• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.44-48
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• 1996

This paper describes the effects of thermal deformation in electromagnetic chuck on the grinding accuracy. Gringing process is the last machining process and decisive in saving past other machining cost. The thermal deformation of grinding machine is unavoidable and affect seriously ginding accuracy. The thermaldeformation of electromagnetic chuck is one of important thermal problems. Heat generation of magnetic chuck is analyzed and measured. The temperature disturibution in chuck is elliptical form with high temperature in center of chuck. The thermal deformation form of chuck is changed with time to mountain form. The grinding experiment shows that the thermal deformation of magnetic chuck influence strongly machining accuracy as much as the headstock

• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.12-18
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• 2024

A Electrostatic chuck is a device that fixes the substrate, using the force between charges applied between two parallel plates to attract substrates such as wafers or OLED panels. Unlike mechanical suction methods, which rely on physical fixation, this method utilizes the force of electrostatics for fixation, making it important to verify the adhesion force. As the size of the substrate increases, deformations due to gravity or chucking force also increase, and the adhesion force decreases rapidly as the distance between the chuck and the substrate increases. The outlook for displays is shifting from small to large OLEDs, necessitating consideration of substrate deformations. In this paper, to confirm the deformation of the substrate through various patterns, a simplified 2D model using Ansys' electromagnetic field analysis program, Maxwell, and the static structural analysis program, Mechanical, was utilized to observe changes in adhesion force according to the variation in the air gap between the substrate and the chuck. Additionally, the chucking force was analyzed for the size of the substrate, and the deformation of the substrate was confirmed when gravity and chucking force act simultaneously.

• Nuclear Engineering and Technology
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• v.53 no.6
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• pp.1887-1892
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• 2021

The effect of gadolinium and boron on the texture development and magnetic properties of the texture controlled 23Cr-10NiCu duplex stainless steels were studied to develop a high performance neutron and electromagnetic shielding material. The 23Cr-10NiCu base alloy is composed of 60% of austenite and 40% of ferrite, whereas, the 23Cr-10NiCu-0.5Gd-0.8B modified alloy is composed of 66% of austenite, 27% of ferrite and 7% of CrFeB intermetallic compounds. The gadolinium and boron addition to the 23Cr-10NiCu base alloy increased mechanical properties. Microstructure observation showed that the small addition of 0.5 wt% gadolinium and 0.8 wt% boron to the alloy retarded to form texture at the same hot rolling conditions, and improved the maximum magnetism, residual magnetism and coercive force about 3%, 122% and 120%, respectively.