• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.4
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• pp.210-214
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• 2016

We investigated the sintering behavior and piezoelectric properties of lead-free $(K_{0.5}Na_{0.5})NbO_3$ ceramics co-doped with excess 0.01 mol ZnO and x mol $MnO_2$, where x was varied from 0 to 0.03. Excess $MnO_2$ addition was found to retard the grain growth and densification during sintering. However, 0.005 mol $MnO_2$ addition improved the piezoelectric properties of 0.01 mol ZnO added $(K_{0.5}Na_{0.5})NbO_3$ ceramics. The planar mode piezoelectric coupling coefficient, electromechanical quality factor, and piezoelectric constant $d_{33}$ of 0.01 mol ZnO and 0.005 mol $MnO_2$ added specimen were 0.40, 304, and 214 pC/N, respectively.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1244-1245
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• 2008

Recently, piezoelectric transformer is applied to wide fields. Multi layer piezoelectric transformer has the advantage of high step up ratio, electromechanical coupling coefficient(Kp) and mechanical quality factor(Qm), but is indicated of peeling-phenomenon of electrode, rising sintering temperature made price of costly electrode. So in this study, it discuss on method for fabrication of rosen type piezoelectric transformers. For the fabrication as rosen type piezoelectric transformers, synthesized the powder using 0.01Pb$(ni_{1/3}Nb_{2/3})O_3$ - 0.08Pb$(Mn_{1/3}Nb_{2/3})O_3$ - 0.91Pb$(Zr_{0506}Ti_{0496})O_3$ (abbreviated as PNN-PMN-PZT) ceramics. The density, microstructure, dielectric and piezoelectric properties as a function of sintering temperature were investigated. The results indicated that the optimized properties of ceramics were obtained at sintering temperature of 1200$^{\circ}C$, showed the value of $d_{33}$=273pC/N, $K_p$=0.60 $Q_m$=1585, ${\varepsilon}_r$=1454, density=7.917$g/cm^3$ and $tan{\delta}$=0.0064.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.458-463
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• 2003

In order to develope piezoelectric transformer for the ballast of fluorescent lamp, a new shape and electrode pattern of piezoelectric transformer has been investigated in this work. The composition of piezoelectric ceramics was 0.95Pb(Zr$_{0.51}$Ti$_{0.49}$)O$_3$+0.03Pb(Mn$_{1}$3/Nb$_{2}$3/)O$_3$+0.02Pb(Sb$_{1}$2/Nb$_{1}$2/)O$_3$. The sample prepared by this composition system showed the characteristics which has about 1200 of relative dielecric constant, 1100 of the mechanical quality factor, 0.53 of the electromechanical coupling coefficient, 320 pC/N of the piezoelectric constant d$_{33}$, 0.3 % of the dissipation factor. Diameter and thickness of disk-type piezoelectric transformer was 45 mm and 4 mm, respectively. The driving and generating electrode with their gap of 1mm were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface ratio of driving and generating part on the top surface ranges from 1.4:1 to 3:1. We investigated the electrical characteristics with the variation of the electrode surface ratio of driving and generating part in the range of load resistance of 100 $\Omega$～70 k$\Omega$. The set-up voltage ratio of this piezoelectric transformer increases with increasing both the electrode surface of driving part and the load resistance. The set-up voltage ratio at no load resistance was more than 60 times. On the other hand, the efficiency decreases with increasing the electrode surface of driving part. In the case of the electrode surface of both 1.4:1 and 2:1, maximum efficiency showed above 97 % at load resistance of 2 k$\Omega$. However, in the case of the electrode surface of 3:1, maximum efficiency showed about 94 % at load resistance of 3 k$\Omega$.>.>.>.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.68-69
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• 2005

Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.3
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• pp.245-251
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• 2000

Dielectric properties, piezoelectric properties and mechanical properties of NiO-doped Pb($(Ni_{1/3}Nb_{2/3})O_3-PbTiO_3-PbZrO_3$ ceramics were investigated. Powders, prepared by columbite precursor method, were cold pressed and sintered at temperature ranging from $1100^{\circ}C$ to $1250^{\circ}C$. Dielectric constant and piezoelectric constant increased with amount of NiO up to 1 mol% and then decreased with further addition of NiO. It seems that NiO acts as a sintering aid at the sintering temperatures of $1150^{\circ}C$. When the samples were sintered at temperature above $1200^{\circ}C$, however, both dielectric constant and electromechanical coupling factor decreased and mechanical quality coefficient increased with addition of NiO. Hardness and fracture toughness of PNN-PT-PZ increased with addition of NiO up to 1 mol%, and then decreased slightly with further addition of NiO. These results showed that dielectric properties, piezoelectric properties and mechanical properties of PNN-PT-PZ system seemed to be closely related with microstructural factors such as grain size, bulk density and the amount of second phase.

• The Journal of the Acoustical Society of Korea
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• v.41 no.3
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• pp.278-286
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• 2022

In this study, a 33-mode Free-Flooded Ring (FFR) transducer was designed to apply piezoelectric single crystal PIN-PMN-PT, which has high piezoelectric constants and electromechanical coupling coefficient. To ensure low-frequency high transmitting sensitivity characteristics with a small size of FFR transducer, the commercial FFR transducer based on piezoelectric ceramics was compared. To develop the FFR transducer with broadband characteristics, a piezoelectric segmented ring structure inserted with inactive elements was applied. The oil-filled structure was applied to minimize the change of acoustic characteristics of the ring transducer. It was verified that the transmitting voltage response, underwater impedance, and beam pattern matched the finite element numerical simulation results well through an acoustic test. The difference in the transmitting voltage response between the measured and the simulated results is about 1.3 dB in cavity mode and about 0.3 dB in radial mode. The fabricated FFR transducer had a higher transmitting voltage response compared to the commercial transducer, but the diameter was reduced by about 17 %. From this study, it was confirmed that the feasibility of a single crystal-applied FFR transducer with compact size and high-power characteristics. The effectiveness of the performance prediction by simulation was also confirmed.