• Journal of Radiation Protection and Research
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• 제29권4호
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• pp.263-268
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• 2004

한국원자력연구소에서 감마선과 전자를 동시측정하기 위한 목적으로 제작된 Prototype phowich를 이용하여 감마선에 대한 섬광체의 비선형성에 대한 연구를 수행하였다. 제작된 Prototype phoswich는 $2'{\times}2'$ CsI(Tl)와 Plastic scintillator 그리고 하나의 PMT로 구성되어 있다. 몬테칼로 방법을 이용하여 $^{137}Cs$과 $^{60}Co$ 선원의 Prototype phoswich 계측기의 반응함수(Detector Response Function, 이하 DRF)를 구하였으며 이를 점증하기 위하여 제작된 Prototype phoswich를 이용, 실험을 통하여 DRF를 구한 뒤 비교하였다. 계측기의 DRF를 정확하게 모사하기 위하여 CsI(Tl) 섬광체의 Electron response와 섬광체 내에서의 광전효과를 고려하는 Simplified elec윤on cascade sequence 정보를 이용하여 CsI(Tl) 섬광체의 감마선에 대한 비선형성을 계산하였다. $^{137}Cs$ 선원의 경우 전산모사를 통하여 구한 DRF 결과는 실험값과 비교적 잘 일치함을 알 수 있었으나 $^{60}Co$의 경우에는 선원의 결과와는 달리 전산모사 결과와 실험값에 약간의 차이가 남을 알 수 있었다. 이는 $^{137}Cs$ 선원과는 달리 $^{90}Co$은 1.17 MeV와 1.13 MeV 두 개의 광자를 동시에 방출하기 때문에 동시효과에 의한 불착실성 등이 그 외 다른 불확실성 등과 함께 증폭되어 나타나기 때문이다. 본 연구를 통해 Phoswich내 CsI(Tl)의 감마선 비선형성에 대한 분석을 수행하였으며 이를 통하여 비선형성이 고려된 개선된 Phoswich DRF를 생산하고 이를 실험값과 비교 검증할 수 있었다. 섬광체의 Electron channel운g effect, Doppler broadening effect 및 Transfer resolution 등과 같은 후속연구가 추가된다면 좀더 정확한 Phoswich의 DRF를 전산 모사하는 것이 가능해질 것이다.

• 한국재료학회지
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• 제5권1호
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• pp.96-103
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• 1995

30KV 전자빔리소그래피 장치를 사용하여 PMMA 3000$\AA$/P(MMA/MAA) 6000$\AA$의 이중구조에서 foot width 0.1$\mu$m이하, head width 0.4$\mu$m의 T-gate를 형성하였다. PMMA/P(MMA/MAA)/GaAS 구조에 대한 Monte Carlo 시뮬레이션 결과, 산란반경 0.1$\mu$m에서 전방산란전자와 후방산란전자의 에너지 비는 19.5:1로 나타났다. 전자빔리소그래피 공정에 필요한 PMMA 및 P(MMA/MMA)의 열처리 조건, 설게 선폭에 대한 패턴감도를 구하였다. MIBK : IPA = 1 : 1 현상액에 대한 PMMA 및 P(MMA/MAA)의 감마값(gamma value)은 2.3이었다. 광 및 전자빔리소그래피 장치의 혼합사용(mix-and-match) 결과 층간정렬도 (alignment accuracy)는 0.1$\mu$m(3$\sigma$) 이하를 얻었다.

• Transactions on Electrical and Electronic Materials
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• 제18권1호
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• pp.7-12
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• 2017

This work takes place in the context of the development of a transport phenomena simulation based on group III nitrides. Gallium and boron nitrides (GaN and BN) are both materials with interesting physical properties; they have a direct band gap and are relatively large compared to other semiconductors. The main objective of this paper is to study the effect of boron content on the electron transport of the ternary compound $B_xGa_{(1-x)}N$ and the effect of the temperature of this alloy at x=50% boron percentage, specifically the piezoelectric, acoustic, and polar optical scatterings as a function of the energy, and the electron energy and drift velocity versus the applied electric field for different boron compositions ($B_xGa_{(1-x)}N$), at various temperatures for $B_{0.5}Ga_{0.5}N$. Monte carlo simulation, was employed and the three valleys of the conduction band (${\Gamma}$, L, X) were considered to be non-parabolic. We focus on the interactions that do not significantly affect the behavior of the electron. Nevertheless, they are introduced to obtain a quantitative description of the electronic dynamics. We find that the form of the velocity-field characteristic changes substantially when the temperature is increased, and a remarkable effect is observed from the boron content in $B_xGa_{(1-x)}N$ alloy and the applied field on the dynamics of holders within the lattice as a result of interaction mechanisms.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 1996년도 추계학술발표회논문집
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• pp.134-139
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• 1996

The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium ion in the mean electron energy. This paper describes the electron transport characteristics in SF$_{6}$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.n.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 학술대회 논문집 전문대학교육위원
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• pp.159-162
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• 2006

In this paper energy distribution function in $SiH_4$ has been analysed over the E/N range 0.5${\sim}$300Td and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values.

• 한국조명전기설비학회지:조명전기설비
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• 제13권2호
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• pp.227-227
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• 1999

The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium region in the mean electron energy. This paper describes the electron transport characteristics in $SF_6$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of ane1ctron swarm parameter such as the e1ectron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 전문대학교육위원 P
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• pp.16-19
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• 1999

This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

• 한국방사선학회논문지
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• 제10권3호
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• pp.153-159
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• 2016

방사선과 상호작용으로 단일 금 나노입자로부터 나타나는 2차 전자의 발생과 입자 크기, 입사 에너지 간의 관계를 확인하였으며, 금 나노입자를 이용한 선량 증가 효과에 대한 기초 자료를 제공하고자 하였다. MCNPX MC code를 이용하여 Monte Carlo 시뮬레이션 기법을 적용하였으며, X선 에너지는 50, 100, 150 kV와 6, 15 MV를 사용하였다. 물 팬텀 내부에 30, 50, 70, 90, 110 nm 직경의 단일 금 나노입자를 위치시켜 10 nm 간격으로 계수 체적을 지정하였다. 금 나노입자로부터 발생하는 전자의 차이는 입자가 없을 때를 기준으로 표준화하여 나타내었으며, X선의 에너지가 낮을수록, 금 입자의 직경이 클수록 많은 전자의 발생을 보였다. 에너지가 낮을수록 나노입자의 크기와 전자 발생 간 선형식에서 높은 기울기 값을 나타내었으며, MV X선에 비해 kV X선에서 현저히 많은 전자의 발생을 보였다. 금 나노입자를 이용한 선량 증가 현상을 이해하기 위한 자료로 활용할 수 있을 것으로 생각되며, 추후 금 나노입자를 포함한 다양한 선량 증가 물질에 대한 추가 연구가 필요할 것으로 사료된다.

• 전자공학회논문지A
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• 제33A권6호
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• pp.144-150
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• 1996

The purpose of this paper is to develop a simulation program to predict resist prifile in electron-beam lithography, where the main issue is proximity effect. The simualtion program composes of monte-carlo simulation, exposure simulation and development simulation. In nonte-carlo simulation, the absorbed energy in the resist is calculated when one electron is incident into resist, using hybrid model on the basis of the rutherford differential scattering cross section and moller theory. In exposure simulation, the absorbed energy in the resist is calculated when electrons are incident in exposure pattern. In the program, the developed profile depending on time is obtained by string model. The 0.2$\mu$m and the 0.3$\mu$m line and space patterns are experimentally delineated and compared to the simulation results to check the relevance of the program.

• 한국의학물리학회지:의학물리
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• 제34권2호
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• pp.15-22
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• 2023

This study compared the dose calculated using the electron Monte Carlo (eMC) dose calculation algorithm employing the old version (eMC V13.7) of the Varian Eclipse treatment-planning system (TPS) and its newer version (eMC V16.1). The eMC V16.1 was configured using the same beam data as the eMC V13.7. Beam data measured using the VitalBeam linear accelerator were implemented. A box-shaped water phantom (30×30×30 cm³) was generated in the TPS. Consequently, the TPS with eMC V13.7 and eMC V16.1 calculated the dose to the water phantom delivered by electron beams of various energies with a field size of 10×10 cm². The calculations were repeated while changing the dose-smoothing levels and normalization method. Subsequently, the percentage depth dose and lateral profile of the dose distributions acquired by eMC V13.7 and eMC V16.1 were analyzed. In addition, the dose-volume histogram (DVH) differences between the two versions for the heterogeneous phantom with bone and lung inserted were compared. The doses calculated using eMC V16.1 were similar to those calculated using eMC V13.7 for the homogenous phantoms. However, a DVH difference was observed in the heterogeneous phantom, particularly in the bone material. The dose distribution calculated using eMC V16.1 was comparable to that of eMC V13.7 in the case of homogenous phantoms. The version changes resulted in a different DVH for the heterogeneous phantoms. However, further investigations to assess the DVH differences in patients and experimental validations for eMC V16.1, particularly for heterogeneous geometry, are required.