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The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.105-105
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    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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An Ultrastructural Study on the Duodenal Enterochromaffin Cells of Rabbit after Bile Duct Ligation (총담관 결찰후 집토끼 십이지장내 Enterochromaffin Cell의 미세구조적 변화)

  • Lee, Sang-Eun;Ko, Jeong-Sik;Yang, Nam-Gil;Ahn, E-Tay;Park, Kyung-Ho
    • Applied Microscopy
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    • v.20 no.1
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    • pp.36-50
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    • 1990
  • This experiment was performed to study the morphological responses of the enterochromaffin cells in the duodenal mucosa of rabbit following bile duct ligation. Adult male rabbits were divided into normal, sham operation and experimental groups. Bile duct ligation was performed under ether anesthesia and animals were sacrificed on the 1st, 3rd, 5th, 7th and 14th day after operation. Mucosal specimens from the duodenum were prefixed with 2.5% glutaraldehyde-1.5% paraformaldehyde(0.1M Millonig's phosphate buffer, pH 7.3), followed by postfixation with 1% osmium tetroxide(0.1M Millonig's phosphate buffer, pH 7.3), and embedded within araldite mixture. The sections were cut on a LKB-V ultratome, and observed under a JEM 100CX II electron miroscope. The results were as follow; 1. Irregularities of the nuclei of the enterochromaffin cells were noticed from the 1st day after bile duct ligation, and concentration of the chromatin in the nucleus was more frequently observed on the 7th and the 14th day. 2. The granular endoplasmic reticulum and Golgi complex of the enterochromaffin cell were more developed than those of the normal on the 1st day after bile duct ligation, but they showed poor organization from the 3rd day. 3. Amount of the microfilaments in the enterochromaffin cell was significantly increased from the 5th day after bile duct ligation and they were more frequently observed in the vicinity of the nucleus. 4. Vacuoles with various electron densities in the enterochromaffin cell were increased in number from the 3rd day after bile duct ligation. 5. Glycogen-like particles in the enterochromaffin cell were frequently observed on the 3rd and the 5th day after bile duct ligation. 6. In the early stage of the ligation of bile duct, in the enterochromaffin cells, well developed intracellular organelles, such as granular endoplasmic reticulum and Golgi apparatus were pronounced. But, in the later stage, the cells contained poor organelles, with the some structural sign of necrotic change.

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IDENTIFICATION OF FUSOBACTERIUM NUCLEATUM AND FUSOBACTERIUM NECROPHORUM USING POLYMERASE CHAIN REACTION(PCR) (중합효소연쇄반응(Polymerase Chain Reaction)을 이용한 Fusobacterium nucleatum 및 Fusobacterium necrophorum의 동점에 관한 연구)

  • Kang, Chang-Woo;Park, Dong-Sung;Yoon, Soo-Han
    • Restorative Dentistry and Endodontics
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    • v.24 no.1
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    • pp.40-48
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    • 1999
  • This study was designed to examine the specificities of the designed primers for F. nucleatum and F. necrophorum and to compare the PCR results using clinical samples with those of the anaerobic culture method. F. nucleatum and F. necrophorum spp. are frequently isolated in infected root canals, and they are related to periapical diseases. F. nucleatum(VPI 10197) and F. necrophorum(ATCC 25286) were used as references for PCR reaction, and thirty five teeth with one canal and periapical lesion were used. The samples were cultured anaerobically and identified using Rapid ID 32A(BioMerieux Vitek, Inc., France) as biochemical battery. In the GenBank database, species-specific PCR primers(nuc1/nuc2 primers for F. nucleatum and nec1/nec2 primers for F. necrophorum) were designed from the 16S ribosomal DNA(rDNA) sequences of F. nucleatum(accession number M58683) and F. necrophorum(accession number AF044948). PCR procedures of F. nucleatum(VPI 10197) and F. necrophorum (ATCC 25286) were simulated on a computer software. Amplify(v.1.2${\beta}$ for Macintosh). 820 bps and 817 bps of nucleotides were expected, respectively. Using extracted DNAs with QiaAmp tissue kit(Qiagen co., Germany), PCR was done. The results were as follows : 1. The nuc1/nuc2 primers produced an amplicon of 820 bps and the nec1/nec2 primers produced an amplicon of 817 bps. 2. The nuc1/nuc2 primers and the nec1/nec2 primers were specific and did not react with species other than the designated ones(i.e. nuc1/nuc2 primers did not produce amplicons for F. necrophorum, and vice versa.). And the PCR products of Porphyromonas endodontalis(ATCC 35406), Porphyromonas gingivalis(ATCC 33277), Prevotella intermedia(ATCC 25611), and Prevotella nigrescens(ATCC 33563), frequently isolated in infected root canals and periapical lesions, were not amplified by the primers specific for Fusobacterium nucleatum and Fusobacterium necrophorum. 3. This method utilizing PCR could detect F. nucleatum and F. necrophorum in clinical samples, while anaerobic culture method could detect neither.

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The Effect of Substrate Temperature on the Electrical, Electronic, Optical Properties and the Local Structure of Transparent Nickel Oxide Thin Films

  • Lee, Kangil;Kim, Beomsik;Kim, Juhwan;Park, Soojeong;Lee, Sunyoung;Denny, Yus Rama;Kang, Hee Jae;Yang, Dong-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.397-397
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    • 2013
  • The electrical, electronic, optical properties and the local structure of Nickel Oxide (NiO) thin film have been investigated by X-ray photoelectron spectroscopy (XPS), Reflection Electron Energy Loss Spectroscopy (REELS), UV-spectrometer,Hall Effect measurement and X-ray absorption spectroscopy (XAS). The XPS results show that the Ni 2p spectra for all films consist of $Ni2p_{3/2}$ at around 854.5 eV which indicate the presence of Ni-O bond from NiO phase and for the annealed film at temperature above $200^{\circ}C$ shows the coexist Ni oxide and Ni metal phase. The REELS spectra showed that the band gaps of the NiO thin films were abruptly decreased with increasing temperature. The values of the band gaps are consistent with the optical band gaps estimated by UV-Spectrometer. The optical transmittance spectra shows that the transparency of NiO thin films in the visible light region was deteriorated with higher temperature due to existence of $Ni^0$. Hall Effect measurement suggest that the NiO thin films prepared at relatively low temperatures (RT and $100^{\circ}C$) are suitable for fabricating p-type semiconductor which showed that the best properties was achieved at $100^{\circ}C$, such as a low resistivity of $7.49{\Omega}.cm$. It can be concluded that the annealing process plays a crucial role in converting from p type to n type semiconductor which leads to reducing electrical resistivity of NiO thin films. Furthermore, the extended X-ray absorption fine structure (EXAFS) spectrum at the Ni K-edge was used to address the local structure of NiO thin films. It was found that the thermal treatments increase the order in the vicinity of Ni atom and lead the NiO thin films to bunsenite crystal structure. Moreover, EXAFS spectra show in increasing of coordination number for the first Ni-O shell and the bond distance of Ni-O with the increase of substrate temperature.

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Improvement of Somatic Cell Nuclear Transfer Technology for the Production of Disease Model Mouse: I. Optimization of Oocyte Enucleation and Reconstruction (질환모델마우스 생산을 위한 체세포핵이식방법 개선; I. 탈핵 및 재조합난자 생산기법 최적화)

  • Jun, S. H.;Shim, H. S.;Chung, H. M.;Lee, B. C.;Lee, E. S.;Ko, J. J.;Shin, T.;Park, C.;Hwang, W. S.;Cha, K. Y.;Lim, J. M.
    • Journal of Embryo Transfer
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    • v.15 no.3
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    • pp.247-253
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    • 2000
  • This study was undertaken to optimize enucleation and reconstitution methods for the production of cloned mice by somatic cell nuclear transfer Outbred ICR mouse oocytes at the metapahse- II stage were retrieved from female mice superovulated by PMSG and hCG. In Experiment 1, oocytes were enucleated in medium supplemented with cytochalasin B (CCB) of 3 levels (0, 7.5 or 15 $\mu\textrm{g}$/mL), and higher rate of encleation was obtained at 7.5 and 15 $\mu\textrm{g}$/mL than at $\mu\textrm{g}$/mL. In Experiment 2, oocytes enucleated in 7.5 $\mu\textrm{g}$/mL CCB-containing medium were reconstituted with different types of somatic cell by following methods; 1) cumulus cells by direct cell injection, 2) cumulus cells by electric fusion (1.25 kV/cm, 2 pulses for each 70 $mutextrm{s}$) or 3) STO cells by the electrofusion. Electrofusion of STO cells with enucleated oocytes yielded the greatest (P<0.05) rate of reconstitution without lysis (76%) than any other combinations. Although significant decrease in the rate of somatic cell introduction was found, the electrofusion of cumulus cells yielded better rate of reconstitution than direct injection (0 vs. 18%). In Experiment 3, the duration of electric stimulation for the fusion was changed to either 50 $mutextrm{s}$ or 90 $mutextrm{s}$, but no significant improvement of reconstitution efficacy was obtained. In conclusion, this study showed that ICR mouse oocytes could be used for the production of reconstituted oocytes and a fusion method of 1.25 KV/cm with 2 pulses using 570 cell was the optimal.

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Hypoglycemic Effects of Atractylodis Rhizoma in Rats with Streptozotocin-Induced Hyperglycemia (Streptozotocin에 의해 고혈당을 유발시킨 흰쥐에 미치는 Atractrylodis Rhizoma의 영향에 관한 실험적 연구)

  • Kim, Yung-Hi;Song, Dong-Keun;Wie, Myung-Bok
    • The Korean Journal of Pharmacology
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    • v.24 no.1
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    • pp.125-134
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    • 1988
  • A single i.v. dose of streptozotocin (65 mg/kg) given to rats has produced a marked hyper-glycemia (>500 mg serum glucose/dl). Since the Atractylodis Rhizoma is known to have hypo-glycemic action, the water extracts of Atractylodis Rhizoma (ARWE) was given to the streptozotocin-induced (SZ) hyperglycemic rats. To determine whether ARWE has the anti-hyperglycemic effects, two different daily doses of ARWE (i.e.0.2 g/kg and 2.0 g/kg) were given orally to the SZ rats for up to 8 days. Thereupon, serum levels of glucose, insulin, amylase and cholesterol were determined on days 1, 3 and 8, following the initial and repeated daily administrations of ARWE. On day 8, glycogen content and glucose-6-phosphatase activity in the liver were assayed. Results showed that ARWE decreased the serum glucose levels, which had been markedly elevated by the SZ pre-treatment. In support of this, the serum insulin level, which had been quickly lowered by the SZ pre-treatment $(20{\mu}U/ml)$, was quickly elevated in the ARWE dose dependent manner that, at 2.0 g/kg ARWE, the serum insulin level was increased $(20{\mu}U/ml)$ above the normal level $(42{\mu}U/ml)$. Also, the serum amylase level, which was steadily decreasing after the SZ pre-treatment, was restored to the normal level folowing 8 day of ARWE (2.0 g/kg) treatment. Hepatic glycogen content and glucose-6-phosphatase activity, which decreased and increased, respectively in the 52 treatment group, were restored toward the normal level in SZ plus ARWE group.

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Use of a Gelatin Film Containing Grapefruit Seed Extract in the Packaging of Strawberries (자몽종자 추출물을 함유한 젤라틴 필름의 딸기에의 포장 적용)

  • Lim, Geum-Ok;Jang, Sung-Ae;Kim, Ju-Yeon;Kim, Hyun-Jin;Song, Kyung-Bin
    • Food Science and Preservation
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    • v.17 no.2
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    • pp.196-201
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    • 2010
  • Gelatin films containing grapefruit seed extract (GSE) were prepared by incorporating different amounts (0, 0.6, and 1.0%, w/v) of GSE into film-forming solutions. Film elongation was improved by the addition of GSE, but film tensile strength decreased to 31.96 MPa for film containing 1.0% GSE, compared with 46.39 MPa for the control. Incorporation of 1.0% GSE inhibited the growth of pathogenic bacteria such as Escherichia coli O157:H7 and Listeria monocytogenes. Packaging of strawberries with a gelatin film containing 1.0% GSE decreased the levels of total aerobic bacteria and yeast/molds after 12 days of storage by 1.60 and 1.43 log CFU/g, respectively, compared with control values. Sensory evaluation results indicated that packaging of strawberries with GSE-gelatin film resulted in better sensory scores than those of the control. These results indicate that strawberries can be packaged using gelatin film containing GSE, to extend shelf-life.

A Study on the Horizontal Consolidation and Permeability Characteristics of Decomposed Mudstone Soil in Pohang (이암풍화토의 횡방향압밀 및 투수특성)

  • 김영수;김기영;백영식
    • Journal of the Korean Geotechnical Society
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    • v.16 no.1
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    • pp.31-42
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    • 2000
  • Consolidation and permeability are major engineering properties of soil. In clay, coefficient of permeability and consolidation can be calculated by incremental loading consolidation test. However, it is known that the incremental loading test has several deficiencies including long testing time, non-uniform stress state, very soft clay and problem of back pressure saturation. Specially, it is not performed with horizontal consolidation test. Several methods have been proposed for obtaining reliable values of $C_v$. Among these, the square root of time-fitting method proposed by Taylor(1948) and logarithm of time-fitting method, also called Casagrande's method, are used extensively in soil engineering practice. But these methods are not amenable for the absence of initial linear portion and have the difficulties involved in distinguishing secondary compression from primary compression. Rowecell consolidation tests were carried out in this study with different trimming axis and sample size. The results were compared with those of other methods; Casagrande,$Taylor,\; Casagrande,\; Hyperbolic,\; \delta/t-logt$. From the results, we explained a relationship between horizontal coefficient of permeability and void ratio was obtained. Finally, the directly measured horizontal coefficient of permeability obtained by using the Rowecell was compared with the permeability derived indirectly from the consolidation test result.

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Temperature Dependence on Dry Etching of $ZrO_2$ Thin Films in $Cl_2/BCl_3$/Ar Inductively Coupled Plasma ($Cl_2/BCl_3$/Ar 유도 결합 플라즈마에서 온도에 따른 $ZrO_2$ 박막의 식각)

  • Yang, Xue;Kim, Dong-Pyo;Lee, Cheol-In;Um, Doo-Seung;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.145-145
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    • 2008
  • High-k materials have been paid much more attention for their characteristics with high permittivity to reduce the leakage current through the scaled gate oxide. Among the high-k materials, $ZrO_2$ is one of the most attractive ones combing such favorable properties as a high dielectric constant (k= 20 ~ 25), wide band gap (5 ~ 7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2$/Si structure. During the etching process, plasma etching has been widely used to define fine-line patterns, selectively remove materials over topography, planarize surfaces, and trip photoresist. About the high-k materials etching, the relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Among several etching techniques, we chose the inductively coupled plasma (ICP) for high-density plasma, easy control of ion energy and flux, low ownership and simple structure. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. During the etching process, the wafer surface temperature is an important parameter, until now, there is less study on temperature parameter. In this study, the etch mechanism of $ZrO_2$ thin film was investigated in function of $Cl_2$ addition to $BCl_3$/Ar gas mixture ratio, RF power and DC-bias power based on substrate temperature increased from $10^{\circ}C$ to $80^{\circ}C$. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by scanning emission spectroscope (SEM). The chemical state of film was investigated using energy dispersive X-ray (EDX).

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