• 제목/요약/키워드: Electron Optical System

검색결과 279건 처리시간 0.028초

초음파 분무 열분해법을 이용한 구리산화물 박막 성장 (Growth of Copper Oxide Thin Films Deposited by Ultrasonic-Assisted Spray Pyrolysis Deposition Method)

  • 한인섭;박일규
    • 한국재료학회지
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    • 제28권9호
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    • pp.516-521
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    • 2018
  • Copper oxide thin films are deposited using an ultrasonic-assisted spray pyrolysis deposition (SPD) system. To investigate the effect of substrate temperature and incorporation of a chelating agent on the growth of copper oxide thin films, the structural and optical properites of the copper oxide thin films are analyzed by X-ray diffraction (XRD), field-emssion scanning electron microscopy (FE-SEM), and UV-Vis spectrophotometry. At a temperature of less than $350^{\circ}C$, three-dimensional structures consisting of cube-shaped $Cu_2O$ are formed, while spherical small particles of the CuO phase are formed at a temperature higher than $400^{\circ}C$ due to a Volmer-Weber growth mode on the silicon substrate. As a chelating agent was added to the source solutions, two-dimensional $Cu_2O$ thin films are preferentially deposited at a temperature less than $300^{\circ}C$, and the CuO thin film is formed even at a temperature less than $350^{\circ}C$. Therefore the structure and crystalline phase of the copper oxide is shown to be controllable.

산화물반도체 트랜지스터의 전기적인 특성 (Semiconductor Engineering)

  • 오데레사
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2013년도 추계학술대회
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    • pp.390-392
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    • 2013
  • 본 논문에서는 투명디스플레이를 구현하기 위해 가장 주목받는 ZnO 계열의 산화물반도체의 특성에 대하여 관찰하였다. 알에프 마그네트론 스퍼터링에 의해 증착된 산화물 반도체의 광학적 특성으로부터 전기적인 신호 동작특성의 상호관계를 알아보았다. 박막내의 결합 혹은 불순물이 증가할수록 PL 특성은 장파장 특성이 우세하게 나타났다. SiOC 박막위에서는 에너지 밴드갭이 증가하면서 단파장 특성이 우세하게 나타났다. 트랜지스터의 특성은 기판의 의존도가 높게 나타났다.

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Characterization of a Hybrid Cu Paste as an Isotropic Conductive Adhesive

  • Eom, Yong-Sung;Choi, Kwang-Seong;Moon, Seok-Hwan;Park, Jun-Hee;Lee, Jong-Hyun;Moon, Jong-Tae
    • ETRI Journal
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    • 제33권6호
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    • pp.864-870
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    • 2011
  • As an isotropic conductive adhesive, that is, a hybrid Cu paste composed of Cu powder, solder powder, and a fluxing resin system, has been quantitatively characterized. The mechanism of an electrical connection based on a novel concept of electrical conduction is experimentally characterized using an analysis of a differential scanning calorimeter and scanning electron microscope energy-dispersive X-ray spectroscopy. The oxide on the metal surface is sufficiently removed with an increase in temperature, and intermetallic compounds between the Cu and melted solder are simultaneously generated, leading to an electrical connection. The reliability of the hybrid Cu paste is experimentally identified and compared with existing Ag paste. As an example of a practical application, the hybrid Cu paste is used for LED packaging, and its electrical and thermal performances are compared with the commercialized Ag paste. In the present research, it is proved that, except the optical function, the electrical and thermal performances are similar to pre-existing Ag paste. The hybrid Cu paste could be used as an isotropic conductive adhesive due to its low production cost.

CF4O2 gas 플라즈마를 이용한 폴리이미드 박막의 식각 (The Etching Characteristics of Polyimide Thin Films using CF4O2 Gas Plasma)

  • 강필승;김창일;김상기
    • 한국전기전자재료학회논문지
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    • 제15권5호
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    • pp.393-397
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    • 2002
  • Polyimide (PI) films have been studied widely as the interlayer dielectric materials due to a low dielectric constant, low water absorption, high gap-fill and planarization capability. The polyimide film was etched using inductively coupled plasma system. The etcying characteristics such as etch rate and selectivity were evaluated at different $CF_4/(CF_4+O_2)$chemistry. The maximum etch rate was 8300 ${\AA}/min$ and the selectivity of polyimide to SiO$_2$was 5.9 at $CF_4/(CF_4+O_2)$ of 0.2. Etch profile of polyimide film with an aluminum pattern was measured by a scanning electron microscopy. The vertical profile was approximately $90^{\circ}$ at $CF_4/(CF_4+O_2)$ of 0.2. As 20% $CF_4$ were added into $O_2$ plasma from the results of the optical emission spectroscopy, the radical densities of fluorine and oxygen increased with increasing $CF_4$ concentration in $CF_4/O_2$ from 0 to 20%, resulting in the increased etch rate. The surface reaction of etched PI films was investigated using x-ray photoelectron spectroscopy.

Co-sputtering 방법으로 제작한 IAZO 박막의 특성과 이를 이용하여 제작한 인광 OLED의 특성 분석 (Characteristics of phosphorescent OLED fabricated on IAZO anode grown by co-sputtering method)

  • 배정혁;김한기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.60-61
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    • 2007
  • IAZO (indium aluminium zinc oxide) anode films were co-sputtered on glass substrate using a dual target DC magnetron sputtering system. For preparation of IATO films, at constant DC power of IZO (indium zinc oxide) target of 100 W, the DC power of AZO (Aluminum zinc oxide) target was varied from 0 to 100 W. To analyze electrical and optical properties of IAZO anode, Hall measurement examination and UV/V is spectrometer were performed, respectively. In addition, structure of IAZO anode film was examined by X-ray diffraction (XRD) method. Surface smoothness was investigated by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). From co-sputtered IAZO anode, good conductivity($2.32{\times}10^{-4}{\Omega}.cm$) and high transparency(approximately 80%) in the visible range were obtained even at low temperature deposition. Finally, J-V-L characteristics of phosphorescent OLED with IAZO anode were studied by Keithley 2400 and compared with phosphorescent OLED with conventional ITO anode.

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고분자 기판위의 다층 보호막의 성능 평가 (Improvement of Permeation of applied Multi-Layer Encapsulation of thin films on Ethylene Terephthalate(PET))

  • 김종환;한진우;강희진;김종연;문현찬;최성호;박광범;김태하;김휘운;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.60-61
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    • 2006
  • In this paper, the inorganic-organic thin film encapsulation layer was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter and Spin-Coater system, the various kinds of inorganic and organic thin-films were deposited onto the Ethylene Terephthalate(PET) and their interface properties between organic and inorganic layer were investigated. Results indicates that the SiON/PI/SiON/PI/PET barrier coatings have high potential for flexible organic light-emitting diode(OLEO) applications.

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PPS/ABS 블렌드의 형태학적/열적 특성 (Morphology and Thermal Properties of PPS/ABS Blends)

  • 이영관;김준명;남재도;박찬석;장승필
    • 폴리머
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    • 제24권3호
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    • pp.366-373
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    • 2000
  • 본 연구에서는 poly(phenylene sulfide)(PPS)와 ABS의 물성을 상호보완하기 위하여 블렌드를 제조하였다. 각 성분간의 상용성을 증진시키기 위하여 소량의 무수말레인산을 ABS에 반응시켜 MABS (ABS-g-MAH)를 제조하였으며, PPS/ABS 및 PPS/MABS 블렌드는 이축 혼련 압출기를 이용하여 용융 흔합하였다. 블렌드에서 ABS의 화학적 개질이 블렌드의 모폴로지와 열적 성질에 미치는 영향을 관찰하였다. PPS/MABS 블렌드의 경우, 각 성분간에 강한 인력이 형성되는 것을 광학현미경과 SEM을 이용하여 확인하였으며, DMA 분석에서는 단일 유리전이 온도를 확인하였다. 또한 화학적으로 개질된 MABS를 사용한 PPS/MABS의 블렌드는 PPS/ABS보다 향상된 열적 성질을 나타내었다.

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RF magnetron sputtering으로 생성한 Ga,Ge와 Ga이 도핑된 ZnO 박막의 특성 (Properties of Ge,Ga and Ga-doped ZnO thin films prepared by RF magnetron sputtering)

  • 정일현;김유진;박정윤;이루다
    • 반도체디스플레이기술학회지
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    • 제9권3호
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    • pp.41-45
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    • 2010
  • The ZnO thin films doped with Ga(GZO) and both Ga and Ge(GZO:Ge) were deposited on glass substrate by using RF sputtering system respectively. Structural, morphological and optical properties of the films deposited in the same condition were investigated. Structural properties of the films were investigated by Field Emission Scanning Electron Microscopy, FE-SEM images and X-ray diffraction, XRD analysis. These studies showed shape of films' surface and direction of film growth respectively. It's showed that all films were deposited by vertical orientation strongly. It can be confirmed that all dopants of targets were included in deposited films by results of EDX analysis. UV-Vis spectrometer results showed that all samples had highly transparent characteristics in visible region and have similar 3.28~3.31 eV band gap. It was found that existence of all dopants by EDX analysis. Morphology and roughness of surface of each film were clearly shown by Atomic Force Microscopy, AFM images. It was found in this research that film doped with Ge more dense and stable with hardly any difference in gap energy compared to ZnO films.

An investigation of the nuclear shielding effectiveness of some transparent glasses manufactured from natural quartz doped lead cations

  • Kassem, Said M.;Ahmed, G.S.M.;Rashad, A.M.;Salem, S.M.;Ebraheem, S.;Mostafa, A.G.
    • Nuclear Engineering and Technology
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    • 제53권6호
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    • pp.2025-2037
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    • 2021
  • The influence of lead cations on natural quartz (QZ) from Egypt as a glass shielding material for the composition with nominal formula (10Na2O - (90 - x) QZ - xPbO (where x = 30, 35, 40, 45 and 50 mol %)) was examined. The studied samples are synthesized via the melt quenching method at 1050 ℃. The X-ray diffraction XRD patterns were confirmed the glass nature for studied samples. Moreover, the optical properties, and the transparency for all compositions were examined by UV-Vis spectroscopy. Also, the major elemental composition of the natural quartz were estimated via the X-ray fluorescence (XRF) technique. Further, the density and molar volume were determined. Furthermore, the nuclear shielding parameters such as, mass attenuation coefficient, effective atomic number, electronic density, the total atomic, and electronic cross sections as well as the mean free path, and the half value layer with different gamma ray energies (81 keV-1407 keV) were calculated. Besides, the results showed that the shielding behavior towards the gamma ray radiation for all glass samples was increased as the increment in PbO concentration in the glass system.

전기방사를 이용하여 제조된 산화아연 나노섬유의 직경제어 및 광촉매 특성 (Diameter-Controllable Synthesis and Enhanced Photocatalytic Activity of Electrospun ZnO Nanofibers)

  • 지명준;유재현;이영인
    • 한국재료학회지
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    • 제29권2호
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    • pp.79-86
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    • 2019
  • A heterogeneous photocatalytic system is attracting much interest for water and air purification because of its reusability and economical advantage. Electrospun nanofibers are also receiving immense attention for efficient photocatalysts due to their ultra-high specific surface areas and aspect ratios. In this study, ZnO nanofibers with average diameters of 71, 151 and 168 nm are successfully synthesized by facile electrospinning and a subsequent calcination process at $500^{\circ}C$ for 3 h. Their crystal structures, morphology features and optical properties are systematically characterized by X-ray diffraction, scanning electron microscopy, UV-Vis and photoluminescence spectroscopies. The photocatalytic activities of the ZnO nanofibers are evaluated by the photodegradation of a rhodamine B aqueous solution. The results reveal that the diameter of the nanofiber, controlled by changing the polymer content in the precursor solution, plays an important role in the photocatalytic activities of the synthesized ZnO nanofibers.