been strongly motivated by the need for electron collision data in such fields as laser physic and development, astrophysics, plasma devices, upper atmospheric processes and radiation physics. Therefore, we explains the concept and the principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method.

• 한국전기전자재료학회논문지
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• 제16권5호
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• pp.435-440
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• 2003

The electron-atom collision studies have been essentially used for testing and developing suitable theories of the scattering and collision processes, and for providing a tool for obtaining detailed information on the structure of the target atoms and molecules and final collision products. And, the development of that has also been strongly motivated by the need for electron collision data in such fields as laser Physics and development, astrophysics, Plasma devices, upper atmospheric processes and radiation physics. The concept and the Principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method are explained.