• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.105-106
• /
• 2010

• Transactions of Materials Processing
• /
• v.13 no.3
• /
• pp.253-261
• /
• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.6
• /
• pp.694-700
• /
• 2011

Since polycrystalline diamond (PCD) has high hardness like diamond, it has been used as tool material for lathe and milling of non-ferrite material. A micro tool fabricated from PCD material can be used for micro machining of hard material such as tungsten carbide, glass, and ceramics. In this paper, micro PCD tools were fabricated by micro EDM (electrical discharge machining) and used for micro grinding of glass. Craters generated on the tool surface by EDM spark work as like grits in grinding process. The effects of tool shapes, tool roughness and PCD grain size were investigated. Also studied was a hybrid process combining electrochemical discharge machining (ECDM) and micro grinding for micro-structuring of glass.