• Transactions on Electrical and Electronic Materials
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• 제13권2호
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• pp.78-84
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• 2012

An in-situ optical monitoring method for real-time process monitoring of electrochemical copper deposition (CED) is presented. Process variables to be controlled in achieving desired process results are numerous in the CED process, and the importance of the chemical bath conditions cannot be overemphasized for a successful process. Conventional monitoring of the chemical solution for CED relies on the pH value of the solution, electrical voltage level for the reduction of metal cations, and gravity measurement by immersing sensors into a plating bath. We propose a nonintrusive optical monitoring technique using three types of optical sensors such as chromatic sensors and UV/VIS spectroscopy sensors as potential candidates as a feasible optical monitoring method. By monitoring the color of the plating solution in the bath, we revealed that optically acquired information is strongly related to the thickness of the deposited copper on the wafers, and that the chromatic information is inversely proportional to the ratio of $Cu$ (111) and {$Cu$ (111)+$Cu$ (200)}, which can used to measure the quality of the chemical solution for electrochemical copper deposition in advanced interconnection technology.

• Bulletin of the Korean Chemical Society
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• 제23권1호
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• pp.71-74
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• 2002

The apparent barrier height for charge transfer through an interfacial water layer between a Pt/Ir tip and a gold surface has been measured using STM technique. The average thickness of the interfacial water layer inside an STM junction was controlled by the amount of moisture. A thin water layer on the surface was formed when relative humidity was in the range of 10 to 80%. In such a case, electron tunneling through the thin water layer became the majority of charge transfers. The value of the barrier height for the electron tunneling was determined to be 0.95 eV from the current vs. distance curve, which was independent of the tip-sample distance. On the other hand, the apparent barrier height for charge transfer showed a dependence on tip-sample distance in the bias range of 0.1-0.5 V at a relative humidity of approximately 96%. The non-exponentiality for current decay under these conditions has been explained in terms of electron tunneling and electrochemical processes. In addition, the plateau current was observed at a large tip-sample distance, which was caused by electrochemical processes and was dependent on the applied voltage.

• 대한화학회지
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• 제58권3호
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• pp.289-296
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• 2014

Electrochemical copolymerization of o-chlorophenol (oCP) with o-hydroxyphenol (oHP) was carried out in aqueous $H_2SO_4$ by using cyclic voltammetry (CV) technique. In addition, CV was used to evaluate the differences in electrochemical characteristics of the copolymer in comparison with the corresponding homopolymers, poly(o-chlorophenol) (PoCP) and poly(o-hydroxyphenol) (PoHP). The variation of peak currents with respect to sweep rates was compared between copolymer and homopolymers, PoCP and PoHP, films. Further support for copolymer characterization was obtained by recording UV-visible, IR spectra and elemental analysis. The mechanism of the electrochemical polymerization has been discussed. The monomer reactivity ratios ($r_1$ and $r_2$) were calculated using Fineman-R$\ddot{o}$ss method and was found to be 0.4 and 1.3 repetitivelly and the copolymer structure is a block structure and more rich in oHP units.

• 한국환경과학회지
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• 제18권11호
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• pp.1225-1234
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• 2009

The aim of this research was to apply experimental design methodology in the optimization condition of electrochemical oxidation of Rhodamine B(RhB). The reactions of electrochemical oxidation were mathematically described as a function of parameters amounts of current, NaCl dosage, pH and time being modeled by the use of the central composite design, which was used for fitting quadratic response surface model. The application of response surface methodology using central composite design(CCD) technique yielded the following regression equation, which is an empirical relationship between the removal efficiency of RhB and test variable in actual variables: RhB removal (%) = 3.977 + 23.279$\cdot$Current + 49.124$\cdot$NaCI - 5.539$\cdot$pH - 8.863$\cdot$time - 22.710$\cdot$Current$\cdot$NaCl + 5.409$\cdot$Current$\cdot$time + 2.390$\cdot$NaCl$\cdot$time + 1.061$\cdot$pH$\cdot$time - $0.570{\cdot}time^2$. The model predicted also agree with the experimentally observed result($R^2$ = 91.9%).

• 한국표면공학회지
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• 제28권1호
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• pp.34-45
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• 1995

An amphiphilic nitroxide radical(2,2'6,6'-tetramethyl-4-octadecyioxy-1-piperidinyloxyl, TEMOPO) or mixture of TEMOPO and arachidic acid(Icosanoic acid, AA), was spread on water surface by the Langmuir-Blodgett(LB) method and surface pressure-area curve was measured. Such monolayer films of TEMOPO were transferred onto surfaces of photo transferable tin oxide electrodes(PTTO) by the LB method under various surface pressure with the transfer ratio of larger than 0.95 at the surface pressure higher than 15mN/m. The electrochemical effect of functional nitroxy radical monolayer onto semi-conductive electrode to electrolyte have been investigated by using LB method. Cyclic voltammetry technique was used for the electrochemical behavior measurement of TEMOPO monolayer onto the PTTO in 0.18 mo1/$dm^3$ $H_2SO_4$ solutions. The shape of voltammograms was found to change from one electrode to another. The amount of charge for the oxidation and the re-reduction of the cation to TEMOPO were evaluated from graphical integration. The amounts of charge were always smaller than those predicted from the $\pi$-$\sigma$ curves though the transfer ratio was unity. The poor reproducibility of the cyclic voltammograms was improved by the mixing with AA. Structure and arrangement of monomolecular layer on water surface and electrode were studied. Characteristics of monolayer film applied for the mediation reaction was also discussed by electrochemical method.

• Corrosion Science and Technology
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• 제9권6호
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• pp.325-330
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• 2010

Many surface protection methods have been developed to apply for constructional steels used under severe corrosive environment. Thermal spray coating has been known to be an attractive technique due to its relatively high coating speed. Furthermore high corrosion resistance of coated film with thermal spray is required to expand its application. Four types of coated films(DFT:300 um) such as pure zinc, pure aluminum and two Al-Zn alloy (Al:Zn=85:15 and Al:Zn=95:5) onto the carbon steel (SS401) were prepared with arc spray, and the corrosion behavior of their samples were evaluated by electrochemical method in this study. Pure aluminum sample showed high corrosion resistance behavior exposed to sea water solution and pure zinc and alloy (Al:Zn=95:5) samples followed pure aluminum sample. The other alloy(Al:Zn=85:15) so called galvalume coated onto the carbon steel ranks the 4th corrosion resistance in this study. The results of porosity ratio of those samples by observation are well matched with the electrochemical data.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.1184-1187
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• 2003

Electrochemical capacitors are becoming attractive energy storage systems particularly for applications involving high power requirements such as hybrid systems consisting of batteries and electrochemical capacitors for electric vehicle propulsion. A new type electric double layer capacitor (EDLC) was constructed by using carbon nanofibers (CNFs) and DAAQ(1,5-diaminoanthraquinone) electrode. Carbonaceous materials are found in variety forms such as graphite, diamond, carbon fibers etc. While all the carbon nanofibers include impurities such as amorphous carbon, nanoparticles, catalytic metals and incompletely grown carbons. We have eliminated of Ni particles and some carbonaceous particles in nitric acid. Nitric acid treated CNFs could be covered with very thin DAAQ oligomer from the results of CV and TG analyses and SEM images. DAAQ oligomer film exhibited a specific capacity as 45-50 Ah/kg in 4M $H_2SO_4$. We established Process Parameters of the technique for the formation of nano-structured materials. Furthermore, improved the capacitive properties of the nano structured CNFs electrodes using controlled solution chemistry. As a result, CNFs coated by DAAQ composite electrode showed relatively good electrochemical behaviors in acidic electrolyte system with respect to specific capacity and scan rate dependency.

• 전기전자학회논문지
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• 제13권2호
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• pp.126-131
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• 2009

Wrap-around 전계효과 트랜지스터는 채널과 전극간의 커플링을 매우 커서 채널길이가 짧아지면서 생기는 단채널효과(short channel effect)를 개선시킬 수 있는 이유로 많은 관심을 불러왔다. 본 논문에서는 실리콘 나노와이어를 이용하여 상향식의 wrap-around 전계효과 트랜지스터(FET)의 제작 공정을 소개한다. 소자의 제작 공정은 크게 전자빔 리소그래피, 유전영동(dielectrophoresis)을 이용한 나노와이어의 효과적 정렬 그리고 게이트 전극의 전기 화학적 도금(electrochemical deposition)을 이용한 생성 등의 방법들로 이루어진다. 전기 화학적 도금을 위한 용액은 독성을 띄지 않는 유기물 용액을 사용하였다. 액체 질소를 이용하여 polymethyl methacrylate(PMMA)가 전기화학적 도금시 형태를 잃지 않게 함으로써, 패터닝된 PMMA가 wrap-around 게이트 나노구조를 제작하기 위한 나노 템플릿으로 사용될 수 있도록 하였다.

• Journal of Microbiology and Biotechnology
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• 제18권1호
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• pp.145-152
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• 2008

A cell-based in vitro exposure system was developed to determine whether oxidative stress plays a role in the cytotoxic effects of volatile organic compounds (VOCs) such as benzene, toluene, xylene, and chlorobenzene, using human epithelial HeLa cells. Thin films based on cysteine-terminated synthetic oligopeptides were fabricated for immobilization of the HeLa cells on a gold (Au) substrate. In addition, an immobilized cell-based sensor was applied to the electrochemical detection of the VOCs. Layer formation and immobilization of the cells were investigated with surface plasmon resonance (SPR), cyclic voltammetry (CV), and electrochemical impedance spectroscopy (EIS). The adhered living cells were exposed to VOCs; this caused a change in the SPR angle and the VOC-specific electrochemical signal. In addition, VOC toxicity was found to correlate with the degree of nitric oxide (NO) generation and EIS. The primary reason for the marked increase in impedance was the change of aqueous electrolyte composition as a result of cell responses. The p53 and NF-${\kappa}B $ downregulation were closely related to the magnitude of growth inhibition associated with increasing concentrations of each VOC. Therefore, the proposed cell immobilization method, using a self-assembly technique and VOC-specific electrochemical signals, can be applied to construct a cell microarray for onsite VOC monitoring.

• 자원리싸이클링
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• 제16권6호
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• pp.52-60
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• 2007

탈질 특허분석과 전해기초연구를 통하여 수용액으로부터 질소의 환원제거에 대하여 조사하였다. 세계적으로 수용액으로부터 질소를 제거하는 방법으로 생물학적 기술과 산화환원 기술이 개발되고 있으며, 최근 들어 전해기술에 대한 특허출원도 증가하고 있다. 전해법에서 Fe를 음극으로 Pt를 양극으로 채택한 정전류 전해법에 의하여 1시간동안 총질소를 47% 이상 제거할 수 있었다. 질소함유 폐수를 처리하는 효율적인 방법은 폐수 특성에 맞는 기술의 조합이라고 말할 수 있다. 예를 들어 고농도 질소 함유 폐수를 소량 배출하는 경우 화학적 처리와 전해법의 조합으로 질산성 질소를 아질산성 질소로 일차 전환시켜 전해효율을 극대화시키면서 2차 오염원인 용해 금속이온을 전해과정에서 음극에 환원 회수하는 방법 등이 실용화에 유리하다고 말할 수 있다.