• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.246-246
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• 2010

As the trench width in the interconnect technology decreases down to nano-scale below 50 nm, superconformal gap-filling process of Cu becomes very critical for Cu interconnect. Obtaining superconfomral gap-filling of Cu in the nano-scale trench or via hole using MOCVD is essential to control nucleation and growth of Cu. Therefore, nucleation of Cu must be suppressed near the entrance surface of the trench while Cu layer nucleates and grows at the bottom of the trench. In this study, suppression of Cu nucleation was achieved by treating the Ru barrier metal surface with capacitively coupled hydrogen plasma. Effect of hydrogen plasma pretreatment on Cu nucleation was investigated during MOCVD on atomic-layer deposited (ALD)-Ru barrier surface. It was found that the nucleation and growth of Cu was affected by hydrogen plasma treatment condition. In particular, as the plasma pretreatment time and electrode power increased, Cu nucleation was inhibited. Experimental data suggests that hydrogen atoms from the plasma was implanted onto the Ru surface, which resulted in suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. Due to the hydrogen plasma treatment of the trench on Ru barrier surface, the suppression of Cu nucleation near the entrance of the trenches was achieved and then led to the superconformal gap filling of the nano-scale trenches. In the case for without hydrogen plasma treatments, however, over-grown Cu covered the whole entrance of nano-scale trenches. Detailed mechanism of nucleation suppression and resulting in nano-scale superconformal gap-filling of Cu will be discussed in detail.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.4
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• pp.2027-2036
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• 2013

Comparison of removal performance between reverse osmosis(RO), nanofiltration(NF), electrocoagulation(EC) and electroadsorption(EA) for removal of nitrate and fluoride often exceeded the limits of water quality in small water treatment plants. Removals of nitrate and fluoride were 72-92% and 74-85% in RO, 5-15% and 1% in NF, 99% and 44% in EA equipped with MWCNT coated electrodes, 82% and 77% in EA equipped with Cu-MWCNT electrodes, and 11-46% and 69-99% in EC. Consequently, high removals of both ions were anticipated in RO. Effective removal of both ions are possible for EC, but great production of sludge is a big burden. EA equipped with the MWCNT electrodes showed a great fluctuation in removal efficiency, and electrode stability should be upgraded.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.337-337
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• 2012

Dye sensitized solar cell (DSSC) having high efficiency with low cost was first reported by Gr$\ddot{a}$tzel et al. Many DSSC research groups attempt to enhance energy conversion efficiency by modifying the dye, electrolyte, Pt-coated electrode, and $TiO_2$ films. However, there are still some problems against realization of high-sensitivity DSSC such as the recombination of injected electrons in conduction band and the limited adsorption of dye on $TiO_2$ surface. The surface of $TiO_2$ is very important for improving hydrophilic property and dye adsorption on its surface. In this paper, we report a very efficient method to improve the efficiency and stability of DSSC with nano-structured $TiO_2$. Atmospheric plasma system was utilized for nitrogen plasma treatment on nano-structured $TiO_2$ film. We confirmed that the efficiency of DSSC was significantly dependent on plasma power. Relative in the $TiO_2$ surface change and characteristics after plasma was investigated by various analysis methods. The structure of $TiO_2$ films was examined by X-ray diffraction (XRD). The morphology of $TiO_2$ films was observed using a field emission scanning electron microscope (FE-SEM). The surface elemental composition was determined using X-ray photoelectron spectroscopy (XPS). Each of plasma power differently affected conversion efficiency of DSSC with plasma-treated $TiO_2$ compared to untreated DSSC under AM 1.5 G spectral illumination of $100mWcm^{-2}$.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.162-166
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• 2012

High density of ZnO nanorods were fabricated by electrochemical deposition and subsequent heat treatment. Formation of $Zn(OH)_2$ and ZnO during electrodeposition indicated that the electrodeposition efficiency of ZnO was below 33%. ZnO rod has a preferential (200) growth plane after heat treatment at $500^{\circ}C$ and the growth rate of ZnO rod was measured to be 0.986 ${\mu}m/hr$. Dye sensitized solar cell(DSC) showed the efficiency of 0.21% when electrochemically prepared ZnO rod was used as an electrode. It suggests the possible application of ZnO rod structure in the DSC.

• Journal of Electrochemical Science and Technology
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• v.2 no.1
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• pp.45-50
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• 2011

A series of expanded graphites is prepared from graphite oxide by changing the heat-treatment temperature, and their lithiation/de-lithiation mechanism and rate performance are examined. A featureless sloping profile is observed in their charge-discharge voltage and dilatometry profiles, which is contrasted by the stepwise plateau-like profiles observed with the pristine graphite. With an increase in the heat-treatment temperature from $250^{\circ}C$ to $850^{\circ}C$, the interlayer distance becomes smaller whereas the electric conductivity becomes larger, both of which are resulted from a removal of foreign atoms (mainly oxygen) from the interlayer gaps. The expanded graphite that is prepared by a heat-treatment at $450^{\circ}C$ delivers the best rate performance, which seems to be a trade-off between the $Li^+$ ion diffusivity that is affected by the interlayer distance and electrical conductivity.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.10
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• pp.888-893
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• 2016

In this study, the solution plasma process was utilized with the aim of degrading synthetic dyes in water at atmospheric pressure. The experiments were conducted in a batch-type reactor consisting of a symmetric wire-wire electrode configuration with rhodamine B (RhB) as the target synthetic dye. The effects of the plasma treatment time and initial dye concentration on the RhB degradation were investigated by monitoring the change in absorbance of RhB solutions. The RhB solutions turned lighter in color and finally colorless with prolonged plasma treatment time, indicating the destruction of dye molecules. The RhB solutions were found to have degraded, following the first-order kinetic process. However, for high initial RhB concentrations, another kinetic process or factor seems to play a dominant role at the initial degradation stage. The fitted first-order rate constant decreased as the initial concentration increased. This result suggests that the degradation behavior and kinetic process of the RhB solution strongly depends on its initial concentration. The RhB degradation is considered to be due to a combination of factors, including the formation of chemically oxidative species, as well as the emission of intense UV radiation and high-energy electrons from the plasma. We believe that the solution plasma process may prove to be an effective and environment-friendly method for the degradation or remediation of synthetic dye in wastewater.

• Journal of Environmental Health Sciences
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• v.37 no.3
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• pp.218-225
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• 2011

Objectives: In this paper, a dielectric barrier discharge (DBD) plasma reactor was investigated for degrading the dye Rhodamine B (RhB) in aqueous solutions. Methods: The DBD plasma reactor system in this study consisted of a plasma component [titanium discharge (inner), ground (outer) electrode and quartz dielectric tube], power source, and gas supply. The effects of various parameters such as first voltage (input power), gas flow rate, second voltage (output power), conductivity and pH were investigated. Results: Experimental results showed that a 99% aqueous solution of 20 mg/l Rhodamine B is decolorized following an eleven minute plasma treatment. When comparing the performance of electrolysis and plasma treatment, the RhB degradation of the plasma process was higher that of the electrolysis. The optimum first voltage and air flow rate were 160 V (voltage of trans is 15 kV) and 3 l/min, respectively. With increased second voltage (4 kV to 15 kV), RhB degradation was increased. The higher the pH and the lower conductivity, the more Rhodamine B degradation was observed. Conclusions: OH radical generation of dielectric plasma process was identified by degradation of N, N-dimethyl-4-nitrosoaniline (RNO, indicator of OH radical generation). It was observed that the effect of UV light, which was generated as streamer discharge, on Rhodamine B degradation was not high. Rhodamine B removal was influenced by real second voltage regardless of initial first and second voltage. The effects of pH and conductivity were not high on the Rhodamine B degradation.

• Journal of the Korean institute of surface engineering
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• v.50 no.6
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• pp.510-515
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• 2017

In this study, a transient liquid phase sintering (TLPS) process of Ag pastes mixed with a fusible metal alloy of Bi58Sn42 with the melting temperature of $138^{\circ}C$, was examined. After screen printing of the Ag pastes with and without Bi58Sn42 powders on polyimide (PI) substrates, the electrodes were heat-treated at different temperatures in the range between 150 and $300^{\circ}C$ for 60 min in air. Comparing the electrical conductivity of the Ag pastes with and without Bi58Sn42 alloy powder after the heat treatment, it was manifested that the low melting temperature alloy definitely played a major role in an increased conductivity when it is added into the Ag pastes by providing more electrical conduction paths between Ag particles. This can be explained by the fact that capillary force of the melts of Bi58Sn42 can contribute to the rearrangement of the Ag particles during the heat-treatment inducing better connectivity between the Ag particles.

• Physical Therapy Rehabilitation Science
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• v.11 no.4
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• pp.493-501
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• 2022

Objective: The purpose of this study is to present basic data for appropriate therapeutic intervention by confirming changes in the autonomic nervous system and pain by applying high-frequency deep diathermy to the lower abdomen in patients with primary dysmenorrhea. Design: A randomized controlled clinical trial. Methods: Thirty-eight women aged 18-50 years who complained of regular menstrual cycles (24-32 days) and primary dysmenorrhea symptoms were randomly assigned to a high-frequency therapy group (5, 7, or 9 mins) and a superficial heat therapy group (20 min). High frequency treatment group: The subject was in a supine position, and radio frequency was applied to the lower abdomen below the umbilicus. The radio frequency therapy device used in this study uses a 300 kHz capacitive electrode and a 500 kHz resistive electric transfer to deliver deep heat. Superficial heat treatment Group: Subjects applied a hot pack to the lower abdomen for 20 minutes while lying on their back. Evaluations were made of Heart rate variability and Visual Analogue Scale. Results: In subjects with menstrual pain, there was a significant difference in pain between the high-frequency therapy group and the superficial heat therapy group (p=0.026). However, there was no significant difference between the autonomic nervous system and the stress resistance (p>0.05). Conclusions: As a result of this study, high-frequencytreatment using radiofrequency was effective in relieving pain because it can penetrate deeper tissues than conventional hot packs using superficial heat. In particular, it was found that the optimum effect was obtained when high frequency was applied forfive-seven minutes.

• Applied Chemistry for Engineering
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• v.18 no.3
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• pp.291-295
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• 2007

The oxidation treatment of needle cokes with 70 wt% of nitric acid and sodium chlorate ($NaClO_3$) was attempted to achieve an electrochemically active material with a large capacitance. The structure of needle cokes was changed to graphite oxide after oxidation treatment of needle cokes with acidic solution having the composition ratio, $NaClO_3$/needle cokes, of 7.5, and the inter-layer distance of the oxidized needle cokes was extended to $6.9{\AA}$with increasing oxygen content. On the other hand, the electrochemical performance of oxidized needle cokes as a polarized electrode for an Electric Double Layer Capacitor (EDLC) was examined with an electrolyte of 1.2 M $TEABF_4$ (tetraethylammonium tetrafluoroborate) and $TEABF_4$ (triethylmethylammonium tetrafluoroborate) in acetonitrile. The capacitor cell using 1.2 M $TEABF_4$/acetonitrile has exhibited smaller electric resistance of $0.05{\Omega}$, and larger capacitance per weight and volume of 32.0 F/g and 25.5 F/mL at the two-electrode system in the potential range 0~2.5 V than that of the capacitor cell using $TEABF_4$. The observed electrochemical performance was discussed with the correlation between the inter-layer distance in graphite oxide structure and the anionic size of electrolyte.