• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.147-154
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• 2005

A precision hi-directional actuator for a high precision leveling system with $Z{\Theta}_x{\Theta}_y$ motions is proposed and designed in this paper. The actuator is composed of a force generation structure, a guide mechanism, and a symmetric structure. At first, its driving force is generated by a change of flux in air gaps by permanent and changeable flux. The permanent flux is generated by a permanent magnet. The changeable flux is created by variable current flowing through coil. The combination of permanent and changeable flux makes various flux densities in air gaps between moving part and fixed yokes. And then, the difference between flux densities in lower and upper gaps creates forces fur the $bi-direction({\pm}z)$ motion. The guide mechanism of this actuator is composed of two circular plates and one shaft. Reducing motions generated by forces except z-motion, these circular plates endow the actuator with high stiffness for fast settling time. And the function of the shaft is to transfer motion to an object. At last, total body has a symmetric structure to be stable on thermal error. The actuator is designed by MAXWELL 2D and ProMECHANICA. The designed actuator is evaluated by 8nm laser doppler vibrometer, dynamic signal analyzer, and simple PID controller.

• Imaging Science in Dentistry
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• v.32 no.3
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• pp.159-165
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• 2002

Purpose: The aim of this study was to introduce a method of obtaining the oscillation graphs of the dental x-ray tube heads relative to time using an accelerometer. Materials and Methods: An Accelerometer, Piezotron type 8704B25 (Kistler Instrument Co., Amherst, NY, USA) was utilized to measure the horizontal oscillation of the x-ray tube head immediately after positioning the tube head for an intraoral radiograph. The signal from the sensor was transferred to a dynamic signal analyzer, which displayed the magnitude of the acceleration on the Y-axis and time lapse on the X -axis. The horizontal oscillation of the tube head was measured relative to time, and the settling time was also determined on the basis of the acceleration graphs for 6 wall type, 5 floor-fixed type, and 4 mobile type dental x-ray machines. Results : The oscillation graphs showed that tube head movement decreased rapidly over time. The settling time varied with x-ray machine types. Wall-type x-ray machines had a settling time of up to 6 seconds, 5 seconds for fixed floor-types, and 1 I seconds for the mobile-types. Conclusion: Using an accelerometer, we obtained the oscillation graphs of the dental x-ray tube head relative to time. The oscillation graph with time can guide the operator to decide upon the optimum exposure moment after x-ray tube head positioning for better radiographic resolution.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1621-1622
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• 2006

This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristic s were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink droplet. The head design was carried out by using mechanical simulation. The printhead has been fabricated with Si(100) and SOI wafers by MEMS process and silicon direct bonding method. To investigate how performance of the piezoelectric ceramic actuator influences on droplet diameter and droplet velocity, the method of stroboscopy was used. Also we observed the movement characteristics of PZT actuator with LDV(Laser Doppler Vibrometer) system, oscilloscope and dynamic signal analyzer. Missing nozzles caused by bubbles in chamber were monitored by their resonance frequency. Using the water based ink of viscosity of 4.8 cps and surface tension of 0.025N/m, it is possible to eject stable droplets up to 20kHz, 4.4m/s and above 8pL at the different applied driving waveforms.