• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.592-595
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• 2000

The electron transport coefficients in $SF_6$+$N_2$ gas is analyzed in range of E/P values from 70~240(V/cm $Torr^{-1}$) at 2$0^{\circ}C$ by Boltzmann method that using set of electron collision cross sections determined by authors. The result of this Boltzmann simulation such as ionisation coefficient, attachment coefficient, effective ionisation coefficient and breakdown voltage are in nearly agreement with the respective experimental and theoretical for a range of E/P.