• 천문학회보
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• 제40권1호
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• pp.85.1-85.1
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• 2015

We investigate the mass and energy of erupting plasma observed in X-rays and EUV, which is associated with a coronal mass ejection (CME) and an X-class flare. The erupting plasma was observed by both the X-ray telescope (XRT) on Hinode and the Atmospheric Imaging Assembly (AIA) on Solar Dynamic Observatory (SDO). We estimate the emission measures of the erupting plasma using a differential emission measure method. The plasma erupts with a loop-like structure in X-ray and EUV. We estimate the mass of erupting plasma assuming a cylinder structure. In addition, we estimate the radiative loss, thermal conduction, thermal, and kinetic energies of the eruptive hot plasma. We find that the thermal conduction timescale is much shorter than the duration of the eruption. This result implies that additional heating during the eruption may be required to explain the hot plasma observations in X-rays.

• 천문학회보
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• 제42권2호
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• pp.82.1-82.1
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• 2017

After a coronal mass ejection occur, plasma blobs are often observed along the post-CME ray. Searching for features related to the plasma blobs would be important in understanding their origin. We investigated the morphology of solar flares at EUV wavelengths, around the estimated times when blobs were formed. We focused on three events - 2013 September 21 and 22, 2015 March 7 and 8, and 2017 July 13 and 14 - observed by Atmospheric Imaging Assembly (AIA) aboard Solar Dynamic Observatory (SDO). Around the blob ejection times on 2013 September 21 and 22 and 2017 July 13 and14, we found regions with recurrent events of pronounced flux increase in EUV images. Around those of 2015 March 7 and 8, however, we could not observe such recurrent flux increase. This illustrates that even though blob ejections along different post-CME rays look similar in the high corona, the assocated features in the low corona may differ. We conclude that magnetic morphology and CME triggering process should be carefully examined in order to classify plasma blobs by their nature.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권1호
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• pp.61-69
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• 2014

With the extreme ultraviolet (EUV) lithography, the performance limit of chemically amplified resists has recently been extended to 16- and 11-nm nodes. However, the line edge roughness (LER) and the line width roughness (LWR) are not reduced automatically with this performance extension. In this paper, to investigate the impacts of the EUVL mask and the EUVL exposure process on LER, EUVL is modeled using multilayer-thin-film theory for the mask structure and the Monte Carlo (MC) method for the exposure process. Simulation results demonstrate how LERs of the mask transfer to the resist and the exposure process develops the resist LERs.

• Ocean and Polar Research
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• 제26권3호
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• pp.439-451
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• 2004

Total solar irradiance (750), total UV irradiunce (TUV) and erythemal UV irradiance (EUV) measured at King Sejong station $(62.22^{\circ}S,\;58.78^{\circ}W)$ in west Antarctica have been used together with total ozone, cloud amount and snow cover to examine the effects of ozone, cloud and snow surface on these surface solar inadiunce over the period of 1998-2003. The data of three solar components for each scan were grouped by cloud amount, n in oktas $(0{\leq}n<3,\;3{\leq}n<4,\;4{\leq}n<5,\;5{\leq}n<6,\;6{\leq}n<7\;and\;7{\leq}n<8)$ and plotted against solar zenith angle (SZA) over the range of $45^{\circ}\;to\;75^{\circ}$. The radiation amplification factor (RAE) is used to quantify ozone effect on EUV. RAF of EUV decreases from 1.51 to 0.94 under clear skies but increases from 0.94 to 1.85 under cloudy skies as SZA increases, and decreases from 1.51 to 1.01 as cloud amount increases. The effects of cloud amount and snow surface on EUV are estimated as a function of SZA and cloud amount after normalization of the data to the reference total ozone of 300 DU. In order to analyse the transmission of solar radiation by cloud, regression analyses have been performed for the maximum values of solar irradiance on clear sky conditions $(0{\leq}n<3)$ and the mean values on cloudy conditions, respectively. The maximum regression values for the clear sky cases were taken to represent minimum aerosol conditions fur the site and thus appropriate for use as a normalization (reference) factor for the other regressions. The overall features for the transmission of the three solar components show a relatively high values around SZAs of $55^{\circ}\;and\;60^{\circ}$ under all sky conditions and cloud amounts $4{\leq}n<5$ and $5{\leq}n<6$. The transmission is, in general, the largest in TUV and the smallest in EUV among the three components of the solar irradiance. If the ground is covered with snow on partly cloudy days $(6{\leq}n<7)$, EUV increases by 20 to 26% compared to snow-free surface around SZA $60^{\circ}-65^{\circ}$, due to multiple reflections and scattering between the surface and the clouds. The relative difference between snow surface and snow-free surface slowly increases from 9% to 20% as total ozone increases from 100 DU to 400 DU under partly cloud conditions $(3{\leq}n<6)$ at SZA $60^{\circ}$. The snow effects on TUV and TSO are relatively high with 32% and 34%, respectively, under clear sky conditions, while the effects changes to 36% and 20% for TUV and TSO, respectively, as cloud amount increases.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.295-295
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• 2008

• 광학과기술
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• 제12권1호
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• pp.11-16
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• 2008

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.475-475
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• 2010

We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

• 천문학회보
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• 제37권1호
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• pp.97-97
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• 2012

Hinode/XRT has observed coronal mass ejections (CMEs) since it launched on Sep. 2006. Observing programs of Hinode/XRT, called 'CME watch', perform several binned observations to obtain large FOV observations with long exposure time that allows the detection of faint CME plasmas in high temperatures. Using those observations, we determine the upper limit to the mass of hot CME plasma using emission measure by assuming the observed plasma structure. In some events, an associated prominence eruption and CME plasma were observed in EUV observations as absorption or emission features. The absorption feature provides the lower limit to the cold mass while the emission feature provides the upper limit to the mass of observed CME plasma in X-ray and EUV passbands. In addition, some events were observed by coronagraph observations (SOHO/LASCO, STEREO/COR1) that allow the determination of total CME mass. However, some events were not observed by the coronagraphs possibly because of low density of the CME plasma. We present the mass constraints of CME plasma and associated prominence as determined by emission and absorption in EUV and X-ray passbands, then compare this mass to the total CME mass as derived from coronagraphs.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.252-253
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• 2009

In this study, the deformation and etch characteristics of ArF and EUV photoresists were compared in a dual frequency superimposed capacitively coupled plasma (DFS-CCP) etcher systems using $CF_{4}/O_{2}/Ar$ and $CF_{4}/CHF_{3}/O_{2}/Ar$ mixture gas chemistry which are typically used for BARC open and $Si_{3}N_{4}$ teching chemistry, respectively. Etch rate of the resists tend to increase with low-frequency source power ($P_{LF}$) and high-frequency source ($f_{HF}$). The etch rate of ArF resist was hgither than that of EUV resist.

• 천문학회보
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• 제37권2호
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• pp.110.1-110.1
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• 2012

We studied the source regions of 12 solar energetic particle (SEP) events seen between 2010 August and 2012 January at STEREO-A, B and ACE, when the two STEREO spacecraft were separated by about $180^{\circ}$. All events were associated with strong flares (C1 - X6) and fast coronal mass ejections (CMEs) accompanied by type II radio bursts. We have determined the arrival times of the SEP events at the three spacecraft. EUV waves observed in $195{\AA}$ and $193{\AA}$ channels of STEREO and SDO/AIA are tracked across the Sun and the arrival time of the EUV wave at the photospheric source of open field lines extending to the spacecraft connection points at 2.5 Rsun estimated. We found 7 events with flux enhancements in all spacecraft and 4 in two spacecraft. Most events came from a single source. The results show that magnetic field connections between source regions and the spacecraft play an important role in abrupt flux enhancements. In the most cases, EUV waves at the Sun are associated with a wide longitudinal spread of the SEPs.