• Title/Summary/Keyword: EVAPORATION

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반도체 식각 공정용 초저온 냉각 시스템 설계를 위한 비가연성 혼합냉매 응축 및 비등 열전달 계수 측정 (Measurement of Condensation and Boiling Heat Transfer Coefficients of Non-flammable Mixed Refrigerant for Design of Cryogenic Cooling System for Semiconductor Etching Process)

  • 이천규;이정길
    • 반도체디스플레이기술학회지
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    • 제22권3호
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    • pp.119-124
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    • 2023
  • In this study, experimental approach of the measurement of condensation and evaporation heat transfer coefficients is discussed for mixed refrigerants using in the ultra low-temperature cooling system for semiconductor etching process. An experimental apparatus was described performing the condensation and evaporation heat transfer measurements for mixed refrigerants. The mixed refrigerant used in this study was composed of the optimal mixture determined in previous research, with a composition of Ar:R14:R23:R218 = 0.15:0.4:0.15:0.3. The experiments were conducted over a temperature range from -82℃ to 15℃ and at pressures ranging from 18.5 bar to 5 bar. The convection heat transfer coefficients of the mixed refrigerant were measured at flow rates corresponding to actual operating conditions. The condensation heat transfer coefficient ranged from approximately 0.7 to 0.9 kW/m2K, while the evaporation heat transfer coefficient ranged from 1.0 to 1.7 kW/m2K. The detailed discussion of the experimental methods, procedures, and results were described in this paper.

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Evaporation Pressure Drop Characteristics with R-22 in the Plate and Shell Heat Exchangers

  • Park, Jae-Hong;Seo, Moo-Gyo;Lee, Ki-Baik;Kim, Young-Soo
    • International Journal of Air-Conditioning and Refrigeration
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    • 제10권3호
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    • pp.129-137
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    • 2002
  • In this study, evaporation pressure drop experiments were conducted with two types of plate and shell heat exchangers (P&SHE) using R-22. An experimental refrigerant loop has been established to measure the evaporation pressure drop of R-22 in a vertical P&SHE. The flow channels were formed by stacking three plates having a corrugated channel of a chevron angle of 45 dog. The R-22 flows down in one channel exchanging heat with the hot water flowing up in the other channel. The effect of the refrigerant mass flux, average heat flux, system pressure and vapor quality were explored in detail. During the experiment, the quality change between the inlet and outlet of the refrigerant channel ranges from 0.03 to 0.15. The present data showed that two types of P&SHE have similar trends. The pressure drop in-creases with the vapor quality for both types of P&SHE. At a higher mass flux, the Pressure drop is higher for the entire range of the vapor quality. Also, the increase in the average heat flux increases the pressure drop. Finally, at a higher system pressure, the pressure drop is found to be slightly lower compared to the lower system pressure.

이산화탄소의 수직원관 내 상향유동 증발열전달 특성에 관한 연구 (A study on the characteristics of evaporation heat transfer of carbon dioxide flowing upward in a vertical smooth tube)

  • 김용진;조진민;김민수
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2217-2221
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    • 2007
  • Because of the ozone layer depletion and global warming, new alternative refrigerants are being developed. In this study, evaporation heat transfer characteristics of carbon dioxide flowing upward in a vertical tube have been investigated by experiment. Before the test section, a pre-heater is installed to adjust the inlet quality of the refrigerant to a desired value. A smooth tube with outer diameter of 5 mm and length of 1.44 m was selected as a test tube. The test was conducted at mass fluxes of 212 to 530 kg/$m^2s$, saturation temperature of -5 to 20$^{\circ}C$, and heat fluxes of 20 to 45 kW/$m^2$. As the vapor quality and mass fluxes increase, the heat transfer coefficients of carbon dioxide are decreased, and the heat transfer coefficients increase when the heat fluxes and saturation temperatures increase.

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나노 입자가 포함된 연료 액적의 분열 특성 연구 (Breakup Characteristics of Fuel Droplet Including Nanoparticles)

  • 이재빈;신동환;이민정;김남일;이성혁
    • 한국분무공학회지
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    • 제17권4호
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    • pp.192-196
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    • 2012
  • This paper reports on breakup characteristics of fuel droplet which includes metal nanoparticles. In order to develop a new injection system for nanoparticle-coated layers overcoming the conventional flame spray system, fundamental experiments were conducted to examine the interaction between a fuel droplet with nanoparticles and the external energy induced by the laser. In the experiments, this study used nickel nanoparticles whose size was under 100 nm to mix with kerosene as the fuel, and utilized a syringe pump and a metal needle to inject a fuel droplet. In particular, the Nd-YAG laser was adopted to give additional energy to the nanoparticles for evaporation of a fuel droplet containing nanoparticles. When the laser energy as 96 mJ was irradiated during the injection, it was observed that such an explosive evaporation occurred to break up a fuel droplet including nanoparticles, making the rapid increase in the ratio surface area to liquid volume. From this work, we suggest the possibility that the laser energy can be used for rapid evaporation of a fuel droplet.

연속적으로 누출되는 액체질소 풀의 확산에 관한 실험적 연구 (Experimental Study of Liquid Nitrogen Pool Spreading with Continuous Spill)

  • 최재환;김명배;최병일;김태훈
    • 에너지공학
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    • 제23권3호
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    • pp.174-180
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    • 2014
  • 연속적으로 누출되는 극저온 액체의 풀 확산을 액체질소를 사용하여 실험적으로 연구하였다. 본 실험을 위해 Cement mortar 재질의 Plate 위에 액체질소를 연속적으로 누출시켜 Plate 표면에서 풀 확산이 일어나도록 하였다. 전자저울을 이용하여 Plate 위에서 증발되는 액체질소의 단위면적당증발률을 측정했고, 시간에 따라 반경 방향으로 퍼지는 액체풀의 확산 거리는 열전대의 온도 변화로부터 측정하였다. 실험 결과 액체질소의 단위면적당증발률은 풀 확산이 진행될수록 감소하는 경향을 보였다.

전자빔 증착법에 의한 티타늄 전극 구조 염료 태양전지 제작에 관한 연구 (A Study on the Fabrication of Dye-Sensitized Solar Cells Consisting of Ti Electrodes by Electron-beam Evaporation Method)

  • 김윤기;심충환;김현규;성열문;김동현;이해준;박정후;이호준
    • 전기학회논문지
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    • 제59권4호
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    • pp.754-758
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    • 2010
  • In general, Dye-sensitized Solar Cells(DSCs) consist of the nanocrystalline titanium dioxide($TiO_2$) layer which is fabricated on a transparent conductive oxide(TCO) layer such as $F/SnO_2$ glass, a dye adhered to the $TiO_2$, an electrolyte solution and platinum-coated TCO. Among these components, two TCO substrates are estimated to be about 60% of the total cost of the DSCs. Currently novel TCO-less structures have been investigated in order to reduce the cost. In this study, TCO-less DSCs consisting of titanium electrodes were investigated. The titanium electrode is deposited on top of the porous $TiO_2$ layer using electron-beam evaporation process. The porosity of the titanium electrode was found out by the SEM analysis and dye adhesion. As a result, when the thickness of the titanium electrode increased, the surface resistance decreased and the conversion efficiency increased relatively.

액상/기상중 전기선 폭발법을 이용한 은 나노유체의 제조 및 특성평가에 관한 연구 (Synthesis and Characterization of Silver Nanofluid Using Pulsed Wire Evaporation Method in Liquid-Gas Mixture)

  • 김창규;이경자;이창규
    • 한국재료학회지
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    • 제19권9호
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    • pp.468-472
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    • 2009
  • The silver nanofluids were synthesized by the pulsed wire evaporation (PWE) method in a liquid-gas mixture. The size and microstructure of nanoparticles in the deionized water were investigated by a particle size analyzer (PSA), transmission electron microscope (TEM), and scanning electron microscope (SEM). Also, the synthesized nanofluids were investigated in order to assess the stability of dispersion of nanofluid by the zetapotential analyzer and dispersion stability analyzer. The results showed that the spherical silver nanoparticle formed in the deionized water and mean particle size was about 50 nm. Also, when explosion times were in the range of 20$\sim$200 times, the absolute value of zeta potential was less than -27 mV and the dispersion stability characteristic of low concentration silver nanofluid was better than the high concentration silver nanofluid by turbiscan.

김치냉장고 내의 유동 및 열전달 특성에 관한 수치해석 (A Numerical Study on the Flow and Heat Transfer Characteristics in a Kimchi Refrigerator)

  • 윤준원
    • 설비공학논문집
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    • 제15권12호
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    • pp.1078-1087
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    • 2003
  • Kimchi refrigerator is a household electric appliance developed with the wholly domestic technology for maturing and keeping kimchi. However, the principle of keeping is not yet revealed obviously. This numerical study has been conducted to investigate the flow and heat transfer characteristics in a kimchi refrigerator. The effects of arrangement variation of a evaporation tube are examined. Also, the heat transfer characteristics through the insulation material are discussed in detail. The flow and temperature field was simulated using the commercial code of CFX-5.3. A natural convection flow is formed through about 5/6 region from the bottom within the keeping space and accordingly, the 90% region of kimchi containers satisfies the temperature requirement with 0$\pm$0.5$^{\circ}C$. The stagnant flow exists in the upper 1/6 region of the keeping space and accordingly, the stratified high temperature distributions appear in the upper region of kimchi containers. The upward shift of the start location of a evaporation tube improves the temperature concentration toward $0^{\circ}C$ but the pitch variation is of no effect. The heat fluxes on the insulation surfaces show two-dimensional distributions with being higher toward the center. Through the variation of insulation thickness, 3.5% saving of insulation material is obtained under the same heat transfer rate.

DME FPSO 저장탱크의 액충전량에 따른 온도 및 압력변화에 대한 해석 연구 (Analytical Study on the Temperature and Pressure Changes in DME FPSO Storage Tank with Liquid Filling level)

  • 윤상국
    • Journal of Advanced Marine Engineering and Technology
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    • 제36권8호
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    • pp.1024-1029
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    • 2012
  • DME는 천연가스로부터 합성할 수 있는 대량의 미래 에너지원으로 한국가스공사는 이의 국내 공급을 위해 해외 자원 확보와 함께 해양에서 생산과 저장을 할 수 있는 FPSO의 건조를 추진하고 있다. 본 논문은 저장탱크 내부에서의 DME의 거동을 분석하여 제시함으로써 관련 기술자의 설계나 DME운영에 도움이 되고자 하였다. DME 증발량과 압력변화의 해석결과는 DME탱크 내 액체의 저장량이 증가할수록 증가하였다. 만선인 98%의 충전에서는 저장압력이 급격히 상승하게 되므로 하루 이상 장기간 저장하여야 할 경우는 만선저장을 피하는 것이 바람직하다.

강한 음향장에 구속된 고압 액적의 연소 (Unsteady Vaporization of Burning Droplet at High Pressure Environments With Linear Acoustic Mode)

  • 김성엽;신현호;윤웅섭
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.1122-1127
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    • 2004
  • an isolated droplet combustion exposed to pressure perturbations in stagnant gaseous environment is numerically conducted. Governing equations are solved for flow parameters at gas and liquid phases separately and thermodynamic parameters at the interfacial boundary are matched for problem closure. For high-pressure effects, vapor-liquid interfacial thermodynamics is rigorously treated. A series of parametric calculations in terms of mean pressure level and wave frequencies are carried out employing a n-pentane droplet in stagnant gaseous air. Results show that the operating pressure and driving frequency have an important role in determining the amplitude and phase lag of a combustion response. Mass evaporation rate responding to pressure waves is amplified with increase in pressure due to substantial reduction in latent heat of vaporization. Phase difference between pressure and evaporation rate decreases due to the reduced thermal inertia at high pressure. In addition to this, augmentation of perturbation frequency also enhances amplification of vaporization rate because the time period for the pressure oscillation is much smaller than the liquid thermal inertia time. The phase of evaporation rate shifts backward due to the elevated thermal inertia at high acoustic frequency.

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